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Class Information
Number: 438/455
Name: Semiconductor device manufacturing: process > Bonding of plural semiconductor substrates
Description: Process in which plural semiconductive substrates are joined together into a coherent body, such as by thermal treatment.


Sub-classes under this class:

Class Number Class Name Patents
438/456 Having enclosed cavity 287
438/458 Subsequent separation into plural bodies (e.g., delaminating, dicing, etc.) 789
438/459 Thinning of semiconductor substrate 858
438/457 Warping of semiconductor substrate 103


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Patent Number Title Of Patent Date Issued
6656756 Technique for a surface-emitting laser diode with a metal reflector Dec. 2, 2003
6653239 Thermal isolation using vertical structures Nov. 25, 2003
6653209 Method of producing silicon thin film, method of constructing SOI substrate and semiconductor device Nov. 25, 2003
6653206 Method and apparatus for processing composite member Nov. 25, 2003
6653205 Composite member separating method, thin film manufacturing method, and composite member separating apparatus Nov. 25, 2003
6645831 Thermally stable crystalline defect-free germanium bonded to silicon and silicon dioxide Nov. 11, 2003
6645833 Method for producing layered structures on a substrate, substrate and semiconductor components produced according to said method Nov. 11, 2003
6645832 Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack Nov. 11, 2003
6645830 Exfoliating method, transferring method of thin film device, and thin film device, thin film integrated circuit device and liquid crystal display device produced by the same Nov. 11, 2003
6645828 In situ plasma wafer bonding method Nov. 11, 2003
6645829 Silicon wafer with embedded optoelectronic material for monolithic OEIC Nov. 11, 2003
6638627 Method for electrostatic force bonding and a system thereof Oct. 28, 2003
6638834 Methods of forming semiconductor constructions Oct. 28, 2003
6638836 Process for manufacturing a group comprising at least two elements, one whereof includes an encapsulated micro-integrated structure, and thereby obtained group Oct. 28, 2003
6635553 Microelectronic assemblies with multiple leads Oct. 21, 2003
6635552 Methods of forming semiconductor constructions Oct. 21, 2003
6632724 Controlled cleaving process Oct. 14, 2003
6627517 Semiconductor package with improved thermal cycling performance, and method of forming same Sep. 30, 2003
6624046 Three dimensional processor using transferred thin film circuits Sep. 23, 2003
6624050 Method of manufacturing semiconductor device Sep. 23, 2003
6624047 Substrate and method of manufacturing the same Sep. 23, 2003
6620657 Method of forming a planar polymer transistor using substrate bonding techniques Sep. 16, 2003
6616854 Method of bonding and transferring a material to form a semiconductor device Sep. 9, 2003
6617225 Method of machining silicon Sep. 9, 2003
6617195 Method of reflowing organic packages using no-clean flux Sep. 9, 2003
6613643 Structure, and a method of realizing, for efficient heat removal on SOI Sep. 2, 2003
6613676 Process of reclamation of SOI substrate and reproduced substrate Sep. 2, 2003
6613652 Method for fabricating SOI devices with option of incorporating air-gap feature for better insulation and performance Sep. 2, 2003
6610582 Field-assisted fusion bonding Aug. 26, 2003
6610558 Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate Aug. 26, 2003
6607968 Method for making a silicon substrate comprising a buried thin silicon oxide film Aug. 19, 2003
6605319 Use of integrated polygen deposition and RTP for microelectromechanical systems Aug. 12, 2003
6602761 Process for production of SOI substrate and process for production of semiconductor device Aug. 5, 2003
6602760 Method of producing a semiconductor layer on a substrate Aug. 5, 2003
6602732 Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate Aug. 5, 2003
6602803 Direct attachment semiconductor chip to organic substrate Aug. 5, 2003
6596610 Method for reclaiming delaminated wafer and reclaimed delaminated wafer Jul. 22, 2003
6596622 Semiconductor device having a multi-layer pad and manufacturing method thereof Jul. 22, 2003
6596640 Method of forming a raised contact for a substrate Jul. 22, 2003
6593204 Method of fabricating a silicon-on-insulator system with thin semiconductor islets surrounded by an insulative material Jul. 15, 2003
6593211 Semiconductor substrate and method for producing the same Jul. 15, 2003
6593213 Synthesis of layers, coatings or films using electrostatic fields Jul. 15, 2003
6589811 Method for transferring semiconductor device layers to different substrates Jul. 8, 2003
6586338 Methods for creating elements of predetermined shape and apparatus using these elements Jul. 1, 2003
6583030 Method for producing an integrated circuit processed on both sides Jun. 24, 2003
6583029 Production method for silicon wafer and SOI wafer, and SOI wafer Jun. 24, 2003
6573155 Contact structure of substrates of touch panel and method of bonding the same Jun. 3, 2003
6569748 Substrate and production method thereof May. 27, 2003
6566158 Method of preparing a semiconductor using ion implantation in a SiC layer May. 20, 2003
6566149 Method for manufacturing substrate for inspecting semiconductor device May. 20, 2003

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