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Class Information
Number: 438/430
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Grooved and refilled with deposited dielectric material > And deposition of polysilicon or noninsulative material into groove
Description: Process for making electrically isolated laterally spaced semiconductor regions by grooving and refilling with insulative material wherein polysilicon or noninsulative material is deposited into the groove.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7608515 |
Diffusion layer for stressed semiconductor devices |
Oct. 27, 2009 |
| 7598183 |
Bi-layer capping of low-K dielectric films |
Oct. 6, 2009 |
| 7592245 |
Poly filled substrate contact on SOI structure |
Sep. 22, 2009 |
| 7541255 |
Method for manufacturing semiconductor device |
Jun. 2, 2009 |
| 7491641 |
Method of forming a conductive line and a method of forming a conductive contact adjacent to and insulated from a conductive line |
Feb. 17, 2009 |
| 7491618 |
Methods and semiconductor structures for latch-up suppression using a conductive region |
Feb. 17, 2009 |
| 7488647 |
System and method for providing a poly cap and a no field oxide area to prevent formation of a vertical bird's beak structure in the manufacture of a semiconductor device |
Feb. 10, 2009 |
| 7468307 |
Semiconductor structure and method |
Dec. 23, 2008 |
| 7462549 |
Shallow trench isolation process and structure with minimized strained silicon consumption |
Dec. 9, 2008 |
| 7462550 |
Method of forming a trench semiconductor device and structure therefor |
Dec. 9, 2008 |
| 7449392 |
Semiconductor device capable of threshold voltage adjustment by applying an external voltage |
Nov. 11, 2008 |
| 7442619 |
Method of forming substantially L-shaped silicide contact for a semiconductor device |
Oct. 28, 2008 |
| 7439156 |
Method for manufacturing semiconductor device |
Oct. 21, 2008 |
| 7432173 |
Methods of fabricating silicon-on-insulator substrates having a laser-formed single crystalline film |
Oct. 7, 2008 |
| 7432605 |
Overlay mark, method for forming the same and application thereof |
Oct. 7, 2008 |
| 7425486 |
Method for forming a trench capacitor |
Sep. 16, 2008 |
| 7419611 |
Processes and materials for step and flash imprint lithography |
Sep. 2, 2008 |
| 7416947 |
Method of fabricating trench MIS device with thick oxide layer in bottom of trench |
Aug. 26, 2008 |
| 7416937 |
Semiconductor device and method for fabricating the same |
Aug. 26, 2008 |
| 7413961 |
Method of fabricating a transistor structure |
Aug. 19, 2008 |
| 7410881 |
Method of manufacturing flash memory device |
Aug. 12, 2008 |
| 7396739 |
Method for integrating an electronic component or similar into a substrate |
Jul. 8, 2008 |
| 7394144 |
Trench semiconductor device and method of manufacturing it |
Jul. 1, 2008 |
| 7387907 |
Image sensor with optical guard ring and fabrication method thereof |
Jun. 17, 2008 |
| 7371657 |
Method for forming an isolating trench with a dielectric material |
May. 13, 2008 |
| 7371655 |
Method of fabricating low-power CMOS device |
May. 13, 2008 |
| 7371607 |
Method of manufacturing semiconductor device and method of manufacturing electronic device |
May. 13, 2008 |
| 7358144 |
Method for fabricating semiconductor device |
Apr. 15, 2008 |
| 7358172 |
Poly filled substrate contact on SOI structure |
Apr. 15, 2008 |
| 7358558 |
Flash memory device |
Apr. 15, 2008 |
| 7312133 |
Method of manufacturing semiconductor device |
Dec. 25, 2007 |
| 7291541 |
System and method for providing improved trench isolation of semiconductor devices |
Nov. 6, 2007 |
| 7279396 |
Methods of forming trench isolation regions with nitride liner |
Oct. 9, 2007 |
| 7259074 |
Trench isolation method in flash memory device |
Aug. 21, 2007 |
| 7244660 |
Method for manufacturing a semiconductor component |
Jul. 17, 2007 |
| 7235457 |
High permeability layered films to reduce noise in high speed interconnects |
Jun. 26, 2007 |
| 7214595 |
Method of producing semiconductor devices |
May. 8, 2007 |
| 7205208 |
Method of manufacturing a semiconductor device |
Apr. 17, 2007 |
| 7199019 |
Method for forming tungsten contact plug |
Apr. 3, 2007 |
| 7189619 |
Process for manufacturing vertically insulated structural components on SOI material of various thickness |
Mar. 13, 2007 |
| 7189627 |
Method to improve SRAM performance and stability |
Mar. 13, 2007 |
| 7176105 |
Dielectric gap fill with oxide selectively deposited over silicon liner |
Feb. 13, 2007 |
| 7176120 |
Method of manufacturing semiconductor device |
Feb. 13, 2007 |
| 7163869 |
Shallow trench isolation structure with converted liner layer |
Jan. 16, 2007 |
| 7135381 |
Wet etching method of removing silicon from a substrate and method of forming trench isolation |
Nov. 14, 2006 |
| 7135380 |
Method for manufacturing semiconductor device |
Nov. 14, 2006 |
| 7125774 |
Method of manufacturing transistor having recessed channel |
Oct. 24, 2006 |
| 7122443 |
Method of fabricating flash memory device |
Oct. 17, 2006 |
| 7118966 |
Methods of forming conductive lines |
Oct. 10, 2006 |
| 7115478 |
Method of fabricating a semiconductor device and a method of generating a mask pattern |
Oct. 3, 2006 |
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