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Class Information
Number: 438/453
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Recessed oxide by localized oxidation (i.e., locos) > And electrical conductor formation (i.e., metallization)
Description: Process including a step of making an electrically conductive member integral to the semiconductive substrate.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8552558 Conductive compositions and processes for use in the manufacture of semiconductor devices Oct. 8, 2013
8531011 Protective structure having a semiconductor substrate Sep. 10, 2013
8298912 Semiconductor structure and method of manufacturing same Oct. 30, 2012
8187952 Method for fabricating semiconductor device May. 29, 2012
7932182 Creating novel structures using deep trenching of oriented silicon substrates Apr. 26, 2011
7863083 High temperature processing compatible metal gate electrode for pFETS and methods for fabrication Jan. 4, 2011
7727898 Semiconductor device and method of fabricating same Jun. 1, 2010
7655536 Methods of forming flash devices with shared word lines Feb. 2, 2010
7582539 Methods of cleaning a semiconductor device and methods of manufacturing a semiconductor device using the same Sep. 1, 2009
7547584 Method of reducing charging damage to integrated circuits during semiconductor manufacturing Jun. 16, 2009
7521724 Light emitting diode package and process of making the same Apr. 21, 2009
7504311 Structure and method of integrating compound and elemental semiconductors for high-performance CMOS Mar. 17, 2009
7425489 Self-aligned shallow trench isolation Sep. 16, 2008
7382363 Microencapsulated electrophoretic display with integrated driver Jun. 3, 2008
7358151 Microelectromechanical system microphone fabrication including signal processing circuitry on common substrate Apr. 15, 2008
7358184 Method of forming a conductive via plug Apr. 15, 2008
7279396 Methods of forming trench isolation regions with nitride liner Oct. 9, 2007
7241705 Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects Jul. 10, 2007
7214594 Method of making semiconductor device using a novel interconnect cladding layer May. 8, 2007
7153722 Method and apparatus for manufacturing photovoltaic device Dec. 26, 2006
7151041 Methods of forming semiconductor circuitry Dec. 19, 2006
7115464 Semiconductor device having different metal-semiconductor portions formed in a semiconductor region and a method for fabricating the semiconductor device Oct. 3, 2006
7105389 Method of manufacturing semiconductor device having impurity region under isolation region Sep. 12, 2006
7087983 Manufacturing methods of semiconductor devices and a solid state image pickup device Aug. 8, 2006
7084058 Method of forming low-loss coplanar waveguides Aug. 1, 2006
7078313 Method for fabricating an integrated semiconductor circuit to prevent formation of voids Jul. 18, 2006
7041586 Semiconductor device having a multilayer interconnection structure May. 9, 2006
7022565 Method of fabricating a trench capacitor of a mixed mode integrated circuit Apr. 4, 2006
6951791 Global column select structure for accessing a memory Oct. 4, 2005
6919619 Actively-shielded signal wires Jul. 19, 2005
6869856 Process for manufacturing a semiconductor wafer integrating electronic devices including a structure for electromagnetic decoupling Mar. 22, 2005
6869867 SEMICONDUCTOR DEVICE COMPRISING METAL SILICIDE FILMS FORMED TO COVER GATE ELECTRODE AND SOURCE-DRAIN DIFFUSION LAYERS AND METHOD OF MANUFACTURING THE SAME WHEREIN THE SILICIDE ON GATE IS THICK Mar. 22, 2005
6777290 Global column select structure for accessing a memory Aug. 17, 2004
6770541 Method for hard mask removal for deep trench isolation and related structure Aug. 3, 2004
6750107 Method and apparatus for isolating a SRAM cell Jun. 15, 2004
6709926 High performance logic and high density embedded dram with borderless contact and antispacer Mar. 23, 2004
6706617 Method for forming isolation pattern in semiconductor device Mar. 16, 2004
6696351 Semiconductor device having a selectively deposited conductive layer Feb. 24, 2004
6680227 Non-volatile memory device and fabrication method thereof Jan. 20, 2004
6664626 Semiconductor device and method of manufacturing the same Dec. 16, 2003
6660620 Method of forming noble metal pattern Dec. 9, 2003
6656814 Methods of fabricating integrated circuit devices including distributed and isolated dummy conductive regions Dec. 2, 2003
6579778 Source bus formation for a flash memory using silicide Jun. 17, 2003
6559030 Method of forming a recessed polysilicon filled trench May. 6, 2003
6551899 Methods of fabricating memory cells for nonvolatile memory devices Apr. 22, 2003
6534401 Method for selectively oxidizing a silicon/metal composite film stack Mar. 18, 2003
6514834 Method of manufacturing a semiconductor device having a low leakage current Feb. 4, 2003
6511893 Radiation hardened semiconductor device Jan. 28, 2003
6500755 Resist trim process to define small openings in dielectric layers Dec. 31, 2002
6429093 Sidewall process for forming a low resistance source line Aug. 6, 2002

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