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Class Information
Number: 438/430
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Grooved and refilled with deposited dielectric material > And deposition of polysilicon or noninsulative material into groove
Description: Process for making electrically isolated laterally spaced semiconductor regions by grooving and refilling with insulative material wherein polysilicon or noninsulative material is deposited into the groove.


Sub-classes under this class:

Class Number Class Name Patents
438/431 Oxidation of deposited material 181


Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
7449392 Semiconductor device capable of threshold voltage adjustment by applying an external voltage Nov. 11, 2008
7442619 Method of forming substantially L-shaped silicide contact for a semiconductor device Oct. 28, 2008
7439156 Method for manufacturing semiconductor device Oct. 21, 2008
7432173 Methods of fabricating silicon-on-insulator substrates having a laser-formed single crystalline film Oct. 7, 2008
7432605 Overlay mark, method for forming the same and application thereof Oct. 7, 2008
7425486 Method for forming a trench capacitor Sep. 16, 2008
7419611 Processes and materials for step and flash imprint lithography Sep. 2, 2008
7416937 Semiconductor device and method for fabricating the same Aug. 26, 2008
7416947 Method of fabricating trench MIS device with thick oxide layer in bottom of trench Aug. 26, 2008
7413961 Method of fabricating a transistor structure Aug. 19, 2008
7410881 Method of manufacturing flash memory device Aug. 12, 2008
7396739 Method for integrating an electronic component or similar into a substrate Jul. 8, 2008
7394144 Trench semiconductor device and method of manufacturing it Jul. 1, 2008
7387907 Image sensor with optical guard ring and fabrication method thereof Jun. 17, 2008
7371607 Method of manufacturing semiconductor device and method of manufacturing electronic device May. 13, 2008
7371655 Method of fabricating low-power CMOS device May. 13, 2008
7371657 Method for forming an isolating trench with a dielectric material May. 13, 2008
7358558 Flash memory device Apr. 15, 2008
7358172 Poly filled substrate contact on SOI structure Apr. 15, 2008
7358144 Method for fabricating semiconductor device Apr. 15, 2008
7312133 Method of manufacturing semiconductor device Dec. 25, 2007
7291541 System and method for providing improved trench isolation of semiconductor devices Nov. 6, 2007
7279396 Methods of forming trench isolation regions with nitride liner Oct. 9, 2007
7259074 Trench isolation method in flash memory device Aug. 21, 2007
7244660 Method for manufacturing a semiconductor component Jul. 17, 2007
7235457 High permeability layered films to reduce noise in high speed interconnects Jun. 26, 2007
7214595 Method of producing semiconductor devices May. 8, 2007
7205208 Method of manufacturing a semiconductor device Apr. 17, 2007
7199019 Method for forming tungsten contact plug Apr. 3, 2007
7189619 Process for manufacturing vertically insulated structural components on SOI material of various thickness Mar. 13, 2007
7189627 Method to improve SRAM performance and stability Mar. 13, 2007
7176120 Method of manufacturing semiconductor device Feb. 13, 2007
7176105 Dielectric gap fill with oxide selectively deposited over silicon liner Feb. 13, 2007
7163869 Shallow trench isolation structure with converted liner layer Jan. 16, 2007
7135380 Method for manufacturing semiconductor device Nov. 14, 2006
7135381 Wet etching method of removing silicon from a substrate and method of forming trench isolation Nov. 14, 2006
7125774 Method of manufacturing transistor having recessed channel Oct. 24, 2006
7122443 Method of fabricating flash memory device Oct. 17, 2006
7118966 Methods of forming conductive lines Oct. 10, 2006
7115478 Method of fabricating a semiconductor device and a method of generating a mask pattern Oct. 3, 2006
7112513 Sub-micron space liner and densification process Sep. 26, 2006
7112512 Method of manufacturing liquid crystal display Sep. 26, 2006
7109094 Method for preventing leakage in shallow trench isolation Sep. 19, 2006
7101770 Capacitive techniques to reduce noise in high speed interconnections Sep. 5, 2006
7081398 Methods of forming a conductive line Jul. 25, 2006
7029988 Fabrication method and device structure of shallow trench insulation for silicon wafer containing silicon-germanium Apr. 18, 2006
7029989 Semiconductor device and method of manufacturing the same Apr. 18, 2006
7022565 Method of fabricating a trench capacitor of a mixed mode integrated circuit Apr. 4, 2006
7018907 Methods for forming shallow trench isolation structures Mar. 28, 2006
7015115 Method for forming deep trench isolation and related structure Mar. 21, 2006

1 2 3 4 5 6 7


 
 
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