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Class Information
Number: 438/421
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Having air-gap dielectric (e.g., groove, etc.)
Description: Process for making an electrically isolated laterally spaced semiconductor structure resulting in laterally spaced semiconductive regions separated at least in part by a recessed air-gap feature relative to the surrounding surface (e.g., groove, trench, notch, etc.).










Sub-classes under this class:

Class Number Class Name Patents
438/422 Enclosed cavity 276


Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8703576 Gap-fill keyhole repair using printable dielectric material Apr. 22, 2014
8692318 Trench MOS structure and method for making the same Apr. 8, 2014
8685809 Semiconductor structures having improved contact resistance Apr. 1, 2014
8686394 Semiconductor constructions and memory arrays Apr. 1, 2014
8659115 Airgap-containing interconnect structure with improved patternable low-K material and method of fabricating Feb. 25, 2014
8652931 Method of dual-depth STI formation Feb. 18, 2014
8629035 Method of manufacturing semiconductor device Jan. 14, 2014
8623742 Reduced STI loss for superior surface planarity of embedded stressors in densely packed semiconductor devices Jan. 7, 2014
8614145 Through substrate via formation processing using sacrificial material Dec. 24, 2013
8609507 Semiconductor device and method of manufacturing the same Dec. 17, 2013
8603889 Integrated circuit structure having air-gap trench isolation and related design structure Dec. 10, 2013
8603890 Air gap isolation in non-volatile memory Dec. 10, 2013
8586447 Semiconductor device and manufacturing method of the same Nov. 19, 2013
8580647 Inductors with through VIAS Nov. 12, 2013
8575000 Copper interconnects separated by air gaps and method of making thereof Nov. 5, 2013
8569839 Semiconductor device and manufacturing method thereof Oct. 29, 2013
8563421 Method of fabricating semiconductor device Oct. 22, 2013
8551839 Non-volatile storage with substrate cut-out and process of fabricating Oct. 8, 2013
8546239 Methods of fabricating non-volatile memory with air gaps Oct. 1, 2013
8546909 Nonvolatile semiconductor memory device having air gap proximate to element isolation region and method of manufacturing the same Oct. 1, 2013
8541316 Method of manufacturing semiconductor device including sequentially forming first and second mask material layers and forming a dotted photoresist pattern on the second mask material layer Sep. 24, 2013
8541284 Method of manufacturing string floating gates with air gaps in between Sep. 24, 2013
8524569 Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer Sep. 3, 2013
8518794 Semiconductor devices and methods of forming thereof Aug. 27, 2013
8519491 MEMS sensing device and method for making same Aug. 27, 2013
8497183 Devices having a cavity structure and related methods Jul. 30, 2013
8492224 Metal control gate structures and air gap isolation in non-volatile memory Jul. 23, 2013
8491799 Method for forming magnetic tunnel junction cell Jul. 23, 2013
8470631 Method for manufacturing capped MEMS components Jun. 25, 2013
8470685 Integration of self-aligned trenches in-between metal lines Jun. 25, 2013
8466033 Light emitting diode and manufacturing method thereof Jun. 18, 2013
8461015 STI structure and method of forming bottom void in same Jun. 11, 2013
8456009 Semiconductor structure having an air-gap region and a method of manufacturing the same Jun. 4, 2013
8426289 Wafer with spacer including horizontal member Apr. 23, 2013
8421166 Semiconductor device and fabrication thereof Apr. 16, 2013
8415257 Enhanced adhesion of PECVD carbon on dielectric materials by providing an adhesion interface Apr. 9, 2013
8399335 Sophisticated metallization systems in semiconductors formed by removing damaged dielectric layers after forming the metal features Mar. 19, 2013
8399349 Materials and methods of forming controlled void Mar. 19, 2013
8389376 Air gap integration scheme Mar. 5, 2013
8377793 Method for manufacturing a non-volatile memory, non-volatile memory device, and an integrated circuit Feb. 19, 2013
8357989 Semiconductor device and method for manufacturing the same Jan. 22, 2013
8338903 Photoelectric transducer and manufacturing method therefor Dec. 25, 2012
8338911 Semiconductor device and method of manufacturing the same Dec. 25, 2012
8304316 Semiconductor device and method of forming a semiconductor device Nov. 6, 2012
8298910 Method of fabricating semiconductor device Oct. 30, 2012
8298911 Methods of forming wiring structures Oct. 30, 2012
8294194 Nonvolatile semiconductor memory device and manufacturing method of the same Oct. 23, 2012
8293617 Gap processing Oct. 23, 2012
8268698 Formation of improved SOI substrates using bulk semiconductor wafers Sep. 18, 2012
8269306 Isolation regions Sep. 18, 2012

1 2 3 4 5 6 7 8










 
 
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