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Class Information
Number: 438/455
Name: Semiconductor device manufacturing: process > Bonding of plural semiconductor substrates
Description: Process in which plural semiconductive substrates are joined together into a coherent body, such as by thermal treatment.


Sub-classes under this class:

Class Number Class Name Patents
438/456 Having enclosed cavity 285
438/458 Subsequent separation into plural bodies (e.g., delaminating, dicing, etc.) 787
438/459 Thinning of semiconductor substrate 857
438/457 Warping of semiconductor substrate 103


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Patent Number Title Of Patent Date Issued
6908828 Support-integrated donor wafers for repeated thin donor layer separation Jun. 21, 2005
6908845 Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme Jun. 21, 2005
6905946 Thin flip-chip method Jun. 14, 2005
6905945 Microwave bonding of MEMS component Jun. 14, 2005
6903420 Silicon-on-insulator comprising integrated circuitry Jun. 7, 2005
6902987 Method for low temperature bonding and bonded structure Jun. 7, 2005
6900113 Method for producing bonded wafer and bonded wafer May. 31, 2005
6900114 Separating apparatus, separating method, and method of manufacturing semiconductor substrate May. 31, 2005
6897125 Methods of forming backside connections on a wafer stack May. 24, 2005
6897123 Bonding of parts with dissimilar thermal expansion coefficients May. 24, 2005
6893896 Method for making multilayer thin-film electronics May. 17, 2005
6893941 Semiconductor device and its manufacture method May. 17, 2005
6893932 Heterojunction bipolar transistor containing at least one silicon carbide layer May. 17, 2005
6890793 Method for producing a semiconductor die package using leadframe with locating holes May. 10, 2005
6890834 Electronic device and method for manufacturing the same May. 10, 2005
6887342 Field-assisted fusion bonding May. 3, 2005
6887770 Method for fabricating semiconductor device May. 3, 2005
6887769 Dielectric recess for wafer-to-wafer and die-to-die metal bonding and method of fabricating the same May. 3, 2005
6884694 Method of fabricating nano SOI wafer and nano SOI wafer fabricated by the same Apr. 26, 2005
6881632 Method of fabricating CMOS inverter and integrated circuits utilizing strained surface channel MOSFETS Apr. 19, 2005
6881647 Synthesis of layers, coatings or films using templates Apr. 19, 2005
6881648 Semiconductor wafer having a thin die and tethers and methods of making the same Apr. 19, 2005
6878608 Method of manufacture of silicon based package Apr. 12, 2005
6878607 Thin film device transfer method, thin film device, thin film integrated circuit device, active matrix board, liquid crystal display, and electronic apparatus Apr. 12, 2005
6875671 Method of fabricating vertical integrated circuits Apr. 5, 2005
6875636 Wafer applied thermally conductive interposer Apr. 5, 2005
6875633 Process for production of SOI substrate and process for production of semiconductor device Apr. 5, 2005
6867508 Method and apparatus for fabricating semiconductor laser device Mar. 15, 2005
6867110 Separating apparatus and processing method for plate member Mar. 15, 2005
6867073 Single mask via method and device Mar. 15, 2005
6867067 Methods for fabricating final substrates Mar. 15, 2005
6866741 Method for joining large substrates Mar. 15, 2005
6865798 Method for shaping air bearing surface of magnetic head slider Mar. 15, 2005
6864155 Methods of forming silicon-on-insulator comprising integrated circuitry, and wafer bonding methods of forming silicon-on-insulator comprising integrated circuitry Mar. 8, 2005
6864153 Methods employing hybrid adhesive materials to secure components of semiconductor device assemblies and packages to one another Mar. 8, 2005
6858518 Method for manufacturing semiconductor integrated circuit Feb. 22, 2005
6858468 Techniques for joining an opto-electronic module to a semiconductor package Feb. 22, 2005
6858517 Methods of producing a heterogeneous semiconductor structure Feb. 22, 2005
6852187 Method and apparatus for separating member Feb. 8, 2005
6852653 Method of manufacturing semiconductor substrate, semiconductor substrate, electro-optical apparatus and electronic equipment Feb. 8, 2005
6852570 Method of manufacturing a stacked semiconductor device Feb. 8, 2005
6849522 Method of press-working inorganic substrate and press machine therefor Feb. 1, 2005
6849950 Semiconductor device and method of manufacturing same Feb. 1, 2005
6846690 Integrated circuit comprising an auxiliary component, for example a passive component or a microelectromechanical system, placed above an electronic chip, and the corresponding fabrication pro Jan. 25, 2005
6846703 Three-dimensional device Jan. 25, 2005
6846723 Semiconductor substrate, semiconductor device, and processes of production of same Jan. 25, 2005
6846724 Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge Jan. 25, 2005
6846697 Integrated circuit packages and the method for making the same Jan. 25, 2005
6844243 Methods of forming semiconductor constructions Jan. 18, 2005
6844244 Dual sided lithographic substrate imaging Jan. 18, 2005

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