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Class Information
Number: 438/445
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Recessed oxide by localized oxidation (i.e., locos) > Preliminary etching of groove > Masking of groove sidewall
Description: Process utilizing a layer in contact with the groove sidewalls which serves as a protective covering during either an etching or oxidation step.

Sub-classes under this class:

Class Number Class Name Patents
438/447 Dopant addition 74
438/446 Polysilicon containing sidewall 61

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8673736 Method of forming SOI-like structure in a bulk semiconductor substrate by annealing a lower portion of a trench while protecting an upper portion of the trench Mar. 18, 2014
8633113 Method for fabricating a bottom oxide layer in a trench Jan. 21, 2014
8497188 Method for producing bonded wafer Jul. 30, 2013
8420499 Concave-convex pattern forming method and magnetic tunnel junction element forming method Apr. 16, 2013
8409964 Shallow trench isolation with improved structure and method of forming Apr. 2, 2013
8354741 Lead frame manufactured from low-priced material and not requiring strict process control, semiconductor package including the same, and method of manufacturing the lead frame and the semicond Jan. 15, 2013
8241993 Method for shallow trench isolation Aug. 14, 2012
8178951 Compound semiconductor substrate and control for electrical property thereof May. 15, 2012
8178418 Method for fabricating intra-device isolation structure May. 15, 2012
8039835 Semiconductor device, method for manufacturing the same, electro-optical device and electronic apparatus Oct. 18, 2011
7960258 Method for fabricating nanoscale thermoelectric device Jun. 14, 2011
7927969 Cleaning of photolithography masks Apr. 19, 2011
7902035 Semiconductor device having multiple fin heights Mar. 8, 2011
7892945 Nanowire mesh device and method of fabricating same Feb. 22, 2011
7666755 Method of forming device isolation film of semiconductor device Feb. 23, 2010
7625776 Methods of fabricating intermediate semiconductor structures by selectively etching pockets of implanted silicon Dec. 1, 2009
7611994 Fine patterning method for semiconductor device Nov. 3, 2009
7598133 Semiconductor memory device and a method of manufacturing the same Oct. 6, 2009
7592215 Semiconductor device having self-aligned contact hole and method of fabricating the same Sep. 22, 2009
7553741 Manufacturing method of semiconductor device Jun. 30, 2009
7534723 Methods of forming fine patterns, and methods of forming trench isolation layers using the same May. 19, 2009
7504308 Method of dual bird's beak LOCOS isolation Mar. 17, 2009
7498639 Integrated BiCMOS semiconductor circuit Mar. 3, 2009
7488671 Nanostructure arrays and methods of making same Feb. 10, 2009
7413962 Method for forming sublithographic features during the manufacture of a semiconductor device and a resulting in-process apparatus Aug. 19, 2008
7407890 Patterning sub-lithographic features with variable widths Aug. 5, 2008
7393756 Method for fabricating a trench isolation structure having a high aspect ratio Jul. 1, 2008
7314810 Method for forming fine pattern of semiconductor device Jan. 1, 2008
7273780 Semiconductor device having box-shaped cylindrical storage nodes and fabrication method thereof Sep. 25, 2007
7262127 Method for Cu metallization of highly reliable dual damascene structures Aug. 28, 2007
7157350 Method of forming SOI-like structure in a bulk semiconductor substrate using self-organized atomic migration Jan. 2, 2007
7094636 Method of forming a conductive line Aug. 22, 2006
7084502 Microelectromechanical device and method for producing it Aug. 1, 2006
7052972 Method for forming sublithographic features during the manufacture of a semiconductor device and a resulting in-process apparatus May. 30, 2006
7049206 Device isolation for semiconductor devices May. 23, 2006
7049624 Member and member manufacturing method May. 23, 2006
7041573 Method for fabricating semiconductor device having trench isolation May. 9, 2006
6991994 Method of forming rounded corner in trench Jan. 31, 2006
6958276 Method of manufacturing trench-type MOSFET Oct. 25, 2005
6943088 Method of manufacturing a trench isolation structure for a semiconductor device with a different degree of corner rounding Sep. 13, 2005
6794259 Method for fabricating self-aligning mask layers Sep. 21, 2004
6787426 Method for forming word line of semiconductor device Sep. 7, 2004
6784076 Process for making a silicon-on-insulator ledge by implanting ions from silicon source Aug. 31, 2004
6777297 Disposable spacer and method of forming and using same Aug. 17, 2004
6746936 Method for forming isolation film for semiconductor devices Jun. 8, 2004
6743695 Shallow trench isolation method and method for manufacturing non-volatile memory device using the same Jun. 1, 2004
6727142 Orientation independent oxidation of nitrided silicon Apr. 27, 2004
6727161 Isolation technology for submicron semiconductor devices Apr. 27, 2004
6727150 Methods of forming trench isolation within a semiconductor substrate including, Tshaped trench with spacers Apr. 27, 2004
6727158 Structure and method for forming a faceted opening and a layer filling therein Apr. 27, 2004

1 2 3 4

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