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Class Information
Number: 438/475
Name: Semiconductor device manufacturing: process > Gettering of substrate > By implanting or irradiating > Ionized radiation (e.g., corpuscular or plasma treatment, etc.) > Hydrogen plasma (i.e., hydrogenization)
Description: Process wherein the radiation is a plasma containing ionized hydrogen (i.e., proton irradiation).

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8613864 Methods of forming semiconductor constructions Dec. 24, 2013
8614140 Semiconductor device manufacturing apparatus Dec. 24, 2013
8603899 Method of manufacturing a semiconductor device Dec. 10, 2013
8470651 Method for producing a thin film transistor, and a thin film transistor Jun. 25, 2013
8414790 Bevel plasma treatment to enhance wet edge clean Apr. 9, 2013
8389395 Method for manufacturing semiconductor optical device Mar. 5, 2013
8383495 Semiconductor layer structure and method for fabricating a semiconductor layer structure Feb. 26, 2013
8361873 Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device Jan. 29, 2013
8361889 Strained semiconductor-on-insulator by addition and removal of atoms in a semiconductor-on-insulator Jan. 29, 2013
8329563 Semiconductor device including a gettering layer and manufacturing method therefor Dec. 11, 2012
8324084 Manufacturing method of semiconductor substrate and manufacturing method of semiconductor device Dec. 4, 2012
8313805 Clamped showerhead electrode assembly Nov. 20, 2012
8309436 Method of producing epitaxial substrate with gettering for solid-state imaging device, and method of producing solid-state imaging device using same substrate Nov. 13, 2012
8304327 Method of manufacturing a semiconductor device Nov. 6, 2012
8207046 Method for producing semiconductor device and semiconductor device produced by same method Jun. 26, 2012
8193075 Remote hydrogen plasma with ion filter for terminating silicon dangling bonds Jun. 5, 2012
8153495 Semiconductor device and LTPS-TFT within and method of making the same Apr. 10, 2012
8143134 Method for manufacturing SOI substrate Mar. 27, 2012
8138064 Method for producing silicon film-transferred insulator wafer Mar. 20, 2012
8124502 Semiconductor device manufacturing method, semiconductor device and semiconductor device manufacturing installation Feb. 28, 2012
8119461 Reducing the creation of charge traps at gate dielectrics in MOS transistors by performing a hydrogen treatment Feb. 21, 2012
8101501 Method of manufacturing semiconductor device Jan. 24, 2012
8101507 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus Jan. 24, 2012
8088670 Method for manufacturing bonded substrate with sandblast treatment Jan. 3, 2012
8062964 Solar cell defect passivation method Nov. 22, 2011
8062957 Semiconductor substrate surface preparation method Nov. 22, 2011
8034694 SOI substrate, method for manufacturing the same, and semiconductor device Oct. 11, 2011
8012289 Method of fabricating a release substrate Sep. 6, 2011
7972941 Method of manufacturing a semiconductor device Jul. 5, 2011
7951692 Method of producing semiconductor substrate having an SOI structure May. 31, 2011
7935613 Three-dimensional silicon on oxide device isolation May. 3, 2011
7897489 Selective activation of hydrogen passivated silicon and germanium surfaces Mar. 1, 2011
7892934 SOI substrate and method for manufacturing SOI substrate Feb. 22, 2011
7838400 Rapid thermal oxide passivated solar cell with improved junction Nov. 23, 2010
7833882 Method of producing a semiconductor device by forming an oxide film on a resin layer Nov. 16, 2010
7799580 Method for manufacturing ferroelectric memory device Sep. 21, 2010
7799661 Electrical sensor for real-time feedback control of plasma nitridation Sep. 21, 2010
7799662 Power semiconductor device with soft switching characteristic and manufacturing method for same Sep. 21, 2010
7795117 Method of producing semiconductor substrate having an SOI structure Sep. 14, 2010
7776722 Manufacturing methods of semiconductor substrate, thin film transistor and semiconductor device Aug. 17, 2010
7772111 Substrate processing method and fabrication process of a semiconductor device Aug. 10, 2010
7763500 Method for manufacturing semiconductor storage device comprising a slow cooling step Jul. 27, 2010
7727846 Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device Jun. 1, 2010
7713864 Method of cleaning semiconductor substrate conductive layer surface May. 11, 2010
7709337 Method for manufacturing SOI substrate and semiconductor device May. 4, 2010
7704858 Methods of forming nickel silicide layers with low carbon content Apr. 27, 2010
7670954 Method of manufacturing semiconductor device Mar. 2, 2010
7666762 Method for fabricating semiconductor device Feb. 23, 2010
7635625 Method for manufacturing image sensor Dec. 22, 2009
7635631 Semiconductor device and manufacturing method for the same Dec. 22, 2009

1 2 3 4

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