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Class Information
Number: 438/439
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Recessed oxide by localized oxidation (i.e., locos)
Description: Process for making electrically isolated laterally spaced semiconductor regions including the step of oxidizing a portion of a semiconductive material to form an embedded oxide (e.g., field oxide) therein which isolates the laterally adjacent semiconductive regions.

Sub-classes under this class:

Class Number Class Name Patents
438/453 And electrical conductor formation (i.e., metallization) 199
438/449 Dopant addition 150
438/443 Etchback of recessed oxide 230
438/440 Including nondopant implantation 108
438/452 Plural oxidation steps to form recessed oxide 131
438/444 Preliminary etching of groove 169
438/448 Utilizing oxidation mask having polysilicon component 162
438/441 With electrolytic treatment step 27
438/442 With epitaxial semiconductor layer formation 144

Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8691657 Method for prevention of corona effect in a monolithic microwave integrated circuit (MMIC) Apr. 8, 2014
8662886 System for improved pressure control in horizontal diffusion furnace scavenger system for controlling oxide growth Mar. 4, 2014
8536676 Corona prevention in high power MMICs Sep. 17, 2013
8471346 Semiconductor device including a cavity Jun. 25, 2013
8460992 Semiconductor device and method of manufacturing the same Jun. 11, 2013
8432000 Trench MOS barrier schottky rectifier with a planar surface using CMP techniques Apr. 30, 2013
8426282 Method for forming semiconductor substrate isolation Apr. 23, 2013
8361876 Manufacturing method of semiconductor device Jan. 29, 2013
8319290 Trench MOS barrier schottky rectifier with a planar surface using CMP techniques Nov. 27, 2012
8298011 Semiconductor device and semiconductor device manufacturing method Oct. 30, 2012
8294238 Nonvolatile semiconductor memory device with reduced size of peripheral circuit area Oct. 23, 2012
8260098 Optocoupler circuit Sep. 4, 2012
8178418 Method for fabricating intra-device isolation structure May. 15, 2012
8030171 Method of forming element isolation film and nonvolatile semiconductor memory Oct. 4, 2011
7998806 Semiconductor device and method of manufacturing the same Aug. 16, 2011
7994006 Manufacturing method of semiconductor device Aug. 9, 2011
7968421 Method for manufacturing SOI structure in desired region of a semiconductor device Jun. 28, 2011
7960244 Process for the aligned manufacture of electronic semiconductor devices in a SOI substrate Jun. 14, 2011
7957330 Failsafe management of periodic communications during system upgrade for a network device Jun. 7, 2011
7951679 Method for fabricating semiconductor device May. 31, 2011
7947561 Methods for oxidation of a semiconductor device May. 24, 2011
7939423 Method for manufacturing nonvolatile semiconductor memory device structure May. 10, 2011
7867871 System and method for increasing breakdown voltage of LOCOS isolated devices Jan. 11, 2011
7863145 Method and resulting structure using silver for LCOS devices Jan. 4, 2011
7858466 Different-voltage device manufactured by a CMOS compatible process and high-voltage device used in the different-voltage device Dec. 28, 2010
7851329 Semiconductor device having EDMOS transistor and method for manufacturing the same Dec. 14, 2010
7816226 Method for forming self-alignment insulation structure Oct. 19, 2010
RE41696 Semiconductor device and manufacturing method thereof Sep. 14, 2010
7790541 Method and structure for forming multiple self-aligned gate stacks for logic devices Sep. 7, 2010
7736932 Method of manufacturing sensor with photodiode and charge transfer transistor Jun. 15, 2010
7709348 Method for manufacturing semiconductor device May. 4, 2010
7687356 Formation of shallow siGe conduction channel Mar. 30, 2010
7651921 Semiconductor device having a frontside contact and vertical trench isolation and method of fabricating same Jan. 26, 2010
7648878 Method for fabricating semiconductor device with recess gate Jan. 19, 2010
7645680 Method of manufacturing isolation layer pattern in a semiconductor device and isolation layer pattern using the same Jan. 12, 2010
7625783 Semiconductor element and method for manufacturing the same Dec. 1, 2009
7560389 Method for fabricating semiconductor element Jul. 14, 2009
7514285 Isolation scheme for reducing film stress in a MEMS device Apr. 7, 2009
7498226 Method for fabricating semiconductor device with step gated asymmetric recess Mar. 3, 2009
7491623 Method of making a semiconductor structure Feb. 17, 2009
7488647 System and method for providing a poly cap and a no field oxide area to prevent formation of a vertical bird's beak structure in the manufacture of a semiconductor device Feb. 10, 2009
7482190 Micromechanical strained semiconductor by wafer bonding Jan. 27, 2009
7465644 Isolation region bird's beak suppression Dec. 16, 2008
7459758 Transistor structure and method for making same Dec. 2, 2008
7396733 Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device Jul. 8, 2008
7338881 Method for manufacturing semiconductor element Mar. 4, 2008
7250351 Enhanced silicon-on-insulator (SOI) transistors and methods of making enhanced SOI transistors Jul. 31, 2007
7244661 Method for forming a buried diffusion layer with reducing topography in a surface of a semiconductor substrate Jul. 17, 2007
7232697 Semiconductor device having enhanced photo sensitivity and method for manufacture thereof Jun. 19, 2007
7199023 Atomic layer deposited HfSiON dielectric films wherein each precursor is independendently pulsed Apr. 3, 2007

1 2 3 4 5 6 7 8

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