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Class Information
Number: 438/480
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > On insulating substrate or layer > Including implantation of ion which reacts with semiconductor substrate to form insulating layer
Description: Process for the deposition of a semiconductor layer onto an electrically insulating layer including implanting an ion which reacts with the semiconductive regions of the substrate to form an electrically insulating layer.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
7759254 Method for forming impurity-introduced layer, method for cleaning object to be processed apparatus for introducing impurity and method for producing device Jul. 20, 2010
7754517 Method for manufacturing infrared detecting device Jul. 13, 2010
7749817 Single-crystal layer on a dielectric layer Jul. 6, 2010
7736483 Method for electroplating metal wire Jun. 15, 2010
7718477 Semiconductor device and method of fabricating the same May. 18, 2010
7695564 Thermal management substrate Apr. 13, 2010
7666721 SOI substrates and SOI devices, and methods for forming the same Feb. 23, 2010
7659184 Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking Feb. 9, 2010
7629666 Method and structure for implanting bonded substrates for electrical conductivity Dec. 8, 2009
7579221 Conversion of an SOI design layout to a bulk design layout Aug. 25, 2009
7579654 Semiconductor on insulator structure made using radiation annealing Aug. 25, 2009
7524740 Localized strain relaxation for strained Si directly on insulator Apr. 28, 2009
7494901 Methods of forming semiconductor-on-insulator constructions Feb. 24, 2009
7485551 Semiconductor-on-insulator type heterostructure and method of fabrication Feb. 3, 2009
7475102 Random number generation method based on multivariate non-normal distribution, parameter estimation method thereof, and application to simulation of financial field and semiconductor ion impla Jan. 6, 2009
7465612 Fabricating method for thin film transistor substrate and thin film transistor substrate using the same Dec. 16, 2008
7466907 Annealing process and device of semiconductor wafer Dec. 16, 2008
7442586 SOI substrate and SOI device, and method for forming the same Oct. 28, 2008
7439092 Thin film splitting method Oct. 21, 2008
7432122 Electronic device and a process for forming the electronic device Oct. 7, 2008
7375035 Host and ancillary tool interface methodology for distributed processing May. 20, 2008
7354786 Sensor element with trenched cavity Apr. 8, 2008
7352034 Semiconductor structures integrating damascene-body FinFET's and planar devices on a common substrate and methods for forming such semiconductor structures Apr. 1, 2008
7348253 High-quality SGOI by annealing near the alloy melting point Mar. 25, 2008
7285480 Integrated circuit chip with FETs having mixed body thicknesses and method of manufacture thereof Oct. 23, 2007
7268065 Methods of manufacturing metal-silicide features Sep. 11, 2007
7183172 Method of forming silicon-on-insulator (SOI) semiconductor substrate and SOI semiconductor substrate formed thereby Feb. 27, 2007
7125458 Formation of a silicon germanium-on-insulator structure by oxidation of a buried porous silicon layer Oct. 24, 2006
7094668 Annealing process and device of semiconductor wafer Aug. 22, 2006
7084050 Formation of silicon-germanium-on-insulator (SGOI) by an integral high temperature SIMOX-Ge interdiffusion anneal Aug. 1, 2006
7071080 Process for producing silicon on insulator structure having intrinsic gettering by ion implantation Jul. 4, 2006
7067402 Production method for SIMOX substrate and SIMOX substrate Jun. 27, 2006
7052981 Ion implantation method May. 30, 2006
7037794 Raised STI process for multiple gate ox and sidewall protection on strained Si/SGOI structure with elevated source/drain May. 2, 2006
7037806 Method of fabricating silicon-on-insulator semiconductor substrate using rare earth oxide or rare earth nitride May. 2, 2006
7029991 Method for making a SOI semiconductor substrate with thin active semiconductor layer Apr. 18, 2006
7008860 Substrate manufacturing method Mar. 7, 2006
7005363 Method of forming a semi-insulating region Feb. 28, 2006
6967376 Divot reduction in SIMOX layers Nov. 22, 2005
6959029 Apparatus for performing anastomosis Oct. 25, 2005
6949451 SOI chip with recess-resistant buried insulator and method of manufacturing the same Sep. 27, 2005
6924216 Semiconductor device having improved doping profiles and method of improving the doping profiles of a semiconductor device Aug. 2, 2005
6911379 Method of forming strained silicon on insulator substrate Jun. 28, 2005
6861326 Methods of forming semiconductor circuitry Mar. 1, 2005
6849526 Method of improving device resistance Feb. 1, 2005
6846727 Patterned SOI by oxygen implantation and annealing Jan. 25, 2005
6821710 Method of manufacturing semiconductor device Nov. 23, 2004
6818529 Apparatus and method for forming a silicon film across the surface of a glass substrate Nov. 16, 2004
6794264 Implantation process using substoichiometric, oxygen doses at different energies Sep. 21, 2004
6774018 Barrier coatings produced by atmospheric glow discharge Aug. 10, 2004

1 2 3 4

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