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Class Information
Number: 438/433
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Grooved and refilled with deposited dielectric material > Dopant addition
Description: Process for making electrically isolated laterally spaced semiconductor regions by grooving and refilling with insulative material combined with a step of introducing an electrically active dopant species into a semiconductive region of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/434 From doped insulator in groove 72

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8604584 Semiconductor device and method of manufacturing semiconductor device Dec. 10, 2013
8580651 Methods for manufacturing a trench type semiconductor device having a thermally sensitive refill material Nov. 12, 2013
8569132 Semiconductor device and manufacturing method thereof Oct. 29, 2013
8546242 Hybrid gap-fill approach for STI formation Oct. 1, 2013
8481404 Leakage control in field effect transistors based on an implantation species introduced locally at the STI edge Jul. 9, 2013
8476734 Semiconductor component and methods for producing a semiconductor component Jul. 2, 2013
8461629 Semiconductor device and method of fabricating same Jun. 11, 2013
8440495 Method for reducing crosstalk in image sensors using implant technology May. 14, 2013
8440540 Method for doping a selected portion of a device May. 14, 2013
8431465 Semiconductor device and method for fabricating the same Apr. 30, 2013
8399959 Programmable poly fuse Mar. 19, 2013
8389377 Sensor element isolation in a backside illuminated image sensor Mar. 5, 2013
8389370 Radiation-tolerant integrated circuit device and method for fabricating Mar. 5, 2013
8368170 Reducing device performance drift caused by large spacings between active regions Feb. 5, 2013
8329553 Method for manufacturing semiconductor device and NAND-type flash memory Dec. 11, 2012
8278184 Fabrication method of a non-planar transistor Oct. 2, 2012
8278183 Production of isolation trenches with different sidewall dopings Oct. 2, 2012
8263473 Method of forming semiconductor devices Sep. 11, 2012
8247884 Semiconductor structure for fabricating a handle wafer contact in a trench insulated SOI disc Aug. 21, 2012
8242573 Semiconductor device with isolation formed between digital circuit and analog circuit Aug. 14, 2012
8236710 Technique to create a buried plate in embedded dynamic random access memory device Aug. 7, 2012
8222093 Methods for forming barrier regions within regions of insulating material resulting in outgassing paths from the insulating material and related devices Jul. 17, 2012
8216896 Method of forming STI regions in electronic devices Jul. 10, 2012
8187950 Method of eliminating micro-trenches during spacer etch May. 29, 2012
8187948 Hybrid gap-fill approach for STI formation May. 29, 2012
8173517 Method for forming a self-aligned isolation structure utilizing sidewall spacers as an etch mask and remaining as a portion of the isolation structure May. 8, 2012
8159039 Superjunction device having a dielectric termination and methods for manufacturing the device Apr. 17, 2012
8119496 Semiconductor device and manufacturing method thereof Feb. 21, 2012
8115271 Reducing device performance drift caused by large spacings between active regions Feb. 14, 2012
8097891 Group III nitride semiconductor light emitting device and method for producing the same Jan. 17, 2012
8071462 Isolation structures for integrated circuits and modular methods of forming the same Dec. 6, 2011
8058091 Front lit PIN/NIP diode having a continuous anode/cathode Nov. 15, 2011
8048760 Semiconductor structure and method of manufacture Nov. 1, 2011
8043934 Methods of use and formation of a lateral bipolar transistor with counter-doped implant regions under collector and/or emitter regions Oct. 25, 2011
8026112 Method of manufacturing semiconductor device Sep. 27, 2011
8017496 Methods of manufacturing a semiconductor device Sep. 13, 2011
8013372 Integrated circuit including a stressed dielectric layer with stable stress Sep. 6, 2011
8012849 Semiconductor device and manufacturing method thereof Sep. 6, 2011
8003424 Method for fabricating CMOS image sensor with pocket photodiode for minimizng image lag Aug. 23, 2011
7998830 Semiconductor device with both I/O and core components and method of fabricating same Aug. 16, 2011
7994018 Method for fabricating semiconductor device Aug. 9, 2011
7977202 Reducing device performance drift caused by large spacings between active regions Jul. 12, 2011
7976629 Crystal film fabrication Jul. 12, 2011
7968424 Method of implantation Jun. 28, 2011
7858491 Method of fabricating semiconductor device Dec. 28, 2010
7858492 Method of filling a trench and method of forming an isolating layer structure using the same Dec. 28, 2010
7851328 STI stress modulation with additional implantation and natural pad sin mask Dec. 14, 2010
7833874 Technique for forming an isolation trench as a stress source for strain engineering Nov. 16, 2010
7790568 Method for fabricating semiconductor device Sep. 7, 2010
7776672 Semiconductor device and manufacturing method thereof Aug. 17, 2010

1 2 3 4 5 6 7

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