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Class Information
Number: 438/482
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor
Description: Process wherein the deposited semiconductive material possesses no regular crystalline lattice.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7608529 |
Method for selective laser crystallization and display panel fabricated by using the same |
Oct. 27, 2009 |
| 7608475 |
Buffer layer for promoting electron mobility and thin film transistor having the same |
Oct. 27, 2009 |
| 7601565 |
Thin film transistor and method of fabricating the same |
Oct. 13, 2009 |
| 7598159 |
Method of fabricating thin film transistor substrate and thin film transistor substrate produced using the same |
Oct. 6, 2009 |
| 7592240 |
Method for forming a gate structure through an amorphous silicon layer and applications thereof |
Sep. 22, 2009 |
| 7588990 |
Dynamic surface annealing of implanted dopants with low temperature HDPCVD process for depositing a high extinction coefficient optical absorber layer |
Sep. 15, 2009 |
| 7585749 |
Methods of forming a layer of material on a substrate and structures formed therefrom |
Sep. 8, 2009 |
| 7582547 |
Method for junction formation in a semiconductor device and the semiconductor device made thereof |
Sep. 1, 2009 |
| 7557416 |
Transistor and CVD apparatus used to deposit gate insulating film thereof |
Jul. 7, 2009 |
| 7547615 |
Deposition over mixed substrates using trisilane |
Jun. 16, 2009 |
| 7547596 |
Method of enhancing drive current in a transistor |
Jun. 16, 2009 |
| 7544591 |
Method of creating isolated electrodes in a nanowire-based device |
Jun. 9, 2009 |
| 7534689 |
Stress enhanced MOS transistor and methods for its fabrication |
May. 19, 2009 |
| 7527994 |
Amorphous silicon thin-film transistors and methods of making the same |
May. 5, 2009 |
| 7528044 |
CMOSFET with hybrid-strained channels |
May. 5, 2009 |
| 7524740 |
Localized strain relaxation for strained Si directly on insulator |
Apr. 28, 2009 |
| 7524739 |
Method of improving a surface of a semiconductor substrate |
Apr. 28, 2009 |
| 7521303 |
Method of crystallizing amorphous semiconductor thin film and method of fabricating poly crystalline thin film transistor using the same |
Apr. 21, 2009 |
| 7521344 |
Method of forming semiconductor compound film for fabrication of electronic device and film produced by same using a solid solution |
Apr. 21, 2009 |
| 7521365 |
Selective epitaxy process with alternating gas supply |
Apr. 21, 2009 |
| 7517772 |
Selective etch for patterning a semiconductor film deposited non-selectively |
Apr. 14, 2009 |
| 7501306 |
Semiconductor device and method of manufacturing thereof |
Mar. 10, 2009 |
| 7488633 |
Method for forming polysilicon by illuminating a laser beam at the amorphous silicon substrate through a mask |
Feb. 10, 2009 |
| 7476600 |
FET gate structure and fabrication process |
Jan. 13, 2009 |
| 7456056 |
Semiconductor device and method for fabricating the same |
Nov. 25, 2008 |
| 7429749 |
Strained-silicon for CMOS device using amorphous silicon deposition or silicon epitaxial growth |
Sep. 30, 2008 |
| 7425349 |
Method of manufacturing a low temperature polysilicon film |
Sep. 16, 2008 |
| 7425491 |
Nanowire transistor with surrounding gate |
Sep. 16, 2008 |
| 7416957 |
Method for forming a strained Si-channel in a MOSFET structure |
Aug. 26, 2008 |
| 7399685 |
Laser beam pattern mask and crystallization method using the same |
Jul. 15, 2008 |
| 7396744 |
Method of forming a semiconductor thin film |
Jul. 8, 2008 |
| 7393729 |
Method for fabricating semiconductor device |
Jul. 1, 2008 |
| 7393715 |
Manufacturing method for image pickup apparatus |
Jul. 1, 2008 |
| 7391050 |
Phase change memory device with thermal insulating layers |
Jun. 24, 2008 |
| 7384476 |
Method for crystallizing silicon |
Jun. 10, 2008 |
| 7364976 |
Selective etch for patterning a semiconductor film deposited non-selectively |
Apr. 29, 2008 |
| 7361577 |
Method of manufacturing semiconductor device |
Apr. 22, 2008 |
| 7361578 |
Method to form large grain size polysilicon films by nuclei-induced solid phase crystallization |
Apr. 22, 2008 |
| 7358164 |
Crystal imprinting methods for fabricating substrates with thin active silicon layers |
Apr. 15, 2008 |
| 7358163 |
Semiconductor device and method for fabricating the same |
Apr. 15, 2008 |
| 7348222 |
Method for manufacturing a thin film transistor and method for manufacturing a semiconductor device |
Mar. 25, 2008 |
| 7344898 |
Method for manufacturing semiconductor device |
Mar. 18, 2008 |
| 7344962 |
Method of manufacturing dual orientation wafers |
Mar. 18, 2008 |
| 7338815 |
Semiconductor device manufacturing method |
Mar. 4, 2008 |
| 7335541 |
Method for fabricating thin film transistor using the mask for forming polysilicon including slit patterns deviated from each other |
Feb. 26, 2008 |
| 7332410 |
Method of epitaxial-like wafer bonding at low temperature and bonded structure |
Feb. 19, 2008 |
| 7294535 |
Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same |
Nov. 13, 2007 |
| 7279383 |
Liquid crystal display device and method of fabricating the same |
Oct. 9, 2007 |
| 7273799 |
Deposition over mixed substrates |
Sep. 25, 2007 |
| 7256109 |
Isotropic polycrystalline silicon |
Aug. 14, 2007 |
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