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Class Information
Number: 438/443
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Recessed oxide by localized oxidation (i.e., locos) > Etchback of recessed oxide
Description: Process having a step of thinning the formed recessed oxide by chemical etching action followed by an additional step of oxidizing a semiconductive region of the substrate.

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8628981 Method of manufacturing a ferroelectric-capacitor memory device including recovery annealing Jan. 14, 2014
8563396 3D integration method using SOI substrates and structures produced thereby Oct. 22, 2013
8450170 Semiconductor memory device and method of forming the same May. 28, 2013
8431466 Method of forming finned semiconductor devices with trench isolation Apr. 30, 2013
8343846 Method of forming isolation layer in semiconductor device Jan. 1, 2013
8324046 Poly resistor and poly eFuse design for replacement gate technology Dec. 4, 2012
8324058 Contacts for FET devices Dec. 4, 2012
8211778 Forming isolation regions for integrated circuits Jul. 3, 2012
8168508 Method of isolating nanowires from a substrate May. 1, 2012
8143139 Method of fabricating extended drain MOS transistor Mar. 27, 2012
8101486 Methods for forming isolated fin structures on bulk semiconductor material Jan. 24, 2012
8093153 Method of etching oxide layer and nitride layer Jan. 10, 2012
8067293 Power semiconductor device and method of manufacturing the same Nov. 29, 2011
7994020 Method of forming finned semiconductor devices with trench isolation Aug. 9, 2011
7964474 Use of field oxidation to simplify chamber fabrication in microfluidic devices Jun. 21, 2011
7951679 Method for fabricating semiconductor device May. 31, 2011
7943482 Method for semiconductor device having radiation hardened insulators and design structure thereof May. 17, 2011
7935609 Method for fabricating semiconductor device having radiation hardened insulators May. 3, 2011
7851362 Method for reducing an unevenness of a surface and method for making a semiconductor device Dec. 14, 2010
7816231 Device structures including backside contacts, and methods for forming same Oct. 19, 2010
RE41696 Semiconductor device and manufacturing method thereof Sep. 14, 2010
7727872 Methods for fabricating semiconductor components with conductive interconnects Jun. 1, 2010
7696061 Semiconductor device and method for manufacturing same Apr. 13, 2010
7662724 Method of manufacturing a ferroelectric capacitor with a hydrogen barrier layer Feb. 16, 2010
7655533 Semiconductor device having reduced standby leakage current and increased driving current and method for manufacturing the same Feb. 2, 2010
7648878 Method for fabricating semiconductor device with recess gate Jan. 19, 2010
7560389 Method for fabricating semiconductor element Jul. 14, 2009
7524729 Method of manufacturing a semiconductor integrated circuit device having a trench Apr. 28, 2009
7494909 Method of manufacturing a chip Feb. 24, 2009
7416947 Method of fabricating trench MIS device with thick oxide layer in bottom of trench Aug. 26, 2008
7393770 Backside method for fabricating semiconductor components with conductive interconnects Jul. 1, 2008
7358588 Trench isolation type semiconductor device which prevents a recess from being formed in a field region Apr. 15, 2008
7354818 Process for high voltage superjunction termination Apr. 8, 2008
7348254 Method of fabricating fin field-effect transistors Mar. 25, 2008
7321141 Image sensor device and manufacturing method thereof Jan. 22, 2008
7297599 Method of fabricating semiconductor device Nov. 20, 2007
7265022 Method of fabricating semiconductor device with STI structure Sep. 4, 2007
7256100 Manufacturing method of semiconductor device having trench type element isolation Aug. 14, 2007
7189592 Manufacturable single-chip hydrogen sensor Mar. 13, 2007
7183173 Method for forming isolation film in semiconductor device Feb. 27, 2007
7141483 Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill Nov. 28, 2006
7141485 Shallow trench isolation structure with low sidewall capacitance for high speed integrated circuits Nov. 28, 2006
7078312 Method for controlling etch process repeatability Jul. 18, 2006
7071076 Method of manufacturing semiconductor device Jul. 4, 2006
7064045 Laser based method and device for forming spacer structures for packaging optical reflection devices Jun. 20, 2006
7045435 Shallow trench isolation method for a semiconductor wafer May. 16, 2006
7013562 Method of using micro-contact imprinted features for formation of electrical interconnects for substrates Mar. 21, 2006
6997985 Semiconductor, semiconductor device, and method for fabricating the same Feb. 14, 2006
6967141 Method of manufacturing a semiconductor integrated circuit device having a trench Nov. 22, 2005
6933187 Method for forming narrow trench structures Aug. 23, 2005

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