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Class Information
Number: 438/486
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization
Description: Process having a step of depositing an amorphous semiconductor layer combined with the subsequent crystallization of the amorphous semiconductor layer.










Sub-classes under this class:

Class Number Class Name Patents
438/487 Utilizing wave energy (e.g., laser, electron beam, etc.) 850


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

Patent Number Title Of Patent Date Issued
8703589 Flat panel display and method of manufacturing the same Apr. 22, 2014
8704229 Partial poly amorphization for channeling prevention Apr. 22, 2014
8691671 Planar nonpolar group-III nitride films grown on miscut substrates Apr. 8, 2014
8685826 Method for manufacturing nano-crystalline silicon material from chloride chemistries for the semiconductor integrated circuits Apr. 1, 2014
8673750 Single crystal silicon TFTs made by lateral crystallization from a nanowire seed Mar. 18, 2014
8658520 Method of manufacturing semiconductor device Feb. 25, 2014
8642402 Thin film transistor manufacturing method, thin film transistor, thin film transistor substrate and image display apparatus, image display apparatus and semiconductor device Feb. 4, 2014
8633480 Semiconductor device having an oxide semiconductor with a crystalline region and manufacturing method thereof Jan. 21, 2014
8629011 Epitaxial silicon CMOS-MEMS microphones and method for manufacturing Jan. 14, 2014
8624319 Inducement of strain in a semiconductor layer Jan. 7, 2014
8609478 Method for manufacturing semiconductor device Dec. 17, 2013
8598017 Fiber SOI substrate, semiconductor device using this, and manufacturing method thereof Dec. 3, 2013
8592832 Organic light emission diode display device and method of fabricating the same Nov. 26, 2013
8558294 Semiconductor device and fabrication process thereof Oct. 15, 2013
8546247 Manufacturing method of semiconductor device with amorphous silicon layer formation Oct. 1, 2013
8546248 Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same Oct. 1, 2013
8530341 Method of manufacturing organic light emitting diode display Sep. 10, 2013
8518837 Method of producing nanopatterned articles using surface-reconstructed block copolymer films Aug. 27, 2013
8513040 Method for manufacturing display device Aug. 20, 2013
8492250 Method for fabricating semiconductor device Jul. 23, 2013
8455337 Crystallization apparatus, crystallization method, method of manufacturing thin film transistor and method of manufacturing organic light emitting display apparatus Jun. 4, 2013
8445364 Methods of treating semiconducting materials including melting and cooling May. 21, 2013
8445365 Single scan irradiation for crystallization of thin films May. 21, 2013
8441018 Direct bandgap substrates and methods of making and using May. 14, 2013
8435850 Localized compressive strained semiconductor May. 7, 2013
8426296 Systems and methods for preparing epitaxially textured polycrystalline films Apr. 23, 2013
8420513 Method of fabricating thin film transistor Apr. 16, 2013
8415187 Large-grain crystalline thin-film structures and devices and methods for forming the same Apr. 9, 2013
8411713 Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and structure of such film regions Apr. 2, 2013
8399307 Interconnects for stacked non-volatile memory device and method Mar. 19, 2013
8394194 Single crystal reo buffer on amorphous SiO.sub.x Mar. 12, 2013
8389342 Method for manufacturing a semiconductor device Mar. 5, 2013
8389996 Method for forming semiconductor film, method for forming semiconductor device and semiconductor device Mar. 5, 2013
8383452 Semiconductor device and method for manufacturing the same Feb. 26, 2013
8367527 Method of fabricating polycrystalline silicon thin film Feb. 5, 2013
8367486 Transistor and method for manufacturing the transistor Feb. 5, 2013
8357595 Semiconductor substrate with solid phase epitaxial regrowth with reduced depth of doping profile and method of producing same Jan. 22, 2013
8357596 Method of forming a polycrystalline silicon layer and method of manufacturing thin film transistor Jan. 22, 2013
8357597 Process for producing Si.sub.(1-v-w-x)C.sub.wAl.sub.xN.sub.v base material, process for producing epitaxial wafer, Si.sub.(1-v-w-x)C.sub.wAl.sub.xN.sub.v base material, and epitaxial wafer Jan. 22, 2013
8349714 Method of crystallizing semiconductor film and method of manufacturing semiconductor device Jan. 8, 2013
8349713 High speed laser crystallization of particles of photovoltaic solar cells Jan. 8, 2013
8338278 Method of manufacturing semiconductor device with crystallized semiconductor film Dec. 25, 2012
8334194 Methods and apparatus for manufacturing semiconductor wafers Dec. 18, 2012
8329520 Method for manufacturing semiconductor device using a laser annealing process Dec. 11, 2012
8324086 Method for manufacturing a semiconductor substrate by laser irradiation Dec. 4, 2012
8318575 Compressive polycrystalline silicon film and method of manufacture thereof Nov. 27, 2012
8309474 Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabrication Nov. 13, 2012
8297991 Exposure device, exposure method and method of manufacturing semiconductor device Oct. 30, 2012
8293626 Method for manufacturing semiconductor device Oct. 23, 2012
8294158 Thin film transistor, method of fabricating the same, and organic light emitting diode display device including the thin film transistor Oct. 23, 2012

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17










 
 
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