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Class Information
Number: 438/471
Name: Semiconductor device manufacturing: process > Gettering of substrate
Description: Process having a step of treating a semiconductor substrate to reduce or remove deleterious defects (impurities, vacancies, dislocations, etc.) therefrom.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615470 |
Method of manufacturing gallium nitride semiconductor |
Nov. 10, 2009 |
| 7601541 |
Method for detecting Cu concentration of silicon substrate |
Oct. 13, 2009 |
| 7592235 |
Semiconductor device including semiconductor memory element and method for producing same |
Sep. 22, 2009 |
| 7582540 |
Method for manufacturing SOI wafer |
Sep. 1, 2009 |
| 7563693 |
Method for manufacturing semiconductor substrate and semiconductor substrate |
Jul. 21, 2009 |
| 7538011 |
Method of manufacturing a semiconductor device |
May. 26, 2009 |
| 7524713 |
Manufacturing method of semiconductor device |
Apr. 28, 2009 |
| 7518196 |
Field effect transistor with narrow bandgap source and drain regions and method of fabrication |
Apr. 14, 2009 |
| 7507640 |
Method for producing silicon wafer |
Mar. 24, 2009 |
| 7501329 |
Wafer gettering using relaxed silicon germanium epitaxial proximity layers |
Mar. 10, 2009 |
| 7485551 |
Semiconductor-on-insulator type heterostructure and method of fabrication |
Feb. 3, 2009 |
| 7473620 |
Process for adjusting the strain on the surface or inside a substrate made of a semiconductor material |
Jan. 6, 2009 |
| 7452742 |
Solid-state imaging device, camera and method of producing the solid-state imaging device |
Nov. 18, 2008 |
| 7419886 |
Thermal treatment equipment and method for heat-treating |
Sep. 2, 2008 |
| 7407867 |
Method for concurrently producing at least a pair of semiconductor structures that each include at least one useful layer on a substrate |
Aug. 5, 2008 |
| 7407871 |
Method for passivation of plasma etch defects in DRAM devices |
Aug. 5, 2008 |
| 7405131 |
Method and structure to prevent silicide strapping of source/drain to body in semiconductor devices with source/drain stressor |
Jul. 29, 2008 |
| 7397110 |
High resistance silicon wafer and its manufacturing method |
Jul. 8, 2008 |
| 7387952 |
Semiconductor substrate for solid-state image pickup device and producing method therefor |
Jun. 17, 2008 |
| 7364987 |
Method for manufacturing semiconductor device |
Apr. 29, 2008 |
| 7332385 |
Method of manufacturing a semiconductor device that includes gettering regions |
Feb. 19, 2008 |
| 7332416 |
Methods to manufacture contaminant-gettering materials in the surface of EUV optics |
Feb. 19, 2008 |
| 7329590 |
Method for depositing nanolaminate thin films on sensitive surfaces |
Feb. 12, 2008 |
| 7326597 |
Gettering using voids formed by surface transformation |
Feb. 5, 2008 |
| 7323398 |
Method of layer transfer comprising sequential implantations of atomic species |
Jan. 29, 2008 |
| 7320931 |
Interfacial layer for use with high k dielectric materials |
Jan. 22, 2008 |
| 7297573 |
Methods and apparatus for particle reduction in MEMS devices |
Nov. 20, 2007 |
| 7297927 |
Fabrication of low leakage-current backside illuminated photodiodes |
Nov. 20, 2007 |
| 7294561 |
Internal gettering in SIMOX SOI silicon substrates |
Nov. 13, 2007 |
| 7288206 |
High-purity alkali etching solution for silicon wafers and use thereof |
Oct. 30, 2007 |
| 7269885 |
Method of manufacturing a piezoelectric vibrator |
Sep. 18, 2007 |
| 7202124 |
Strained gettering layers for semiconductor processes |
Apr. 10, 2007 |
| 7199057 |
Method of eliminating boron contamination in annealed wafer |
Apr. 3, 2007 |
| 7198974 |
Micro-mechanically strained semiconductor film |
Apr. 3, 2007 |
| 7195990 |
Process for producing a photoelectric conversion device that includes using a gettering process |
Mar. 27, 2007 |
| 7192813 |
Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same |
Mar. 20, 2007 |
| 7166505 |
Method for making a semiconductor device having a high-k gate dielectric |
Jan. 23, 2007 |
| 7164187 |
Semiconductor and semiconductor substrate, method of manufacturing the same, and semiconductor device |
Jan. 16, 2007 |
| 7155803 |
Method of manufacturing a sensor element having integrated reference pressure |
Jan. 2, 2007 |
| 7151060 |
Device and method for thermally treating semiconductor wafers |
Dec. 19, 2006 |
| 7135386 |
Process for fabricating a semiconductor device |
Nov. 14, 2006 |
| 7135351 |
Method for controlling of thermal donor formation in high resistivity CZ silicon |
Nov. 14, 2006 |
| 7129120 |
Method of manufacturing a semiconductor film and method of manufacturing a semiconductor device by transferring crystallization promoting material in the first semiconductor film to the second |
Oct. 31, 2006 |
| 7112509 |
Method of producing a high resistivity SIMOX silicon substrate |
Sep. 26, 2006 |
| 7098148 |
Method for heat treating a semiconductor wafer |
Aug. 29, 2006 |
| 7091110 |
Method of manufacturing a semiconductor device by gettering using a anti-diffusion layer |
Aug. 15, 2006 |
| 7087518 |
Method of passivating and/or removing contaminants on a low-k dielectric/copper surface |
Aug. 8, 2006 |
| 7071079 |
Epitaxial wafer and a method for producing it |
Jul. 4, 2006 |
| 7067433 |
Method to reduce the fluorine contamination on the Al/Al-Cu pad by a post high cathod temperature plasma treatment |
Jun. 27, 2006 |
| 7045444 |
Method of manufacturing semiconductor device that includes selectively adding a noble gas element |
May. 16, 2006 |
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