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Class Information
Number: 438/427
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Grooved and refilled with deposited dielectric material > Refilling multiple grooves of different widths or depths
Description: Process for making electrically isolated laterally spaced semiconductor regions by grooving and refilling with insulative material wherein grooves of differing widths or depths are filled with insulative material.










Sub-classes under this class:

Class Number Class Name Patents
438/428 Reflow of insulator 68


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8703604 Creation of vias and trenches with different depths Apr. 22, 2014
8704332 Metal oxide semiconductor field effect transistor (MOSFET) gate termination Apr. 22, 2014
8703577 Method for fabrication deep trench isolation structure Apr. 22, 2014
8691660 Semiconductor component with trench isolation and corresponding production method Apr. 8, 2014
8691661 Trench with reduced silicon loss Apr. 8, 2014
8685832 Trench filling method and method of manufacturing semiconductor integrated circuit device Apr. 1, 2014
8685831 Trenches with reduced silicon loss Apr. 1, 2014
8679941 Method to improve wet etch budget in FEOL integration Mar. 25, 2014
8673737 Array and moat isolation structures and method of manufacture Mar. 18, 2014
8664050 Structure and method to improve ETSOI MOSFETS with back gate Mar. 4, 2014
8652931 Method of dual-depth STI formation Feb. 18, 2014
8652933 Semiconductor structure having wide and narrow deep trenches with different materials Feb. 18, 2014
8652934 Semiconductor substrate for photonic and electronic structures and method of manufacture Feb. 18, 2014
8642429 Wide and deep oxide trench in a semiconductor substrate with interspersed vertical oxide ribs Feb. 4, 2014
8629028 Metal oxide semiconductor field effect transistor (MOSFET) gate termination Jan. 14, 2014
8629527 Semiconductor structures Jan. 14, 2014
8609491 Method for fabricating semiconductor device with buried bit lines Dec. 17, 2013
8587085 Semiconductor device with trench isolation having a diffusion preventing film and manufacturing method thereof Nov. 19, 2013
8575035 Methods of forming varying depth trenches in semiconductor devices Nov. 5, 2013
8569145 Semiconductor device and method of producing the same Oct. 29, 2013
8563446 Technique to create a buried plate in embedded dynamic random access memory device Oct. 22, 2013
8551860 Semiconductor devices having through electrodes and methods of fabricating the same Oct. 8, 2013
RE44532 Method for manufacturing a transistor of a semiconductor memory device Oct. 8, 2013
8546218 Method for fabricating semiconductor device with buried word line Oct. 1, 2013
8541286 Methods for fabricating integrated circuits Sep. 24, 2013
8536017 Method of manufacturing semiconductor device Sep. 17, 2013
8530329 Methods of fabricating semiconductor devices having various isolation regions Sep. 10, 2013
8524569 Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer Sep. 3, 2013
8501578 Semiconductor structure formed without requiring thermal oxidation Aug. 6, 2013
8501581 Methods of forming semiconductor constructions Aug. 6, 2013
8497174 Method of fabricating semiconductor device including vertical channel transistor Jul. 30, 2013
8492260 Processes of forming an electronic device including a feature in a trench Jul. 23, 2013
8481431 Method for opening one-side contact region of vertical transistor and method for fabricating one-side junction region using the same Jul. 9, 2013
8479384 Methods for integrated circuit fabrication with protective coating for planarization Jul. 9, 2013
8476142 Preferential dielectric gapfill Jul. 2, 2013
8461016 Integrated circuit devices and methods of forming memory array and peripheral circuitry isolation Jun. 11, 2013
8445356 Integrated circuit having back gating, improved isolation and reduced well resistance and method to fabricate same May. 21, 2013
8426289 Wafer with spacer including horizontal member Apr. 23, 2013
8415224 Method of fabricating a semiconductor device including forming trenches having particular structures Apr. 9, 2013
8409964 Shallow trench isolation with improved structure and method of forming Apr. 2, 2013
8399363 Methods of forming oxide-filled trenches in substrates using multiple-temperature oxide deposition techniques Mar. 19, 2013
8394705 Method of manufacturing semiconductor device having optical devices Mar. 12, 2013
8384188 Semiconductor device and fabrication method thereof Feb. 26, 2013
8383488 Method for producing a semiconductor component with two trenches Feb. 26, 2013
8349699 Methods of forming trench isolation in the fabrication of integrated circuitry and methods of fabricating integrated circuitry Jan. 8, 2013
8338264 Methods for forming isolation structures for semiconductor devices Dec. 25, 2012
8329553 Method for manufacturing semiconductor device and NAND-type flash memory Dec. 11, 2012
8318583 Method of forming isolation structure of semiconductor device Nov. 27, 2012
8313661 Deep trench liner removal process Nov. 20, 2012
8308964 Planarization method for media Nov. 13, 2012

1 2 3 4 5 6 7 8 9 10 11 12 13










 
 
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