| |
 |
|
Class Information
Number: 438/444
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Recessed oxide by localized oxidation (i.e., locos) > Preliminary etching of groove
Description: Process including a preliminary step of etching a trench into the semiconductive substrate followed by locally oxidizing the trench surfaces to form the recessed oxide therein.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7588996 |
Oxide pattern forming method and patterning method of semiconductor device |
Sep. 15, 2009 |
| 7575981 |
Method for fabricating isolation layer in semiconductor device |
Aug. 18, 2009 |
| 7553741 |
Manufacturing method of semiconductor device |
Jun. 30, 2009 |
| 7527704 |
Method for preparing film structure comprising ferroelectric single crystal layer |
May. 5, 2009 |
| 7524729 |
Method of manufacturing a semiconductor integrated circuit device having a trench |
Apr. 28, 2009 |
| 7456067 |
Method with high gapfill capability for semiconductor devices |
Nov. 25, 2008 |
| 7371659 |
Substrate laser marking |
May. 13, 2008 |
| 7320927 |
In situ hardmask pullback using an in situ plasma resist trim process |
Jan. 22, 2008 |
| 7312132 |
Field insulator FET device and fabrication method thereof |
Dec. 25, 2007 |
| 7309641 |
Method for rounding bottom corners of trench and shallow trench isolation process |
Dec. 18, 2007 |
| 7279426 |
Like integrated circuit devices with different depth |
Oct. 9, 2007 |
| 7256100 |
Manufacturing method of semiconductor device having trench type element isolation |
Aug. 14, 2007 |
| 7189628 |
Fabrication of trenches with multiple depths on the same substrate |
Mar. 13, 2007 |
| 7109120 |
Profiled standoff structure and method for optical display package |
Sep. 19, 2006 |
| 7053007 |
Method for fabricating semiconductor integrated circuit device |
May. 30, 2006 |
| 7045435 |
Shallow trench isolation method for a semiconductor wafer |
May. 16, 2006 |
| 7037768 |
Methods of etching intermediate silicon germanium layers using ion implantation to promote selectivity |
May. 2, 2006 |
| 7015115 |
Method for forming deep trench isolation and related structure |
Mar. 21, 2006 |
| 6991994 |
Method of forming rounded corner in trench |
Jan. 31, 2006 |
| 6949448 |
Local oxidation of silicon (LOCOS) method employing graded oxidation mask |
Sep. 27, 2005 |
| 6943088 |
Method of manufacturing a trench isolation structure for a semiconductor device with a different degree of corner rounding |
Sep. 13, 2005 |
| 6927138 |
Method of semiconductor device fabrication |
Aug. 9, 2005 |
| 6875697 |
Dual depth trench isolation |
Apr. 5, 2005 |
| 6852606 |
Method for forming isolation layer of semiconductor device and semiconductor device |
Feb. 8, 2005 |
| 6828209 |
Methods for manufacturing a semiconductor device including a trench isolation region |
Dec. 7, 2004 |
| 6790752 |
Methods of controlling VSS implants on memory devices, and system for performing same |
Sep. 14, 2004 |
| 6790781 |
Dual depth trench isolation |
Sep. 14, 2004 |
| 6777297 |
Disposable spacer and method of forming and using same |
Aug. 17, 2004 |
| 6768130 |
Integration of semiconductor on implanted insulator |
Jul. 27, 2004 |
| 6746936 |
Method for forming isolation film for semiconductor devices |
Jun. 8, 2004 |
| 6727161 |
Isolation technology for submicron semiconductor devices |
Apr. 27, 2004 |
| 6723615 |
Semiconductor device and method of fabricating the same |
Apr. 20, 2004 |
| 6723616 |
Process of increasing screen dielectric thickness |
Apr. 20, 2004 |
| 6720233 |
Method of producing trench insulation in a substrate |
Apr. 13, 2004 |
| 6699773 |
Shallow trench isolation type semiconductor device and method of forming the same |
Mar. 2, 2004 |
| 6693019 |
METHOD OF MANUFACTURING AN ELECTRONIC POWER DEVICE MONOLITHICALLY INTEGRATED ON A SEMICONDUCTOR AND COMPRISING A FIRST POWER REGION, A SECOND REGION, AND AN ISOLATION STRUCTURE OF LIMITED PLAN |
Feb. 17, 2004 |
| 6623985 |
Structure of and manufacturing method for semiconductor device employing ferroelectric substance |
Sep. 23, 2003 |
| 6610580 |
Flash memory array and a method and system of fabrication thereof |
Aug. 26, 2003 |
| 6610581 |
Method of forming isolation film in semiconductor device |
Aug. 26, 2003 |
| 6602793 |
Pre-clean chamber |
Aug. 5, 2003 |
| 6579777 |
Method of forming local oxidation with sloped silicon recess |
Jun. 17, 2003 |
| 6559033 |
Processing for forming integrated circuit structure with low dielectric constant material between closely spaced apart metal lines |
May. 6, 2003 |
| 6524499 |
Transparent conductive film and display device |
Feb. 25, 2003 |
| 6518147 |
Process for manufacturing an SOI wafer by oxidation of buried channels |
Feb. 11, 2003 |
| 6503815 |
Method for reducing stress and encroachment of sidewall oxide layer of shallow trench isolation |
Jan. 7, 2003 |
| 6500755 |
Resist trim process to define small openings in dielectric layers |
Dec. 31, 2002 |
| 6495431 |
Semiconductor device and method for manufacturing the same that includes a dual oxidation |
Dec. 17, 2002 |
| 6486038 |
Method for and device having STI using partial etch trench bottom liner |
Nov. 26, 2002 |
| 6479368 |
Method of manufacturing a semiconductor device having a shallow trench isolating region |
Nov. 12, 2002 |
| 6472245 |
Image sensor forming method capable of defining connection window structure by etching field oxide |
Oct. 29, 2002 |
|
|
|
