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Class Information
Number: 438/426
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Grooved and refilled with deposited dielectric material > Combined with formation of recessed oxide by localized oxidation > Recessed oxide laterally extending from groove
Description:


Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
7622369 Device isolation technology on semiconductor substrate Nov. 24, 2009
7611963 Method for forming a multi-layer shallow trench isolation structure in a semiconductor device Nov. 3, 2009
7601609 Method for manufacturing device isolation film of semiconductor device Oct. 13, 2009
7572713 Method of fabricating semiconductor device with STI structure Aug. 11, 2009
7563689 Method for fabricating nonvolatile memory device Jul. 21, 2009
7560359 Methods of forming asymmetric recesses and gate structures that fill such recesses and related methods of forming semiconductor devices that include such recesses and gate structures Jul. 14, 2009
7557422 Semiconductor device with STI structure Jul. 7, 2009
7553741 Manufacturing method of semiconductor device Jun. 30, 2009
7550364 Stress engineering using dual pad nitride with selective SOI device architecture Jun. 23, 2009
7541258 Method of manufacturing semiconductor substrate and method of manufacturing semiconductor device Jun. 2, 2009
7534726 Method of forming a recess channel trench pattern, and fabricating a recess channel transistor May. 19, 2009
7524751 Method for forming contact hole in semiconductor device Apr. 28, 2009
7524732 Semiconductor device with L-shaped spacer and method of manufacturing the same Apr. 28, 2009
7524729 Method of manufacturing a semiconductor integrated circuit device having a trench Apr. 28, 2009
7521332 Resistance-based etch depth determination for SGT technology Apr. 21, 2009
7514337 Semiconductor device using EPI-layer and method of forming the same Apr. 7, 2009
7510927 LOCOS isolation for fully-depleted SOI devices Mar. 31, 2009
7501674 Semiconductor device having fin transistor and planar transistor and associated methods of manufacture Mar. 10, 2009
7473615 Semiconductor processing methods Jan. 6, 2009
7449392 Semiconductor device capable of threshold voltage adjustment by applying an external voltage Nov. 11, 2008
7446000 Method of fabricating semiconductor device having gate dielectrics with different thicknesses Nov. 4, 2008
7445973 Transistor surround gate structure with silicon-on-insulator isolation for memory cells, memory arrays, memory devices and systems and methods of forming same Nov. 4, 2008
7439604 Method of forming dual gate dielectric layer Oct. 21, 2008
7432172 Plasma etching method Oct. 7, 2008
7427553 Fabricating method of semiconductor device Sep. 23, 2008
7427515 Electronic element including ferroelectric substance film and method of manufacturing the same Sep. 23, 2008
7425495 Method of manufacturing semiconductor substrate and semiconductor device Sep. 16, 2008
7422960 Method of forming gate arrays on a partial SOI substrate Sep. 9, 2008
7416956 Self-aligned trench filling for narrow gap isolation regions Aug. 26, 2008
7410891 Method of manufacturing a superjunction device Aug. 12, 2008
7402498 Methods of forming trench isolation regions Jul. 22, 2008
7396738 Method of forming isolation structure of flash memory device Jul. 8, 2008
7396729 Methods of forming semiconductor devices having a trench with beveled corners Jul. 8, 2008
7396732 Formation of deep trench airgaps and related applications Jul. 8, 2008
7303951 Method of manufacturing a trench isolation region in a semiconductor device Dec. 4, 2007
7291540 Method of forming an implantable electronic device chip level hermetic and biocompatible electronics package using SOI wafers Nov. 6, 2007
7265022 Method of fabricating semiconductor device with STI structure Sep. 4, 2007
7241665 Shallow trench isolation Jul. 10, 2007
7208390 Semiconductor device structure and method for forming Apr. 24, 2007
7205206 Method of fabricating mobility enhanced CMOS devices Apr. 17, 2007
7179717 Methods of forming integrated circuit devices Feb. 20, 2007
7169697 Semiconductor device and manufacturing method of the same Jan. 30, 2007
7163871 Manufacturing method of semiconductor device and oxidization method of semiconductor substrate Jan. 16, 2007
7160789 Shallow trench isolation and method of forming the same Jan. 9, 2007
7135379 Isolation trench perimeter implant for threshold voltage control Nov. 14, 2006
7132349 Methods of forming integrated circuits structures including epitaxial silicon layers in active regions Nov. 7, 2006
7112511 CMOS image sensor having prism and method for fabricating the same Sep. 26, 2006
7112510 Methods for forming a device isolating barrier and methods for forming a gate electrode using the same Sep. 26, 2006
7098115 Semiconductor device and method of manufacturing the same Aug. 29, 2006
7091105 Method of forming isolation films in semiconductor devices Aug. 15, 2006

1 2 3 4 5 6


 
 
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