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Class Information
Number: 438/486
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization
Description: Process having a step of depositing an amorphous semiconductor layer combined with the subsequent crystallization of the amorphous semiconductor layer.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622370 |
Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and a structure of such film regions |
Nov. 24, 2009 |
| 7619251 |
Laser crystallization method suppressing propagation of cracks forming a display device |
Nov. 17, 2009 |
| 7618852 |
Phase transition method of amorphous material using cap layer |
Nov. 17, 2009 |
| 7615502 |
Laser anneal of vertically oriented semiconductor structures while maintaining a dopant profile |
Nov. 10, 2009 |
| 7612379 |
Multi-gate thin film transistor having recrystallized channel regions with different grain sizes |
Nov. 3, 2009 |
| 7608529 |
Method for selective laser crystallization and display panel fabricated by using the same |
Oct. 27, 2009 |
| 7608522 |
Method for fabricating a hybrid orientation substrate |
Oct. 27, 2009 |
| 7608869 |
Thin film transistor and method of fabricating the same |
Oct. 27, 2009 |
| 7605029 |
Method of manufacturing semiconductor device |
Oct. 20, 2009 |
| 7601565 |
Thin film transistor and method of fabricating the same |
Oct. 13, 2009 |
| 7601618 |
Method for producing semi-conditioning material wafers by moulding and directional crystallization |
Oct. 13, 2009 |
| 7575985 |
Method of fabricating semiconductor device |
Aug. 18, 2009 |
| 7569793 |
Sequential lateral solidification device and method of crystallizing silicon using the same |
Aug. 4, 2009 |
| 7566625 |
Semiconductor device manufacturing method, heat treatment apparatus, and heat treatment method |
Jul. 28, 2009 |
| 7563698 |
Method for manufacturing semiconductor device |
Jul. 21, 2009 |
| 7563658 |
Method for manufacturing semiconductor device |
Jul. 21, 2009 |
| 7560321 |
Crystallization method, thin film transistor manufacturing method, thin film transistor, display, and semiconductor device |
Jul. 14, 2009 |
| 7556993 |
Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus |
Jul. 7, 2009 |
| 7557375 |
Method for fabricating crystalline silicon |
Jul. 7, 2009 |
| 7557020 |
Method for fabricating thin film transistor using metal catalyst layer |
Jul. 7, 2009 |
| 7553714 |
Method of manufacturing thin film transistor having polycrystalline silicon layer, thin film transistor manufactured using the method and flat panel display comprising the thin film transistor |
Jun. 30, 2009 |
| 7550369 |
Method for fabricating low-defect-density changed orientation Si |
Jun. 23, 2009 |
| 7544550 |
Method of fabricating semiconductor device and semiconductor fabricated by the same method |
Jun. 9, 2009 |
| 7544591 |
Method of creating isolated electrodes in a nanowire-based device |
Jun. 9, 2009 |
| 7538011 |
Method of manufacturing a semiconductor device |
May. 26, 2009 |
| 7538014 |
Method of producing crystalline semiconductor material and method of fabricating semiconductor device |
May. 26, 2009 |
| 7534714 |
Radial temperature control for lattice-mismatched epitaxy |
May. 19, 2009 |
| 7534704 |
Thin layer structure and method of forming the same |
May. 19, 2009 |
| 7528056 |
Low-cost strained SOI substrate for high-performance CMOS technology |
May. 5, 2009 |
| 7524740 |
Localized strain relaxation for strained Si directly on insulator |
Apr. 28, 2009 |
| 7524712 |
Method for manufacturing a semiconductor device and laser irradiation method and laser irradiation apparatus |
Apr. 28, 2009 |
| 7521303 |
Method of crystallizing amorphous semiconductor thin film and method of fabricating poly crystalline thin film transistor using the same |
Apr. 21, 2009 |
| 7514306 |
Method for manufacturing semiconductor device |
Apr. 7, 2009 |
| 7507645 |
Method of forming polycrystalline semiconductor layer and thin film transistor using the same |
Mar. 24, 2009 |
| 7507648 |
Methods of fabricating crystalline silicon film and thin film transistors |
Mar. 24, 2009 |
| 7504325 |
Laser doping processing method and method for manufacturing semiconductor device |
Mar. 17, 2009 |
| 7501331 |
Low-temperature metal-induced crystallization of silicon-germanium films |
Mar. 10, 2009 |
| 7488633 |
Method for forming polysilicon by illuminating a laser beam at the amorphous silicon substrate through a mask |
Feb. 10, 2009 |
| 7485553 |
Process for manufacturing a semiconductor device |
Feb. 3, 2009 |
| 7485552 |
Thin film transistor and method of fabricating the same |
Feb. 3, 2009 |
| 7482253 |
Fusing nanowires using in situ crystal growth |
Jan. 27, 2009 |
| 7482274 |
Metal wiring and method of manufacturing the same, and metal wiring substrate and method of manufacturing the same |
Jan. 27, 2009 |
| 7476600 |
FET gate structure and fabrication process |
Jan. 13, 2009 |
| 7476901 |
Poly-silicon thin film transistor array substrate and method for fabricating the same |
Jan. 13, 2009 |
| 7473621 |
Producing method for crystalline thin film |
Jan. 6, 2009 |
| 7462517 |
Electro-optical device and semiconductor circuit |
Dec. 9, 2008 |
| 7459355 |
Drive circuit of active matrix device and manufacturing method thereof |
Dec. 2, 2008 |
| 7452791 |
Crystalline semiconductor film, method of manufacturing the same, and semiconductor device |
Nov. 18, 2008 |
| 7452790 |
Method of fabricating thin film transistor |
Nov. 18, 2008 |
| 7452762 |
Thin film transistor and method of fabricating the same |
Nov. 18, 2008 |
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