Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Engineering
Class Information
Number: 438/473
Name: Semiconductor device manufacturing: process > Gettering of substrate > By implanting or irradiating
Description: Process wherein a step of implanting or irradiating the semiconductive substrate is utilized to produce a gettering effect.










Sub-classes under this class:

Class Number Class Name Patents
438/474 Ionized radiation (e.g., corpuscular or plasma treatment, etc.) 164


Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8674327 Systems and methods for uniformly implanting materials on substrates using directed magnetic fields Mar. 18, 2014
8658516 Method of producing silicon wafer, epitaxial wafer and solid state image sensor, and device for producing silicon wafer Feb. 25, 2014
8642449 Silicon wafer Feb. 4, 2014
8629044 Method of producing silicon wafer, epitaxial wafer and solid state image sensor, and device for producing silicon wafer Jan. 14, 2014
8609461 Semiconductor epitaxy on diamond for heat spreading applications Dec. 17, 2013
8569149 Method of treating a semiconductor device Oct. 29, 2013
8563406 Semiconductor substrate, semiconductor device, and manufacturing methods for them Oct. 22, 2013
8551824 Method for manufacturing semiconductor device Oct. 8, 2013
8541305 3D integrated circuit and method of manufacturing the same Sep. 24, 2013
8524002 Silicon wafer and method for producing the same Sep. 3, 2013
8518755 Method for manufacturing semiconductor device Aug. 27, 2013
8502350 Stacked layers of nitride semiconductor and method for manufacturing the same Aug. 6, 2013
8501520 Manufacturing method for a solid-state image sensor Aug. 6, 2013
8492248 Manufacturing method of semiconductor substrate Jul. 23, 2013
8487280 Modulating implantation for improved workpiece splitting Jul. 16, 2013
8426285 Method of fabricating semiconductor device Apr. 23, 2013
8420511 Transistor and method for forming the same Apr. 16, 2013
8399280 Method for protecting an integrated circuit chip against laser attacks Mar. 19, 2013
8377202 Method for manufacturing silicon wafer and silicon wafer manufactured by this method Feb. 19, 2013
8372489 Method for directional deposition using a gas cluster ion beam Feb. 12, 2013
8357592 Method and apparatus for manufacturing semiconductor substrate dedicated to semiconductor device, and method and apparatus for manufacturing semiconductor device Jan. 22, 2013
8357939 Silicon wafer and production method therefor Jan. 22, 2013
8349646 Semiconductor wafer for semiconductor components and production method Jan. 8, 2013
8343618 Silicon wafer and method of manufacturing the same Jan. 1, 2013
8338269 Methods and apparatus for producing semiconductor on insulator structures using directed exfoliation Dec. 25, 2012
8329563 Semiconductor device including a gettering layer and manufacturing method therefor Dec. 11, 2012
8324084 Manufacturing method of semiconductor substrate and manufacturing method of semiconductor device Dec. 4, 2012
8293620 Method of making multiple implantations in a substrate Oct. 23, 2012
8293621 Semiconductor substrate, semiconductor device, and manufacturing methods for them Oct. 23, 2012
8288252 Method for recovering damaged components in lower region of low dielectric insulating film Oct. 16, 2012
8278187 Method for reprocessing semiconductor substrate by stepwise etching with at least two etching treatments Oct. 2, 2012
8268705 Method for producing SOI wafer Sep. 18, 2012
8247308 Method for manufacturing SOI substrate Aug. 21, 2012
8241941 Method of purifying a crystalline silicon substrate and process for producing a photovoltaic cell Aug. 14, 2012
8232182 Fabrication of electronic and photonic systems on flexible substrates by layer transfer method Jul. 31, 2012
8207048 Method for producing ordered nanostructures Jun. 26, 2012
8193068 Method of manufacturing SOI substrate Jun. 5, 2012
8178411 Method for producing a stop zone in a semiconductor body and semiconductor component having a stop zone May. 15, 2012
8173523 Method of removing heavy metal in semiconductor substrate May. 8, 2012
8148190 Semiconductor device and method of manufacturing the same Apr. 3, 2012
8138066 Dislocation engineering using a scanned laser Mar. 20, 2012
8129814 Schottky diode with silicide anode and anode-encircling P-type doped region Mar. 6, 2012
8124501 Method of producing semiconductor wafer Feb. 28, 2012
8124502 Semiconductor device manufacturing method, semiconductor device and semiconductor device manufacturing installation Feb. 28, 2012
8093089 Methods of manufacturing image sensors including gettering regions Jan. 10, 2012
8088670 Method for manufacturing bonded substrate with sandblast treatment Jan. 3, 2012
8084331 Method of treating semiconductor element Dec. 27, 2011
8058153 Method for recovering damage of low dielectric insulating film for manufacturing semiconductor device Nov. 15, 2011
8058148 Methods and apparatus for producing semiconductor on insulator structures using directed exfoliation Nov. 15, 2011
8030183 Method for reducing crystal defect of SIMOX wafer and SIMOX wafer Oct. 4, 2011

1 2 3 4 5 6










 
 
  Recently Added Patents
Method and apparatus for distributing promotional materials
Solid-state imaging device and imaging apparatus
Collaborative data redundancy for configuration tracking systems
Apparatus and method for layered decoding in a communication system using low-density parity-check codes
Medical injector
Display apparatus
Plate
  Randomly Featured Patents
Electronic lock system for door latch assembly
Tire tread
Vehicle window opening and closing control device
System for communicating between a group of apparatuses
Push-button switch with overload protection
Diagnostic tests and kits for Clostridium difficile
Reprocessing of contaminated oils
Method for applying a scale to a carrier
Medical irrigation device
Writing instrument packaging