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Class Information
Number: 438/438
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Grooved and refilled with deposited dielectric material > Reflow of insulator
Description: Process for making electrically isolated laterally spaced semiconductor regions by grooving and refilling with insulative material including a step of redistributing insulative material by the viscous flow of the insulative material when exposed to high temperature.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8642399 Fuse of semiconductor device and method of forming the same Feb. 4, 2014
8563395 Method of growing uniform semiconductor nanowires without foreign metal catalyst and devices thereof Oct. 22, 2013
8476144 Method for providing a continuous motion sequential lateral solidification for reducing or eliminating artifacts in edge regions, and a mask for facilitating such artifact reduction/eliminatio Jul. 2, 2013
8470686 Method of increasing deposition rate of silicon dioxide on a catalyst Jun. 25, 2013
8461629 Semiconductor device and method of fabricating same Jun. 11, 2013
8450182 Method of manufacturing non-volatile semiconductor memory element and method of manufacturing non-volatile semiconductor memory device May. 28, 2013
8330260 Electronic component of VQFN design and method for producing the same Dec. 11, 2012
8318584 Oxide-rich liner layer for flowable CVD gapfill Nov. 27, 2012
8294238 Nonvolatile semiconductor memory device with reduced size of peripheral circuit area Oct. 23, 2012
8268703 Surface roughening process Sep. 18, 2012
8232180 Manufacturing method of semiconductor device comprising active region divided by STI element isolation structure Jul. 31, 2012
8158488 Method of increasing deposition rate of silicon dioxide on a catalyst Apr. 17, 2012
8115272 Silicon dioxide cantilever support and method for silicon etched structures Feb. 14, 2012
8114779 Silicon dioxide cantilever support and method for silicon etched structures Feb. 14, 2012
8026177 Silicon dioxide cantilever support and method for silicon etched structures Sep. 27, 2011
8017496 Methods of manufacturing a semiconductor device Sep. 13, 2011
7998830 Semiconductor device with both I/O and core components and method of fabricating same Aug. 16, 2011
7868361 Semiconductor device with both I/O and core components and method of fabricating same Jan. 11, 2011
7838390 Methods of forming integrated circuit devices having ion-cured electrically insulating layers therein Nov. 23, 2010
7799706 Neutral beam-assisted atomic layer chemical vapor deposition apparatus and method of processing substrate using the same Sep. 21, 2010
7795109 Isolation trenches with conductive plates Sep. 14, 2010
7659181 Sub-micron space liner and filler process Feb. 9, 2010
7651924 Method of fabricating semiconductor memory device in which an oxide film fills a trench in a semiconductor substrate Jan. 26, 2010
7611983 Semiconductor device and a manufacturing method of the same Nov. 3, 2009
7572712 Method to form selective strained Si using lateral epitaxy Aug. 11, 2009
7563658 Method for manufacturing semiconductor device Jul. 21, 2009
7553713 Method of manufacturing semiconductor substrates and semiconductor devices Jun. 30, 2009
7521367 FIB/RIE method for in-line circuit modification of microelectronic chips containing organic dielectric Apr. 21, 2009
7510946 Method for filling of nanoscale holes and trenches and for planarizing of a wafer surface Mar. 31, 2009
7491622 Process of forming an electronic device including a layer formed using an inductively coupled plasma Feb. 17, 2009
7470585 Integrated circuit and fabrication process Dec. 30, 2008
7462565 Method of manufacturing semiconductor device Dec. 9, 2008
RE40061 Multi-chip stacked devices Feb. 12, 2008
7320927 In situ hardmask pullback using an in situ plasma resist trim process Jan. 22, 2008
7312130 Methods of forming capacitor structures including L-shaped cavities Dec. 25, 2007
7273796 Methods of forming trench isolation in the fabrication of integrated circuitry and methods of fabricating integrated circuitry Sep. 25, 2007
7268006 Electronic device including a guest material within a layer and a process for forming the same Sep. 11, 2007
7238586 Seamless trench fill method utilizing sub-atmospheric pressure chemical vapor deposition technique Jul. 3, 2007
7235477 Multi-layer interconnection circuit module and manufacturing method thereof Jun. 26, 2007
7169714 Method and structure for graded gate oxides on vertical and non-planar surfaces Jan. 30, 2007
7169632 Radiation-emitting semiconductor component and method for producing the semiconductor component Jan. 30, 2007
7170156 Laminar multi-layer piezoelectric roll component Jan. 30, 2007
7163869 Shallow trench isolation structure with converted liner layer Jan. 16, 2007
7153776 Method for reducing amine based contaminants Dec. 26, 2006
7153736 Methods of forming capacitors and methods of forming capacitor dielectric layers Dec. 26, 2006
7125785 Mixed orientation and mixed material semiconductor-on-insulator wafer Oct. 24, 2006
7008880 Method for fabricating semiconductor integrated circuit device Mar. 7, 2006
6951804 Formation of a tantalum-nitride layer Oct. 4, 2005
6936527 Low voltage non-volatile memory cell Aug. 30, 2005
6930019 Method for forming MOS transistor Aug. 16, 2005

1 2 3

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