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Class Information
Number: 438/452
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Recessed oxide by localized oxidation (i.e., locos) > Plural oxidation steps to form recessed oxide
Description: Process having multiple steps of oxidizing the semiconductor substrate in the region of the recessed oxide.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8507358 Composite wafer semiconductor Aug. 13, 2013
8466035 Methods and compositions for doping silicon substrates with molecular monolayers Jun. 18, 2013
8207005 Forming solar cells using a patterned deposition process Jun. 26, 2012
8187951 CVD flowable gap fill May. 29, 2012
8071455 Isolation structures for preventing photons and carriers from reaching active areas and methods of formation Dec. 6, 2011
7951679 Method for fabricating semiconductor device May. 31, 2011
7951637 Back contact solar cells using printed dielectric barrier May. 31, 2011
7867871 System and method for increasing breakdown voltage of LOCOS isolated devices Jan. 11, 2011
7863153 System and method for creating different field oxide profiles in a locos process Jan. 4, 2011
7629227 CVD flowable gap fill Dec. 8, 2009
7615461 Method for forming shallow trench isolation of semiconductor device Nov. 10, 2009
7534691 Isolation structures for preventing photons and carriers from reaching active areas and methods of formation May. 19, 2009
7514337 Semiconductor device using EPI-layer and method of forming the same Apr. 7, 2009
7446000 Method of fabricating semiconductor device having gate dielectrics with different thicknesses Nov. 4, 2008
7405461 Semiconductor device and method for manufacturing semiconductor device Jul. 29, 2008
7358554 Semiconductor manufacturing apparatus for modifying-in-film stress of thin films, and product formed thereby Apr. 15, 2008
7303973 ALD process for capacitor dielectric Dec. 4, 2007
7259055 Method of forming high-luminescence silicon electroluminescence device Aug. 21, 2007
7250351 Enhanced silicon-on-insulator (SOI) transistors and methods of making enhanced SOI transistors Jul. 31, 2007
7164195 Semiconductor device and semiconductor device manufacturing method Jan. 16, 2007
6943088 Method of manufacturing a trench isolation structure for a semiconductor device with a different degree of corner rounding Sep. 13, 2005
6835634 Streamlined field isolation process Dec. 28, 2004
RE38674 Process for forming a thin oxide layer Dec. 21, 2004
6818495 Method for forming high purity silicon oxide field oxide isolation region Nov. 16, 2004
6764920 Method for reducing shallow trench isolation edge thinning on tunnel oxides using partial nitride strip and small bird's beak formation for high performance flash memory devices Jul. 20, 2004
6746908 Temperature controlling method, thermal treating apparatus, and method of manufacturing semiconductor device Jun. 8, 2004
6746925 High-k dielectric bird's beak optimizations using in-situ O2 plasma oxidation Jun. 8, 2004
6727161 Isolation technology for submicron semiconductor devices Apr. 27, 2004
6723615 Semiconductor device and method of fabricating the same Apr. 20, 2004
6706616 Method for improving thermal process steps Mar. 16, 2004
6696351 Semiconductor device having a selectively deposited conductive layer Feb. 24, 2004
6645827 Method for forming isolation regions on semiconductor device Nov. 11, 2003
6639228 Method for molecular nitrogen implantation dosage monitoring Oct. 28, 2003
6610581 Method of forming isolation film in semiconductor device Aug. 26, 2003
6579769 Semiconductor device manufacturing method including forming FOX with dual oxidation Jun. 17, 2003
6534388 Method to reduce variation in LDD series resistance Mar. 18, 2003
6528390 Process for fabricating a non-volatile memory device Mar. 4, 2003
6503815 Method for reducing stress and encroachment of sidewall oxide layer of shallow trench isolation Jan. 7, 2003
6495431 Semiconductor device and method for manufacturing the same that includes a dual oxidation Dec. 17, 2002
6482718 Method of manufacturing semiconductor device Nov. 19, 2002
6465326 Methods of forming field oxide and active area regions on a semiconductor substrate Oct. 15, 2002
6444539 Method for producing a shallow trench isolation filled with thermal oxide Sep. 3, 2002
6420241 Method for forming an isolation region in a semiconductor device and resulting structure using a two step oxidation process Jul. 16, 2002
6333243 Method for growing field oxide to minimize birds' beak length Dec. 25, 2001
6326284 Semiconductor device and production thereof Dec. 4, 2001
6265286 Planarization of LOCOS through recessed reoxidation techniques Jul. 24, 2001
6261926 Method for fabricating field oxide Jul. 17, 2001
6245644 Methods of forming field oxide and active area regions on a semiconductive substrate Jun. 12, 2001
6221732 Method of producing semiconductor device Apr. 24, 2001
6187640 Semiconductor device manufacturing method including various oxidation steps with different concentration of chlorine to form a field oxide Feb. 13, 2001

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