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Class Information
Number: 438/455
Name: Semiconductor device manufacturing: process > Bonding of plural semiconductor substrates
Description: Process in which plural semiconductive substrates are joined together into a coherent body, such as by thermal treatment.


Sub-classes under this class:

Class Number Class Name Patents
438/456 Having enclosed cavity 287
438/458 Subsequent separation into plural bodies (e.g., delaminating, dicing, etc.) 789
438/459 Thinning of semiconductor substrate 858
438/457 Warping of semiconductor substrate 103


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Patent Number Title Of Patent Date Issued
6372609 Method of Fabricating SOI wafer by hydrogen ION delamination method and SOI wafer fabricated by the method Apr. 16, 2002
6368942 Method for fabricating an ultra-low expansion mask blank having a crystalline silicon layer Apr. 9, 2002
6365429 Method for nitride based laser diode with growth substrate removed using an intermediate substrate Apr. 2, 2002
6362078 Dynamic threshold voltage device and methods for fabricating dynamic threshold voltage devices Mar. 26, 2002
6361831 Paste application method for die bonding Mar. 26, 2002
6362075 Method for making a diffused back-side layer on a bonded-wafer with a thick bond oxide Mar. 26, 2002
6358354 UV and thermally curable adhesive formulation Mar. 19, 2002
6356689 Article comprising an optical cavity Mar. 12, 2002
6355501 Three-dimensional chip stacking assembly Mar. 12, 2002
6352875 Photoelectric conversion apparatus and method of manufacturing the same Mar. 5, 2002
6346435 Laminated substrate fabricated from semiconductor wafers bonded to each other without contact between insulating layer and semiconductor layer and process of fabrication thereof Feb. 12, 2002
6344401 Method of forming a stacked-die integrated circuit chip package on a water level Feb. 5, 2002
6344375 Substrate containing compound semiconductor, method for manufacturing the same and semiconductor device using the same Feb. 5, 2002
6344372 Semiconductor device with reliable connection between projective electrode and conductive wire of the substrate Feb. 5, 2002
6342433 Composite member its separation method and preparation method of semiconductor substrate by utilization thereof Jan. 29, 2002
6335231 Method of fabricating a high reliable SOI substrate Jan. 1, 2002
6335263 Method of forming a low temperature metal bond for use in the transfer of bulk and thin film materials Jan. 1, 2002
6333208 Robust manufacturing method for making a III-V compound semiconductor device by misaligned wafer bonding Dec. 25, 2001
6331473 SOI substrate, method for making the same, semiconductive device and liquid crystal panel using the same Dec. 18, 2001
6329265 Method of making a semiconductor device using processing from both sides of a workpiece Dec. 11, 2001
6328796 Single-crystal material on non-single-crystalline substrate Dec. 11, 2001
6326279 Process for producing semiconductor article Dec. 4, 2001
6326292 Semiconductor component and manufacturing method for semiconductor component Dec. 4, 2001
6326247 Method of creating selectively thin silicon/oxide for making fully and partially depleted SOI on same waffer Dec. 4, 2001
6326285 Simultaneous multiple silicon on insulator (SOI) wafer production Dec. 4, 2001
6323109 Laminated SOI substrate and producing method thereof Nov. 27, 2001
6319757 Adhesion and/or encapsulation of silicon carbide-based semiconductor devices on ceramic substrates Nov. 20, 2001
6319749 Lead frame, semiconductor package having the same and method for manufacturing the same Nov. 20, 2001
6316332 Method for joining wafers at a low temperature and low stress Nov. 13, 2001
6316333 Method for obtaining a thin film in particular semiconductor, comprising a protected ion zone and involving an ion implantation Nov. 13, 2001
6312797 Method for manufacturing bonded wafer and bonded wafer Nov. 6, 2001
6313012 Method of fabricating multi-layered structure having single crystalline semiconductor film formed on insulator Nov. 6, 2001
6309950 Methods for making silicon-on-insulator structures Oct. 30, 2001
6306730 Method of fabricating an SOI wafer and SOI wafer fabricated by the method Oct. 23, 2001
6306719 Method for manufacturing a semiconductor device Oct. 23, 2001
6303400 Temporary attach article and method for temporary attach of devices to a substrate Oct. 16, 2001
6303468 Method for making a thin film of solid material Oct. 16, 2001
6303472 Process for cutting trenches in a single crystal substrate Oct. 16, 2001
6300164 Structure, materials, and methods for socketable ball grid Oct. 9, 2001
6300149 Integrated circuit device manufacture Oct. 9, 2001
6290804 Controlled cleavage process using patterning Sep. 18, 2001
6291314 Controlled cleavage process and device for patterned films using a release layer Sep. 18, 2001
6291266 Method for fabricating large area flexible electronics Sep. 18, 2001
6287940 Dual wafer attachment process Sep. 11, 2001
6287891 Method for transferring semiconductor device layers to different substrates Sep. 11, 2001
6284627 Method for wiring semi-conductor components in order to prevent product piracy and manipulation, semi-conductors component made according to this method and use of said semi-conductor componen Sep. 4, 2001
6281576 Method of fabricating structure for chip micro-joining Aug. 28, 2001
6282220 Red, infrared, and blue stacked laser diode array by water fusion Aug. 28, 2001
6277670 Semiconductor chip package and fabrication method thereof Aug. 21, 2001
6271107 Semiconductor with polymeric layer Aug. 7, 2001

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