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Class Information
Number: 438/455
Name: Semiconductor device manufacturing: process > Bonding of plural semiconductor substrates
Description: Process in which plural semiconductive substrates are joined together into a coherent body, such as by thermal treatment.


Sub-classes under this class:

Class Number Class Name Patents
438/456 Having enclosed cavity 287
438/458 Subsequent separation into plural bodies (e.g., delaminating, dicing, etc.) 789
438/459 Thinning of semiconductor substrate 858
438/457 Warping of semiconductor substrate 103


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Patent Number Title Of Patent Date Issued
7135383 Composite structure with high heat dissipation Nov. 14, 2006
7132309 Semiconductor-on-diamond devices and methods of forming Nov. 7, 2006
7129172 Bonded wafer processing method Oct. 31, 2006
7122444 Manufacturing method of thin film device substrate Oct. 17, 2006
7118990 Methods for making large dimension, flexible piezoelectric ceramic tapes Oct. 10, 2006
7118989 Method of forming vias on a wafer stack using laser ablation Oct. 10, 2006
7112502 Method to fabricate passive components using conductive polymer Sep. 26, 2006
7109071 Semiconductor device and manufacturing method thereof Sep. 19, 2006
7105376 Self-location method and apparatus Sep. 12, 2006
7105421 Silicon on insulator field effect transistor with heterojunction gate Sep. 12, 2006
7105422 Thin film circuit device, manufacturing method thereof, electro-optical apparatus, and electronic system Sep. 12, 2006
7105448 Method for peeling off semiconductor element and method for manufacturing semiconductor device Sep. 12, 2006
7101772 Means for forming SOI Sep. 5, 2006
7102141 Flash lamp annealing apparatus to generate electromagnetic radiation having selective wavelengths Sep. 5, 2006
7101773 Method of producing a contact system on the rear of a component with stacked substrates Sep. 5, 2006
7098148 Method for heat treating a semiconductor wafer Aug. 29, 2006
7098072 Fluxless assembly of chip size semiconductor packages Aug. 29, 2006
7094664 Method for fabricating semiconductor photodetector Aug. 22, 2006
7094665 Exfoliating method, transferring method of thin film device, and thin film device, thin film integrated circuit device, and liquid crystal display device produced by the same Aug. 22, 2006
7094666 Method and system for fabricating strained layers for the manufacture of integrated circuits Aug. 22, 2006
7091108 Methods and apparatuses for manufacturing ultra thin device layers for integrated circuit devices Aug. 15, 2006
7091070 Semiconductor device and method of manufacturing the same Aug. 15, 2006
7091107 Method for producing SOI wafer and SOI wafer Aug. 15, 2006
7089635 Methods to make piezoelectric ceramic thick film arrays and elements Aug. 15, 2006
7087134 System and method for direct-bonding of substrates Aug. 8, 2006
7087502 Method for generating chip stacks Aug. 8, 2006
7087510 Method of making bondable leads using positive photoresist and structures made therefrom Aug. 8, 2006
7084045 Method for manufacturing semiconductor device Aug. 1, 2006
7083997 Bonded wafer optical MEMS process Aug. 1, 2006
7078316 Substrate joining apparatus Jul. 18, 2006
7078317 Method and system for source switching and in-situ plasma bonding Jul. 18, 2006
7074696 Semiconductor circuit module and method for fabricating semiconductor circuit modules Jul. 11, 2006
7074694 Deposition mask, manufacturing method thereof, display unit, manufacturing method thereof, and electronic apparatus including display unit Jul. 11, 2006
7074644 Method of manufacturing thin film element, thin film transistor circuit substrate, active matrix display device, electro-optical device, and electronic apparatus Jul. 11, 2006
7074693 Plasma spraying for joining silicon parts Jul. 11, 2006
7071078 Methods for securing components of semiconductor device assemblies to each other with hybrid adhesive materials Jul. 4, 2006
7071014 Methods for preserving strained semiconductor substrate layers during CMOS processing Jul. 4, 2006
7071029 Methods for fabricating final substrates Jul. 4, 2006
7071077 Method for preparing a bonding surface of a semiconductor layer of a wafer Jul. 4, 2006
7067430 Method of making relaxed silicon-germanium on insulator via layer transfer with stress reduction Jun. 27, 2006
7067338 Method of manufacturing a display device including forming electric connections on a substrate, conductor patterns on a second substrate and coupling the connections Jun. 27, 2006
7067393 Substrate assembly for stressed systems Jun. 27, 2006
7067345 Method of joining components Jun. 27, 2006
7067392 Semiconductor apparatus and fabrication method of the same Jun. 27, 2006
7067395 Display device and manufacturing method thereof Jun. 27, 2006
7067394 Manufacturing of monolithically integrated pin structures Jun. 27, 2006
7059047 Sockets for "springed" semiconductor devices Jun. 13, 2006
7060590 Layer transfer method Jun. 13, 2006
7060529 Multiple chip semiconductor arrangement having electrical components in separating regions Jun. 13, 2006
7056813 Methods of forming backside connections on a wafer stack Jun. 6, 2006

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