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Class Information
Number: 438/471
Name: Semiconductor device manufacturing: process > Gettering of substrate
Description: Process having a step of treating a semiconductor substrate to reduce or remove deleterious defects (impurities, vacancies, dislocations, etc.) therefrom.










Sub-classes under this class:

Class Number Class Name Patents
438/473 By implanting or irradiating 282
438/476 By layers which are coated, contacted, or diffused 313
438/477 By vapor phase surface reaction 117
438/472 By vibrating or impacting 45


Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8664694 Field effect transistor with narrow bandgap source and drain regions and method of fabrication Mar. 4, 2014
8658481 Method for manufacturing semiconductor device Feb. 25, 2014
8658516 Method of producing silicon wafer, epitaxial wafer and solid state image sensor, and device for producing silicon wafer Feb. 25, 2014
8642449 Silicon wafer Feb. 4, 2014
8629047 Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures Jan. 14, 2014
8629044 Method of producing silicon wafer, epitaxial wafer and solid state image sensor, and device for producing silicon wafer Jan. 14, 2014
8569175 Method for dry chemical treatment of substrates and also use thereof Oct. 29, 2013
8546928 Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof Oct. 1, 2013
8541305 3D integrated circuit and method of manufacturing the same Sep. 24, 2013
8492193 Semiconductor substrate for solid-state imaging sensing device as well as solid-state image sensing device and method for producing the same Jul. 23, 2013
8476149 Method of manufacturing single crystal silicon wafer from ingot grown by Czocharlski process with rapid heating/cooling process Jul. 2, 2013
8466043 Process of internal gettering for Czochralski silicon wafer Jun. 18, 2013
8399280 Method for protecting an integrated circuit chip against laser attacks Mar. 19, 2013
8383452 Semiconductor device and method for manufacturing the same Feb. 26, 2013
8349646 Semiconductor wafer for semiconductor components and production method Jan. 8, 2013
8343853 Semiconductor wafer, semiconductor device using the same, and method and apparatus for producing the same Jan. 1, 2013
8343618 Silicon wafer and method of manufacturing the same Jan. 1, 2013
8329563 Semiconductor device including a gettering layer and manufacturing method therefor Dec. 11, 2012
8309436 Method of producing epitaxial substrate with gettering for solid-state imaging device, and method of producing solid-state imaging device using same substrate Nov. 13, 2012
8227299 Removal of impurities from semiconductor device layers Jul. 24, 2012
8198177 Al.sub.xIn.sub.yGa.sub.l-x-yN mixture crystal substrate, method of growing same and method of producing same Jun. 12, 2012
8193075 Remote hydrogen plasma with ion filter for terminating silicon dangling bonds Jun. 5, 2012
8192648 Method for forming a sintered semiconductor material Jun. 5, 2012
8183646 Field effect transistor with narrow bandgap source and drain regions and method of fabrication May. 22, 2012
8178951 Compound semiconductor substrate and control for electrical property thereof May. 15, 2012
8143142 Method of fabricating epi-wafer, epi-wafer fabricated by the method, and image sensor fabricated using the epi-wafer Mar. 27, 2012
8142885 Silicon wafer and method for manufacturing the same Mar. 27, 2012
8133769 Methods for gettering in semiconductor substrate Mar. 13, 2012
8124502 Semiconductor device manufacturing method, semiconductor device and semiconductor device manufacturing installation Feb. 28, 2012
8101999 SOI substrate and method for producing the same, solid-state image pickup device and method for producing the same, and image pickup apparatus Jan. 24, 2012
8093089 Methods of manufacturing image sensors including gettering regions Jan. 10, 2012
8088670 Method for manufacturing bonded substrate with sandblast treatment Jan. 3, 2012
8087135 Method of manufacturing a piezoelectric vibrator Jan. 3, 2012
8063466 Semiconductor substrate for solid-state image sensing device as well as solid-state image sensing device and method for producing the same Nov. 22, 2011
8030182 Semiconductor device manufacturing method and semiconductor manufacturing apparatus Oct. 4, 2011
7989306 Method of forming alternating regions of Si and SiGe or SiGeC on a buried oxide layer on a substrate Aug. 2, 2011
7955956 Method for recycling/reclaiming a monitor wafer Jun. 7, 2011
7946008 Method of manufacturing a piezoelectric vibrator May. 24, 2011
7939432 Method of improving intrinsic gettering ability of wafer May. 10, 2011
7923352 Thermal treatment equipment and method for heat-treating Apr. 12, 2011
7923353 Gettering method and a wafer using the same Apr. 12, 2011
7919391 Methods for preparing a bonding surface of a semiconductor wafer Apr. 5, 2011
7915145 Silicon substrate and manufacturing method thereof Mar. 29, 2011
7893506 Field effect transistor with narrow bandgap source and drain regions and method of fabrication Feb. 22, 2011
7883628 Method of reducing the surface roughness of a semiconductor wafer Feb. 8, 2011
7825481 Field effect transistor with narrow bandgap source and drain regions and method of fabrication Nov. 2, 2010
7821008 Semiconductor device and manufacturing method thereof Oct. 26, 2010
7781311 System and method for filling vias Aug. 24, 2010
7776723 Method of manufacturing an epitaxial semiconductor substrate and method of manufacturing a semiconductor device Aug. 17, 2010
7772088 Method for manufacturing devices on a multi-layered substrate utilizing a stiffening backing substrate Aug. 10, 2010

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