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Class Information
Number: 438/472
Name: Semiconductor device manufacturing: process > Gettering of substrate > By vibrating or impacting
Description: Process wherein a step of vibrating the semiconductive substrate or striking the semiconductive substrate with solid material is utilized to produce a gettering effect.

Patents under this class:

Patent Number Title Of Patent Date Issued
8440546 Methods and devices for fabricating and assembling printable semiconductor elements May. 14, 2013
8421006 System and method for generating sprays using electrical fields Apr. 16, 2013
8377801 Nitride semiconductor light-emitting device and fabrication method thereof Feb. 19, 2013
8124437 Forming protrusions in solar cells Feb. 28, 2012
8124502 Semiconductor device manufacturing method, semiconductor device and semiconductor device manufacturing installation Feb. 28, 2012
8093077 Method for manufacturing a layer of gallium nitride or gallium and aluminum nitride Jan. 10, 2012
7943491 Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp May. 17, 2011
7790579 Semiconductor storage device, semiconductor device, and manufacturing method therefor Sep. 7, 2010
7772088 Method for manufacturing devices on a multi-layered substrate utilizing a stiffening backing substrate Aug. 10, 2010
7763500 Method for manufacturing semiconductor storage device comprising a slow cooling step Jul. 27, 2010
7674692 Nitride semiconductor light-emitting device and fabrication method thereof Mar. 9, 2010
7622367 Methods and devices for fabricating and assembling printable semiconductor elements Nov. 24, 2009
7615470 Method of manufacturing gallium nitride semiconductor Nov. 10, 2009
7166505 Method for making a semiconductor device having a high-k gate dielectric Jan. 23, 2007
7153760 Using acoustic energy including two lasers to activate implanted species Dec. 26, 2006
7060510 Electronic and optoelectronic devices and methods for preparing same Jun. 13, 2006
6828690 Non-uniform minority carrier lifetime distributions in high performance silicon power devices Dec. 7, 2004
6825100 Method for fabricating conductive line on a wafer Nov. 30, 2004
6316335 Method for fabricating semiconductor device Nov. 13, 2001
6313013 Method and device for processing semiconductor material Nov. 6, 2001
6063697 Crushing of silicon on ultrapure ice May. 16, 2000
5914189 Protected thermal barrier coating composite with multiple coatings Jun. 22, 1999
5759087 Method for inducing damage for gettering to single crystal silicon wafer Jun. 2, 1998
5710077 Method for the generation of stacking-fault-induced damage on the back of semiconductor wafers Jan. 20, 1998
5424224 Method of surface protection of a semiconductor wafer during polishing Jun. 13, 1995
5395770 Method of controlling misfit dislocation Mar. 7, 1995
5389551 Method of manufacturing a semiconductor substrate Feb. 14, 1995
5348893 Method for treatment of semiconductor wafer Sep. 20, 1994
5238875 Method of producing a bonded wafer Aug. 24, 1993
5162241 Method of manufacturing a semiconductor device Nov. 10, 1992
5133160 Process for the removal of specific crystal structures defects from semiconductor discs Jul. 28, 1992
5130260 Method of gettering unintentional mobile impurities in silicon wafer by using a damaged layer exposed to the reverse surface thereof Jul. 14, 1992
5071776 Wafer processsing method for manufacturing wafers having contaminant-gettering damage on one surface Dec. 10, 1991
5051375 Method of producing semiconductor wafer through gettering using spherical abrasives Sep. 24, 1991
5035750 Processing method for semiconductor wafers Jul. 30, 1991
5006475 Method for backside damage of silicon wafers Apr. 9, 1991
4980300 Gettering method for a semiconductor wafer Dec. 25, 1990
4971920 Gettering method for semiconductor wafers Nov. 20, 1990
4932168 Processing apparatus for semiconductor wafers Jun. 12, 1990
4820650 Introducing lattice defect with ice particles in semiconductor wafer Apr. 11, 1989
4782029 Method of gettering semiconductor wafers with an excimer laser beam Nov. 1, 1988
4539050 Process for the manufacture of semiconductor wafers with a rear side having a gettering action Sep. 3, 1985
4525239 Extrinsic gettering of GaAs wafers for MESFETS and integrated circuits Jun. 25, 1985
4249962 Method of removing contaminating impurities from device areas in a semiconductor wafer Feb. 10, 1981
4018626 Impact sound stressing for semiconductor devices Apr. 19, 1977

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