| |
 |
|
Class Information
Number: 438/473
Name: Semiconductor device manufacturing: process > Gettering of substrate > By implanting or irradiating
Description: Process wherein a step of implanting or irradiating the semiconductive substrate is utilized to produce a gettering effect.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618879 |
Non-uniform minority carrier lifetime distributions in high performance silicon power devices |
Nov. 17, 2009 |
| 7611970 |
Wafer processing method |
Nov. 3, 2009 |
| 7605029 |
Method of manufacturing semiconductor device |
Oct. 20, 2009 |
| 7563658 |
Method for manufacturing semiconductor device |
Jul. 21, 2009 |
| 7563693 |
Method for manufacturing semiconductor substrate and semiconductor substrate |
Jul. 21, 2009 |
| 7560363 |
Manufacturing method for SIMOX substrate |
Jul. 14, 2009 |
| 7550309 |
Method for producing semiconductor wafer |
Jun. 23, 2009 |
| 7544265 |
Method of fabricating a release substrate |
Jun. 9, 2009 |
| 7528446 |
Semiconductor substrate, semiconductor device, and manufacturing methods for them |
May. 5, 2009 |
| 7507640 |
Method for producing silicon wafer |
Mar. 24, 2009 |
| 7507641 |
Method of producing bonded wafer |
Mar. 24, 2009 |
| 7501329 |
Wafer gettering using relaxed silicon germanium epitaxial proximity layers |
Mar. 10, 2009 |
| 7501330 |
Methods of forming a high conductivity diamond film and structures formed thereby |
Mar. 10, 2009 |
| 7494851 |
Thin film transistor array substrate and method for manufacturing the same |
Feb. 24, 2009 |
| 7488626 |
Thyristor device with carbon lifetime adjustment implant and its method of fabrication |
Feb. 10, 2009 |
| 7488670 |
Direct channel stress |
Feb. 10, 2009 |
| 7485551 |
Semiconductor-on-insulator type heterostructure and method of fabrication |
Feb. 3, 2009 |
| 7482237 |
Semiconductor device and method of producing the same, and power conversion apparatus incorporating this semiconductor device |
Jan. 27, 2009 |
| 7476597 |
Methods and systems for laser assisted wirebonding |
Jan. 13, 2009 |
| 7473614 |
Method for manufacturing a silicon-on-insulator (SOI) wafer with an etch stop layer |
Jan. 6, 2009 |
| 7473620 |
Process for adjusting the strain on the surface or inside a substrate made of a semiconductor material |
Jan. 6, 2009 |
| 7419886 |
Thermal treatment equipment and method for heat-treating |
Sep. 2, 2008 |
| 7407871 |
Method for passivation of plasma etch defects in DRAM devices |
Aug. 5, 2008 |
| 7407867 |
Method for concurrently producing at least a pair of semiconductor structures that each include at least one useful layer on a substrate |
Aug. 5, 2008 |
| 7402487 |
Process for fabricating a semiconductor device having deep trench structures |
Jul. 22, 2008 |
| 7393761 |
Method for fabricating a semiconductor device |
Jul. 1, 2008 |
| 7358162 |
Method of manufacturing semiconductor device |
Apr. 15, 2008 |
| 7341927 |
Wafer bonded epitaxial templates for silicon heterostructures |
Mar. 11, 2008 |
| 7329590 |
Method for depositing nanolaminate thin films on sensitive surfaces |
Feb. 12, 2008 |
| 7294561 |
Internal gettering in SIMOX SOI silicon substrates |
Nov. 13, 2007 |
| 7259036 |
Methods of forming doped and un-doped strained semiconductor materials and semiconductor films by gas-cluster-ion-beam irradiation and materials and film products |
Aug. 21, 2007 |
| 7238598 |
Formation of a semiconductor substrate that may be dismantled and obtaining a semiconductor element |
Jul. 3, 2007 |
| 7229891 |
Fabrication method for silicon-on defect layer in field-effect and bipolar transistor devices |
Jun. 12, 2007 |
| 7202119 |
Method of manufacturing semiconductor device |
Apr. 10, 2007 |
| 7183179 |
System and method for hydrogen exfoliation gettering |
Feb. 27, 2007 |
| 7176108 |
Method of detaching a thin film at moderate temperature after co-implantation |
Feb. 13, 2007 |
| 7166505 |
Method for making a semiconductor device having a high-k gate dielectric |
Jan. 23, 2007 |
| 7157354 |
Method for gettering transition metal impurities in silicon crystal |
Jan. 2, 2007 |
| 7157340 |
Method of fabrication of semiconductor device |
Jan. 2, 2007 |
| 7148091 |
Method of manufacturing thin film transistor |
Dec. 12, 2006 |
| 7148093 |
Semiconductor device and method for manufacturing the same |
Dec. 12, 2006 |
| 7135387 |
Method of manufacturing semiconductor element |
Nov. 14, 2006 |
| 7135351 |
Method for controlling of thermal donor formation in high resistivity CZ silicon |
Nov. 14, 2006 |
| 7122393 |
Optical semiconductor device and method of fabricating the same |
Oct. 17, 2006 |
| 7115452 |
Method of making semiconductor device |
Oct. 3, 2006 |
| 7112509 |
Method of producing a high resistivity SIMOX silicon substrate |
Sep. 26, 2006 |
| 7112516 |
Fabrication of abrupt ultra-shallow junctions |
Sep. 26, 2006 |
| 7112545 |
Passivation of material using ultra-fast pulsed laser |
Sep. 26, 2006 |
| 7075094 |
System, method, and apparatus for ion beam etching process stability using a reference for time scaling subsequent steps |
Jul. 11, 2006 |
| 7071080 |
Process for producing silicon on insulator structure having intrinsic gettering by ion implantation |
Jul. 4, 2006 |
|
|
|
