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Class Information
Number: 438/457
Name: Semiconductor device manufacturing: process > Bonding of plural semiconductor substrates > Warping of semiconductor substrate
Description: Process for joining plural semiconductive substrates into an integral body including a step of bending one or more of the semiconductor substrates to be joined.


Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
7608520 Method for bonding substrate, bonded substrate, and direct bonded substrate Oct. 27, 2009
7595255 Method for manufacturing strip level substrate without warpage and method for manufacturing semiconductor package using the same Sep. 29, 2009
7585747 Low temperature hermetic bonding at water level and method of bonding for micro display application Sep. 8, 2009
7578891 Adhesive bonding sheet, semiconductor device using the same, and method for manufacturing such semiconductor device Aug. 25, 2009
7575982 Stacked-substrate processes for production of nitride semiconductor structures Aug. 18, 2009
7557898 Substrate gap adjusting device, substrate gap adjusting method, and method of manufacturing liquid crystal display device, comprising substrate pressing sections that independently transmit fo Jul. 7, 2009
7547579 Underfill process Jun. 16, 2009
7538432 Temporary structure to reduce stress and warpage in a flip chip organic package May. 26, 2009
7521292 Stretchable form of single crystal silicon for high performance electronics on rubber substrates Apr. 21, 2009
7521334 Method for producing direct bonded wafer and direct bonded wafer Apr. 21, 2009
7488667 Method for manufacturing nitride-base semiconductor element and nitride-base semiconductor element Feb. 10, 2009
7479441 Method and apparatus for flag-less water bonding tool Jan. 20, 2009
7473618 Temporary structure to reduce stress and warpage in a flip chip organic package Jan. 6, 2009
7470599 Dual-side epitaxy processes for production of nitride semiconductor structures Dec. 30, 2008
7462943 Semiconductor assembly for improved device warpage and solder ball coplanarity Dec. 9, 2008
7446020 Wafer dividing method and dividing apparatus Nov. 4, 2008
7432174 Methods for fabricating semiconductor substrates with silicon regions having differential crystallographic orientations Oct. 7, 2008
7427554 Manufacturing strained silicon substrates using a backing material Sep. 23, 2008
7410880 Method for measuring bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrate Aug. 12, 2008
7387945 Semiconductor chip, semiconductor device and electronic equipment including warpage control film, and manufacturing method of same Jun. 17, 2008
7341924 Method for manufacturing semiconductor device Mar. 11, 2008
7307004 Method with mechanically strained silicon for enhancing speed of integrated circuits or devices Dec. 11, 2007
7307005 Wafer bonding with highly compliant plate having filler material enclosed hollow core Dec. 11, 2007
7303976 Wafer bonding method Dec. 4, 2007
7276429 Method and apparatus for producing ultra-thin semiconductor chip and method and apparatus for producing ultra-thin back-illuminated solid-state image pickup device Oct. 2, 2007
7265028 Method for producing dislocation-free strained crystalline films Sep. 4, 2007
7262112 Method for producing dislocation-free strained crystalline films Aug. 28, 2007
7259080 Glass-type planar substrate, use thereof, and method for the production thereof Aug. 21, 2007
7256108 Method for reducing semiconductor die warpage Aug. 14, 2007
7244636 Semiconductor assembly for improved device warpage and solder ball coplanarity Jul. 17, 2007
7235427 Method for treating substrates for microelectronics and substrates obtained by said method Jun. 26, 2007
7235462 Methods for fabricating a substrate Jun. 26, 2007
7220656 Strained semiconductor by wafer bonding with misorientation May. 22, 2007
7199025 Fabrication and assembly structures and methods for memory devices Apr. 3, 2007
7192841 Method of wafer/substrate bonding Mar. 20, 2007
7163872 Tunable-wavelength optical filter and method of manufacturing the same Jan. 16, 2007
7160476 Method of manufacturing an electronic device Jan. 9, 2007
7144791 Lamination through a mask Dec. 5, 2006
7135383 Composite structure with high heat dissipation Nov. 14, 2006
7115480 Micromechanical strained semiconductor by wafer bonding Oct. 3, 2006
7105421 Silicon on insulator field effect transistor with heterojunction gate Sep. 12, 2006
7094666 Method and system for fabricating strained layers for the manufacture of integrated circuits Aug. 22, 2006
7084045 Method for manufacturing semiconductor device Aug. 1, 2006
7078317 Method and system for source switching and in-situ plasma bonding Jul. 18, 2006
7067352 Vertical integrated package apparatus and method Jun. 27, 2006
7060592 Image sensor and fabricating method thereof Jun. 13, 2006
7060591 Method for fabricating a semiconductor device by transferring a layer to a support with curvature Jun. 13, 2006
7049624 Member and member manufacturing method May. 23, 2006
7049207 Isolating method and transferring method for semiconductor devices May. 23, 2006
7037804 Wafer bonding using a flexible bladder press for three dimensional (3D) vertical stack integration May. 2, 2006

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