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Class Information
Number: 438/426
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Grooved and refilled with deposited dielectric material > Combined with formation of recessed oxide by localized oxidation > Recessed oxide laterally extending from groove
Description:










Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8709901 Method of forming an isolation structure Apr. 29, 2014
8673736 Method of forming SOI-like structure in a bulk semiconductor substrate by annealing a lower portion of a trench while protecting an upper portion of the trench Mar. 18, 2014
8587085 Semiconductor device with trench isolation having a diffusion preventing film and manufacturing method thereof Nov. 19, 2013
8569145 Semiconductor device and method of producing the same Oct. 29, 2013
8536017 Method of manufacturing semiconductor device Sep. 17, 2013
8530998 Substrate compositions and methods for forming semiconductor on insulator devices Sep. 10, 2013
8530292 Method for manufacturing a strained channel MOS transistor Sep. 10, 2013
8440539 Isolation trench processing for strain control May. 14, 2013
8394705 Method of manufacturing semiconductor device having optical devices Mar. 12, 2013
8349687 Transistor gate forming methods and transistor structures Jan. 8, 2013
8318581 Micro-electromechanical system devices Nov. 27, 2012
8313661 Deep trench liner removal process Nov. 20, 2012
8268703 Surface roughening process Sep. 18, 2012
8222101 Method of fabricating a MOS transistor having a gate insulation layer with a lateral portion and a vertical portion Jul. 17, 2012
8211778 Forming isolation regions for integrated circuits Jul. 3, 2012
8207573 Semiconductor devices with asymmetric recesses and gate structures that fill such recesses Jun. 26, 2012
8198170 Semiconductor device fabrication method for improved isolation regions and defect-free active semiconductor material Jun. 12, 2012
8058952 MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator Nov. 15, 2011
8048765 Method for fabricating a MOS transistor with source/well heterojunction and related structure Nov. 1, 2011
8017420 Method of forming optical waveguide Sep. 13, 2011
8017496 Methods of manufacturing a semiconductor device Sep. 13, 2011
7998772 Method to reduce leakage in a protection diode structure Aug. 16, 2011
7989310 Filling of insulation trenches using CMOS standard processes for creating dielectrically insulated areas on a SOI disk Aug. 2, 2011
7960276 Conductor-dielectric structure and method for fabricating Jun. 14, 2011
7960736 Glass-ceramic-based semiconductor-on-insulator structures and method for making the same Jun. 14, 2011
7955960 Nonvolatile memory device and method of fabricating the same Jun. 7, 2011
7951661 Semiconductor device and method of fabricating the same May. 31, 2011
7939423 Method for manufacturing nonvolatile semiconductor memory device structure May. 10, 2011
7932159 Flash memory device and method of fabricating the same Apr. 26, 2011
7892929 Shallow trench isolation corner rounding Feb. 22, 2011
7871897 Method of forming shallow trench isolation regions in devices with NMOS and PMOS regions Jan. 18, 2011
7867845 Transistor gate forming methods and transistor structures Jan. 11, 2011
7855117 Method of forming a thin layer and method of manufacturing a semiconductor device Dec. 21, 2010
7816228 Method of manufacturing a semiconductor device Oct. 19, 2010
7807498 Substrate, substrate fabrication, semiconductor device, and semiconductor device fabrication Oct. 5, 2010
7803692 Manufacturing method of semiconductor device having self-aligned contact Sep. 28, 2010
7795108 Resistance-based etch depth determination for SGT technology Sep. 14, 2010
7767515 Managing integrated circuit stress using stress adjustment trenches Aug. 3, 2010
7736991 Method of forming isolation layer of semiconductor device Jun. 15, 2010
7732298 Metal salicide formation having nitride liner to reduce silicide stringer and encroachment Jun. 8, 2010
7718505 Method of forming a semiconductor structure comprising insulating layers with different thicknesses May. 18, 2010
7709318 Method for fabricating a semiconductor device May. 4, 2010
7709927 Shallow trench isolation structures for semiconductor devices including wet etch barriers May. 4, 2010
7696061 Semiconductor device and method for manufacturing same Apr. 13, 2010
7691721 Method for manufacturing flash memory device Apr. 6, 2010
7648886 Shallow trench isolation process Jan. 19, 2010
7645671 Recessed access device for a memory Jan. 12, 2010
7625805 Passivation of deep isolating separating trenches with sunk covering layers Dec. 1, 2009
7625776 Methods of fabricating intermediate semiconductor structures by selectively etching pockets of implanted silicon Dec. 1, 2009
7622369 Device isolation technology on semiconductor substrate Nov. 24, 2009

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