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Class Information
Number: 438/478
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition)
Description: Process for depositing onto any substrate single or multiple layers of semiconductor material adapted to serve as an active device region, the semiconductive material being deposited as amorphous, polycrystalline, or single crystalline material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7427515 |
Electronic element including ferroelectric substance film and method of manufacturing the same |
Sep. 23, 2008 |
| 7427555 |
Growth of planar, non-polar gallium nitride by hydride vapor phase epitaxy |
Sep. 23, 2008 |
| 7422965 |
Methods of fabricating p-type transistors including germanium channel regions |
Sep. 9, 2008 |
| 7419887 |
Laser assisted nano deposition |
Sep. 2, 2008 |
| 7410888 |
Method for manufacturing strained silicon |
Aug. 12, 2008 |
| 7407849 |
Self-aligned printing |
Aug. 5, 2008 |
| 7405140 |
Low temperature formation of patterned epitaxial Si containing films |
Jul. 29, 2008 |
| 7399685 |
Laser beam pattern mask and crystallization method using the same |
Jul. 15, 2008 |
| 7399684 |
Defect reduction in semiconductor materials |
Jul. 15, 2008 |
| 7399653 |
Nitride optoelectronic devices with backside deposition |
Jul. 15, 2008 |
| 7399686 |
Method and apparatus for making coplanar dielectrically-isolated regions of different semiconductor materials on a substrate |
Jul. 15, 2008 |
| 7387953 |
Laminated layer structure and method for forming the same |
Jun. 17, 2008 |
| 7387676 |
Process for producing silicon semiconductor wafers with defined defect properties, and silicon semiconductor wafers having these defect properties |
Jun. 17, 2008 |
| 7384481 |
Method of forming a rare-earth dielectric layer |
Jun. 10, 2008 |
| 7381631 |
Use of expanding material oxides for nano-fabrication |
Jun. 3, 2008 |
| 7381623 |
Pre-epitaxial disposable spacer integration scheme with very low temperature selective epitaxy for enhanced device performance |
Jun. 3, 2008 |
| 7378331 |
Methods of vertically stacking wafers using porous silicon |
May. 27, 2008 |
| 7375035 |
Host and ancillary tool interface methodology for distributed processing |
May. 20, 2008 |
| 7368368 |
Multi-chamber MOCVD growth apparatus for high performance/high throughput |
May. 6, 2008 |
| 7367865 |
Methods for making wafers with low-defect surfaces, wafers obtained thereby and electronic components made from the wafers |
May. 6, 2008 |
| 7364988 |
Method of manufacturing gallium nitride based high-electron mobility devices |
Apr. 29, 2008 |
| 7361518 |
Semiconductor element, semiconductor device, and method for fabrication thereof |
Apr. 22, 2008 |
| 7358160 |
Method of selective formation of compound semiconductor-on-silicon wafer with silicon nanowire buffer layer |
Apr. 15, 2008 |
| 7357838 |
Relaxed silicon germanium substrate with low defect density |
Apr. 15, 2008 |
| 7358159 |
Method for manufacturing ZnTe compound semiconductor single crystal ZnTe compound semiconductor single crystal, and semiconductor device |
Apr. 15, 2008 |
| 7351668 |
Film formation method and apparatus for semiconductor process |
Apr. 1, 2008 |
| 7348186 |
Method for improving a semiconductor substrate having SiGe film and semiconductor device manufactured by using this method |
Mar. 25, 2008 |
| 7344961 |
Methods for nanowire growth |
Mar. 18, 2008 |
| 7335517 |
Multichip semiconductor device, chip therefor and method of formation thereof |
Feb. 26, 2008 |
| 7329587 |
Method for the production of semi-conductor chips |
Feb. 12, 2008 |
| 7326295 |
Fabrication method for polycrystalline silicon thin film and apparatus using the same |
Feb. 5, 2008 |
| 7320931 |
Interfacial layer for use with high k dielectric materials |
Jan. 22, 2008 |
| 7316966 |
Method for transferring substrates in a load lock chamber |
Jan. 8, 2008 |
| 7312136 |
Method of fabricating a wafer with strained channel layers for increased electron and hole mobility for improving device performance |
Dec. 25, 2007 |
| 7309644 |
System and method of fabrication and application of thin-films with continuously graded or discrete physical property parameters to functionally broadband monolithic microelectronic optoel |
Dec. 18, 2007 |
| 7303980 |
Laser annealing method and apparatus |
Dec. 4, 2007 |
| 7300829 |
Low temperature process for TFT fabrication |
Nov. 27, 2007 |
| 7291544 |
Homoepitaxial gallium nitride based photodetector and method of producing |
Nov. 6, 2007 |
| 7279404 |
Process for fabricating strained layers of silicon or of a silicon/germanium alloy |
Oct. 9, 2007 |
| 7273799 |
Deposition over mixed substrates |
Sep. 25, 2007 |
| 7268063 |
Process for fabricating semiconductor component |
Sep. 11, 2007 |
| 7262116 |
Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation |
Aug. 28, 2007 |
| 7261920 |
Process for forming a patterned thin film structure on a substrate |
Aug. 28, 2007 |
| 7256147 |
Porous body and manufacturing method therefor |
Aug. 14, 2007 |
| 7253084 |
Deposition from liquid sources |
Aug. 7, 2007 |
| 7253085 |
Deposition methods |
Aug. 7, 2007 |
| 7253499 |
III-V group nitride system semiconductor self-standing substrate, method of making the same and III-V group nitride system semiconductor wafer |
Aug. 7, 2007 |
| 7250357 |
Manufacturing method for strained silicon wafer |
Jul. 31, 2007 |
| 7247546 |
Method of forming strained silicon materials with improved thermal conductivity |
Jul. 24, 2007 |
| 7238594 |
Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures |
Jul. 3, 2007 |
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