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Class Information
Number: 438/42
Name: Semiconductor device manufacturing: process > Making device or circuit emissive of nonelectrical signal > Groove formation
Description: Process having a step of removing material from the semiconductor substrate to form a recessed feature (e.g., trench, notch, etc.) relative to the surrounding regions of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/43 Tapered etching 247
438/44 With epitaxial deposition of semiconductor in groove 314

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
3963537 Process for the production of a semiconductor luminescence diode Jun. 15, 1976
3936855 Light-emitting diode fabrication process Feb. 3, 1976

1 2 3 4 5 6 7 8 9

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