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Class Information
Number: 438/485
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > Deposition utilizing plasma (e.g., glow discharge, etc.)
Description: Process utilizing a plasma or glow discharge during the deposition of the semiconductive material.










Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8703586 Apparatus for forming deposited film and method for forming deposited film Apr. 22, 2014
8704445 Method for improving uniformity of high-frequency plasma discharge by means of frequency modulation Apr. 22, 2014
8658522 Methods and apparatus for incorporating nitrogen in oxide films Feb. 25, 2014
8652944 Method for making side growth semiconductor nanowires and transistors obtained by said method Feb. 18, 2014
8633094 GaN high voltage HFET with passivation plus gate dielectric multilayer structure Jan. 21, 2014
8631762 Plasma CVD apparatus, method for manufacturing semiconductor film, method for manufacturing thin-film solar cell, and method for cleaning plasma CVD apparatus Jan. 21, 2014
8623471 Plasma treatment system Jan. 7, 2014
8609519 Combinatorial approach for screening of ALD film stacks Dec. 17, 2013
8597969 Manufacturing method for optical semiconductor device having metal body including at least one metal layer having triple structure with coarse portion sandwiched by tight portions of a same ma Dec. 3, 2013
8551871 Method of fabricating semiconductor device Oct. 8, 2013
8501631 Plasma processing system control based on RF voltage Aug. 6, 2013
8486222 Substrate processing apparatus and method of manufacturing a semiconductor device Jul. 16, 2013
8455268 Gate replacement with top oxide regrowth for the top oxide improvement Jun. 4, 2013
8450139 Method for manufacturing photoelectric conversion device May. 28, 2013
8443756 Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses May. 21, 2013
8445310 Thin film solar cell and manufacturing method thereof May. 21, 2013
8426295 Manufacturing method of microcrystalline silicon film and manufacturing method of semiconductor device Apr. 23, 2013
8394709 Process for producing photovoltaic device and deposition apparatus Mar. 12, 2013
8343857 Manufacturing method of microcrystalline semiconductor film and manufacturing method of semiconductor device Jan. 1, 2013
8313805 Clamped showerhead electrode assembly Nov. 20, 2012
8312840 Substrate processing apparatus and method Nov. 20, 2012
8297226 Deposition box for silicon-based thin film solar cell Oct. 30, 2012
8293626 Method for manufacturing semiconductor device Oct. 23, 2012
8291858 Movable jig for silicon-based thin film solar cell Oct. 23, 2012
8278195 Plasma CVD apparatus Oct. 2, 2012
8273641 Plasma deposition of amorphous semiconductors at microwave frequencies Sep. 25, 2012
8252668 Photoelectric conversion device fabrication method Aug. 28, 2012
8247315 Plasma processing apparatus and method for manufacturing semiconductor device Aug. 21, 2012
8231800 Plasma processing apparatus and method Jul. 31, 2012
8222125 Plasma deposition of amorphous semiconductors at microwave frequencies Jul. 17, 2012
8207049 Coplanar solar cell metal contact annealing in plasma enhanced chemical vapor deposition Jun. 26, 2012
8198179 Method for producing group III nitride semiconductor light-emitting device Jun. 12, 2012
8183879 Measuring arrangement, semiconductor arrangement and method for operating a semiconductor component as a reference source May. 22, 2012
8148245 Method for producing a-IGZO oxide thin film Apr. 3, 2012
8093142 Plasma processing apparatus and plasma processing method Jan. 10, 2012
8069817 Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses Dec. 6, 2011
8053338 Plasma CVD apparatus Nov. 8, 2011
8048782 Plasma deposition of amorphous semiconductors at microwave frequencies Nov. 1, 2011
8043945 Method of fabricating semiconductor device Oct. 25, 2011
8043484 Methods and apparatus for resputtering process that improves barrier coverage Oct. 25, 2011
8030206 Coplanar solar cell metal contact annealing in plasma enhanced chemical vapor deposition Oct. 4, 2011
8026157 Gas mixing method realized by back diffusion in a PECVD system with showerhead Sep. 27, 2011
8012784 Method for producing group III nitride semiconductor light emitting device, group III nitride semiconductor light emitting device, and lamp Sep. 6, 2011
7998842 Atomic layer deposition metallic contacts, gates and diffusion barriers Aug. 16, 2011
7998884 Method of forming a light emitting device with a nanocrystalline silicon embedded insulator film Aug. 16, 2011
7998843 Method of forming amorphous silicon layer and method of fabricating LCD using the same Aug. 16, 2011
7993994 Method of forming crystallized silicon and method of fabricating thin film transistor and liquid crystal display using the same Aug. 9, 2011
7989330 Dry etching method Aug. 2, 2011
7981777 Methods of depositing stable and hermetic ashable hardmask films Jul. 19, 2011
7981776 Method for depositing silicon Jul. 19, 2011

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