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Class Information
Number: 438/482
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor
Description: Process wherein the deposited semiconductive material possesses no regular crystalline lattice.










Sub-classes under this class:

Class Number Class Name Patents
438/486 And subsequent crystallization 803
438/483 Compound semiconductor 374
438/485 Deposition utilizing plasma (e.g., glow discharge, etc.) 374
438/484 Running length (e.g., sheet, strip, etc.) 88


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8154017 Amorphous oxide semiconductor, semiconductor device, and thin film transistor Apr. 10, 2012
8148245 Method for producing a-IGZO oxide thin film Apr. 3, 2012
8148708 Resistive memory device and method of fabricating the same Apr. 3, 2012
8143146 Method for manufacturing a nonvolatile storage device Mar. 27, 2012
8138035 Method for forming integrated circuits with aligned (100) NMOS and (110) PMOS FinFET sidewall channels Mar. 20, 2012
8110453 Low temperature thin film transistor process, device property, and device stability improvement Feb. 7, 2012
8105920 Semiconductor device with amorphous silicon mas memory cell structure and manufacturing method thereof Jan. 31, 2012
8093140 Amorphous Ge/Te deposition process Jan. 10, 2012
8093141 Method of fabricating a semiconductor device Jan. 10, 2012
8088675 Methods of making an emitter having a desired dopant profile Jan. 3, 2012
8080450 Method of manufacturing semiconductor thin film Dec. 20, 2011
8076222 Microcrystalline silicon thin film transistor Dec. 13, 2011
8071466 Zinc sulfide crystals for optical components Dec. 6, 2011
8062949 Nanowire transistor with surrounding gate Nov. 22, 2011
8048783 Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same Nov. 1, 2011
8048782 Plasma deposition of amorphous semiconductors at microwave frequencies Nov. 1, 2011
8043885 Method of manufacturing semiconductor film and method of manufacturing photovoltaic element Oct. 25, 2011
8043945 Method of fabricating semiconductor device Oct. 25, 2011
8039333 Semiconductor device and method of fabricating the same Oct. 18, 2011
8039372 Methods of manufacturing variable resistance non-volatile memory devices including a uniformly narrow contact layer Oct. 18, 2011
8034671 Polysilicon film, thin film transistor using the same, and method for forming the same Oct. 11, 2011
8034698 Systems and methods for inducing crystallization of thin films using multiple optical paths Oct. 11, 2011
8030120 Hybrid window layer for photovoltaic cells Oct. 4, 2011
8030189 Method for maintaining a smooth surface of crystallizable material Oct. 4, 2011
8026173 Semiconductor structure, in particular phase change memory device having a uniform height heater Sep. 27, 2011
8021966 Method fabricating nonvolatile memory device Sep. 20, 2011
8003423 Method for manufacturing a poly-crystal silicon photovoltaic device using horizontal metal induced crystallization Aug. 23, 2011
7998785 Film deposition of amorphous films with a graded bandgap by electron cyclotron resonance Aug. 16, 2011
7998800 Method for manufacturing semiconductor device Aug. 16, 2011
7998841 Method for dehydrogenation treatment and method for forming crystalline silicon film Aug. 16, 2011
7998843 Method of forming amorphous silicon layer and method of fabricating LCD using the same Aug. 16, 2011
7985666 Method of manufacturing silicon nanowires using silicon nanodot thin film Jul. 26, 2011
7981720 Method of making thin film transistor with zinc oxide based semiconductor layer and zinc oxide based insulation layer Jul. 19, 2011
7968436 Low-K SiC copper diffusion barrier films Jun. 28, 2011
7964438 Method for forming a film with a graded bandgap by deposition of an amorphous material from a plasma Jun. 21, 2011
7960256 Use of CL2 and/or HCL during silicon epitaxial film formation Jun. 14, 2011
7923317 Crystallization method Apr. 12, 2011
7923356 Semiconductor film, semiconductor device and method for manufacturing same Apr. 12, 2011
7915103 Method for fabricating a flat panel display Mar. 29, 2011
7902049 Method for depositing high-quality microcrystalline semiconductor materials Mar. 8, 2011
7902051 Method for fabrication of single crystal diodes for resistive memories Mar. 8, 2011
7897493 Inducement of strain in a semiconductor layer Mar. 1, 2011
7893431 ZnO based semiconductor devices and methods of manufacturing the same Feb. 22, 2011
7879510 Method for quartz photomask plasma etching Feb. 1, 2011
7871853 Plasma doping method and apparatus employed in the same Jan. 18, 2011
7867815 Spacer electrode small pin phase change RAM and manufacturing method Jan. 11, 2011
7868325 Semiconductor wafer of single crystalline silicon and process for its manufacture Jan. 11, 2011
7863621 Thin film transistor Jan. 4, 2011
7846762 Integrated emitter formation and passivation Dec. 7, 2010
7842586 Plasma CVD apparatus, method for manufacturing microcrystalline semiconductor layer, and method for manufacturing thin film transistor Nov. 30, 2010

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