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Class Information
Number: 438/43
Name: Semiconductor device manufacturing: process > Making device or circuit emissive of nonelectrical signal > Groove formation > Tapered etching
Description: Process wherein the material removal step is by etching the substrate to form a groove with nonparallel sides.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
6907150 Etching process for micromachining crystalline materials and devices fabricated thereby Jun. 14, 2005
6897139 Group III nitride compound semiconductor device May. 24, 2005
6879306 Scanned display systems using color laser light sources Apr. 12, 2005
6875629 III group nitride based semiconductor element and method for manufacture thereof Apr. 5, 2005
6869813 Chip-type LED and process of manufacturing the same Mar. 22, 2005
6858907 Method of fabricating semiconductor device having notched gate Feb. 22, 2005
6849473 Semiconductor light-emitting device and method for manufacturing thereof Feb. 1, 2005
6841472 Semiconductor device and method of fabricating the same Jan. 11, 2005
6829265 Semiconductor laser array Dec. 7, 2004
6818564 Method for etching a tapered bore in a silicon substrate, and a semiconductor wafer comprising the substrate Nov. 16, 2004
6773947 Method of manufacturing semiconductor device including an opening formed by a laser Aug. 10, 2004
6767756 Method of manufacturing tapered optical waveguide Jul. 27, 2004
6750077 Semiconductor device and method of fabricating the same Jun. 15, 2004
6723576 Disposing method for semiconductor elements Apr. 20, 2004
6695455 Fabrication of micromirrors on silicon substrate Feb. 24, 2004
6670211 Semiconductor laser device Dec. 30, 2003
6664145 Semiconductor device and manufacturing method thereof Dec. 16, 2003
6639735 Method for manufacturing an optical device Oct. 28, 2003
6589807 Semiconductor device and method for manufacturing the same Jul. 8, 2003
6586327 Fabrication of semiconductor devices Jul. 1, 2003
6567445 Method to manufacture a heat emission apparatus in a semiconductor laser May. 20, 2003
6541297 Method for fabricating semiconductor device and semiconductor device Apr. 1, 2003
6531328 Packaging of light-emitting diode Mar. 11, 2003
6528336 Method for fabrication of a silicon photosensor array on a wafer and testing the same Mar. 4, 2003
6518071 Magnetoresistive random access memory device and method of fabrication thereof Feb. 11, 2003
6461887 Method to form an inverted staircase STI structure by etch-deposition-etch and selective epitaxial growth Oct. 8, 2002
6410358 Manufacturing method for reflection type liquid crystal display Jun. 25, 2002
6344150 Etching method Feb. 5, 2002
6300151 Method for manufacturing laser diode chip, optical transmitting/receiving module and method for aligning positions thereof Oct. 9, 2001
6235547 Semiconductor device and method of fabricating the same May. 22, 2001
6222866 Surface emitting semiconductor laser, its producing method and surface emitting semiconductor laser array Apr. 24, 2001
6204083 Process for producing infrared emitting device and infrared emitting device produced by the process Mar. 20, 2001
6165811 Method of fabricating a high power semiconductor laser with self-aligned ion implantation Dec. 26, 2000
6143583 Dissolved wafer fabrication process and associated microelectromechanical device having a support substrate with spacing mesas Nov. 7, 2000
5920767 Method of forming a groove in a semiconductor laser diode and a semiconductor laser diode Jul. 6, 1999
5914499 High voltage silicon carbide semiconductor device with bended edge Jun. 22, 1999
5904492 Quantum wire laser diode fabrication method May. 18, 1999
5898662 Semiconductor light emitting device, its manufacturing method and optical recording and/or reproducing apparatus Apr. 27, 1999
5882951 Method for making InP-based lasers with reduced blue shifts Mar. 16, 1999
5882950 Fabrication method for horizontal direction semiconductor PN junction array Mar. 16, 1999
5854088 Method of manufacturing a surface-emitting laser Dec. 29, 1998
5827754 Fabrication method for high-output quantum wire array diode structure Oct. 27, 1998
5770475 Crystal growth method for compound semiconductor Jun. 23, 1998
5728605 Method for producing an optical semiconductor device having a carrier injection path or an electric-field applying path Mar. 17, 1998
5715267 Semiconductor laser device and method of manufacturing the same as well as method of coupling semiconductor laser device and optical waveguide Feb. 3, 1998
5700382 Method for fabricating a silicon semiconductor substrate having an integrated waveguide and an optical fiber coupled thereto Dec. 23, 1997
5683937 Method of making a semiconductor device Nov. 4, 1997
5679590 Method for manufacturing contact hole for a nonvolatile semiconductor device Oct. 21, 1997
5633193 Method of making an InP-based device comprising semiconductor growth on a non-planar surface May. 27, 1997
5601687 Mask design Feb. 11, 1997

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