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Class Information
Number: 438/482
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor
Description: Process wherein the deposited semiconductive material possesses no regular crystalline lattice.

Sub-classes under this class:

Class Number Class Name Patents
438/486 And subsequent crystallization 803
438/483 Compound semiconductor 374
438/485 Deposition utilizing plasma (e.g., glow discharge, etc.) 374
438/484 Running length (e.g., sheet, strip, etc.) 88

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
6830994 Method of manufacturing a semiconductor device having a crystallized semiconductor film Dec. 14, 2004
6821710 Method of manufacturing semiconductor device Nov. 23, 2004
6818535 Thin phosphorus nitride film as an n-type doping source used in a laser doping technology Nov. 16, 2004
6815246 Surface modification of silicon nitride for thick film silver metallization of solar cell Nov. 9, 2004
6815321 Thin-film transistor and method of making same Nov. 9, 2004
6815269 Thin-film transistor and method for manufacturing the same Nov. 9, 2004
6812054 TFT type optical detecting sensor implementing different TFTs and the fabricating method thereof Nov. 2, 2004
6809012 Method of making a thin film transistor using laser annealing Oct. 26, 2004
6800539 Thin film formation method Oct. 5, 2004
6800541 Pulse laser irradiation method for forming a semiconductor thin film Oct. 5, 2004
6800540 Method for crystallizing silicon Oct. 5, 2004
6797550 Semiconductor device and manufacturing method therefor Sep. 28, 2004
6787433 Semiconductor device and method of manufacturing the same Sep. 7, 2004
6787434 Method of fabricating polysilicon film by nickel/copper induced lateral crystallization Sep. 7, 2004
6777272 Method of manufacturing an active matrix display Aug. 17, 2004
6777317 Method for semiconductor gate doping Aug. 17, 2004
6774009 Silicon target assembly Aug. 10, 2004
6774018 Barrier coatings produced by atmospheric glow discharge Aug. 10, 2004
6767804 2N mask design and method of sequential lateral solidification Jul. 27, 2004
6767773 Method of Production of a thin film type semiconductor device having a heat-retaining layer Jul. 27, 2004
6764928 Method of manufacturing an El display device Jul. 20, 2004
6759267 Method for forming a phase change memory Jul. 6, 2004
6746940 Integrated structure comprising a patterned feature substantially of single grain polysilicon Jun. 8, 2004
6740568 Method to enhance epitaxial regrowth in amorphous silicon contacts May. 25, 2004
6740569 Method of fabricating polysilicon film by excimer laser annealing process May. 25, 2004
6737338 Pattern forming method for a display device May. 18, 2004
6737305 Thin film transistor manufacture method May. 18, 2004
6716726 Thin film semiconductor device containing polycrystalline Si--Ge alloy and method for producing thereof Apr. 6, 2004
6717178 Semiconductor devices fabricated using sputtered silicon targets Apr. 6, 2004
6713371 Large grain size polysilicon films formed by nuclei-induced solid phase crystallization Mar. 30, 2004
6709902 Semiconductor device and manufacturing method thereof Mar. 23, 2004
6706545 Method of fabricating a liquid crystal display Mar. 16, 2004
6703268 Method to fabricate an intrinsic polycrystalline silicon film Mar. 9, 2004
6699775 Manufacturing process for fast recovery diode Mar. 2, 2004
6699764 Method for amorphization re-crystallization of Si1-xGex films on silicon substrates Mar. 2, 2004
6696324 Contact structures of wirings and methods for manufacturing the same, and thin film transistor array panels including the same and methods for manufacturing the same Feb. 24, 2004
6689668 Methods to improve density and uniformity of hemispherical grain silicon layers Feb. 10, 2004
6680250 Formation of deep amorphous region to separate junction from end-of-range defects Jan. 20, 2004
6677222 Method of manufacturing semiconductor device with polysilicon film Jan. 13, 2004
6645835 Semiconductor film forming method and manufacturing method for semiconductor devices thereof Nov. 11, 2003
6635554 Systems and methods using sequential lateral solidification for producing single or polycrystalline silicon thin films at low temperatures Oct. 21, 2003
6635552 Methods of forming semiconductor constructions Oct. 21, 2003
6635505 Method of manufacturing an active matrix type semiconductor display device Oct. 21, 2003
6617202 Method for fabricating a full depletion type SOI device Sep. 9, 2003
6617190 A-WO3-gate ISFET devices and method of making the same Sep. 9, 2003
6607971 Method for extending a laser annealing pulse Aug. 19, 2003
6599771 Thermal infrared sensor and a method of manufacturing the same Jul. 29, 2003
6586318 Thin phosphorus nitride film as an N-type doping source used in laser doping technology Jul. 1, 2003
6566261 Semiconductor device and method of manufacturing the same May. 20, 2003

1 2 3 4 5 6 7 8 9 10 11

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