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Class Information
Number: 438/476
Name: Semiconductor device manufacturing: process > Gettering of substrate > By layers which are coated, contacted, or diffused
Description: Process wherein the substrate is exposed to a specified material by (a) depositing a layer of the material on the substrate, (b) physically contacting the substrate with the material, or (c) diffusing into the substrate a gettering species to form a gettering region in the substrate.

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8652943 Method of processing substrate Feb. 18, 2014
8592937 Pyroelectric detector, pyroelectric detection device, and electronic instrument Nov. 26, 2013
8568537 Epitaxial wafer and method of producing the same Oct. 29, 2013
8507917 Thin film transistor, method for manufacturing the same, and display device using the same Aug. 13, 2013
8501515 Methods of forming micro-electromechanical resonators using passive compensation techniques Aug. 6, 2013
8492193 Semiconductor substrate for solid-state imaging sensing device as well as solid-state image sensing device and method for producing the same Jul. 23, 2013
8455322 Silicon germanium heterojunction bipolar transistor structure and method Jun. 4, 2013
8445368 Semiconductor device and method for manufacturing same May. 21, 2013
8399299 Cavity structure comprising an adhesion interface composed of getter material Mar. 19, 2013
8357593 Methods of removing water from semiconductor substrates and methods of depositing atomic layers using the same Jan. 22, 2013
8357994 Antifuse with a single silicon-rich silicon nitride insulating layer Jan. 22, 2013
8329563 Semiconductor device including a gettering layer and manufacturing method therefor Dec. 11, 2012
8293613 Gettering structures and methods and their application Oct. 23, 2012
8273638 Thin film transistor using a metal induced crystallization process and method for fabricating the same and active matrix flat panel display using the thin film transistor Sep. 25, 2012
8227299 Removal of impurities from semiconductor device layers Jul. 24, 2012
8207048 Method for producing ordered nanostructures Jun. 26, 2012
RE43450 Method for fabricating semiconductor thin film Jun. 5, 2012
8187954 Method for manufacturing silicon single crystal wafer May. 29, 2012
8173523 Method of removing heavy metal in semiconductor substrate May. 8, 2012
8168467 Solar cell method of fabrication via float glass process May. 1, 2012
8148192 Transparent solar cell method of fabrication via float glass process Apr. 3, 2012
8143142 Method of fabricating epi-wafer, epi-wafer fabricated by the method, and image sensor fabricated using the epi-wafer Mar. 27, 2012
8124502 Semiconductor device manufacturing method, semiconductor device and semiconductor device manufacturing installation Feb. 28, 2012
8120155 Reduced stiction and mechanical memory in MEMS devices Feb. 21, 2012
8088670 Method for manufacturing bonded substrate with sandblast treatment Jan. 3, 2012
8058174 Method for treating semiconductor processing components and components formed thereby Nov. 15, 2011
8030184 Epitaxial wafer and method of producing the same Oct. 4, 2011
8026519 Systems and methods for forming a time-averaged line image Sep. 27, 2011
8012289 Method of fabricating a release substrate Sep. 6, 2011
8008166 Method and apparatus for cleaning a substrate surface Aug. 30, 2011
7993987 Surface cleaning using sacrificial getter layer Aug. 9, 2011
7989321 Semiconductor device gate structure including a gettering layer Aug. 2, 2011
7989306 Method of forming alternating regions of Si and SiGe or SiGeC on a buried oxide layer on a substrate Aug. 2, 2011
7972942 Method of reducing metal impurities of upgraded metallurgical grade silicon wafer by using epitaxial silicon film Jul. 5, 2011
7923352 Thermal treatment equipment and method for heat-treating Apr. 12, 2011
7923353 Gettering method and a wafer using the same Apr. 12, 2011
7893522 Structural body and manufacturing method thereof Feb. 22, 2011
7879693 Thermal treatment equipment and method for heat-treating Feb. 1, 2011
7879695 Thin silicon wafer and method of manufacturing the same Feb. 1, 2011
7863075 Method for manufacturing solar cell Jan. 4, 2011
7855131 Manufacturing method of a semiconductor device Dec. 21, 2010
7846823 Masking paste, method of manufacturing same, and method of manufacturing solar cell using masking paste Dec. 7, 2010
7816696 Nitride semiconductor device and method for manufacturing same Oct. 19, 2010
7808091 Wafer structure with discrete gettering material Oct. 5, 2010
7785989 Growth substrates for inverted metamorphic multijunction solar cells Aug. 31, 2010
7776723 Method of manufacturing an epitaxial semiconductor substrate and method of manufacturing a semiconductor device Aug. 17, 2010
7763500 Method for manufacturing semiconductor storage device comprising a slow cooling step Jul. 27, 2010
7737004 Multilayer gettering structure for semiconductor device and method Jun. 15, 2010
7713837 Low temperature fusion bonding with high surface energy using a wet chemical treatment May. 11, 2010
7713851 Method of manufacturing silicon epitaxial wafer May. 11, 2010

1 2 3 4 5 6 7

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