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Class Information
Number: 438/42
Name: Semiconductor device manufacturing: process > Making device or circuit emissive of nonelectrical signal > Groove formation
Description: Process having a step of removing material from the semiconductor substrate to form a recessed feature (e.g., trench, notch, etc.) relative to the surrounding regions of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/43 Tapered etching 247
438/44 With epitaxial deposition of semiconductor in groove 314

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
6773945 Method of manufacturing a waveguide optical semiconductor device Aug. 10, 2004
6773942 Method for making optical switch array Aug. 10, 2004
6756673 Low-loss coplanar waveguides and method of fabrication Jun. 29, 2004
6750077 Semiconductor device and method of fabricating the same Jun. 15, 2004
6750071 Method of self-aligning an oxide aperture with an annular intra-cavity contact in a long wavelength VCSEL Jun. 15, 2004
6746889 Optoelectronic device with improved light extraction Jun. 8, 2004
6737288 Method for fabricating a semiconductor device May. 18, 2004
6725528 Microsolenoid coil and its manufacturing method Apr. 27, 2004
6716659 Method and apparatus for shaping semiconductor surfaces Apr. 6, 2004
6707247 Light emitting device and manufacturing method thereof Mar. 16, 2004
6707075 Method for fabricating avalanche trench photodetectors Mar. 16, 2004
6696308 Electrically pumped long-wavelength VCSEL with air gap DBR and methods of fabrication Feb. 24, 2004
6677175 Optical waveguides and methods for making the same Jan. 13, 2004
6670211 Semiconductor laser device Dec. 30, 2003
6667184 Single crystal GaN substrate, method of growing same and method of producing same Dec. 23, 2003
6653176 Method for manufacturing x-ray detector Nov. 25, 2003
6653166 Semiconductor device and method of making same Nov. 25, 2003
6630366 Manufacturing method for light emitting device Oct. 7, 2003
6589805 Current confinement structure for vertical cavity surface emitting laser Jul. 8, 2003
6566231 Method of manufacturing high performance semiconductor device with reduced lattice defects in the active region May. 20, 2003
6558974 Electrical detection of V-groove width May. 6, 2003
6555406 Fabrication of photonic band gap materials using microtransfer molded templates Apr. 29, 2003
6551849 Method for fabricating arrays of micro-needles Apr. 22, 2003
6541297 Method for fabricating semiconductor device and semiconductor device Apr. 1, 2003
6537839 Nitride semiconductor light emitting device and manufacturing method thereof Mar. 25, 2003
6534838 Semiconductor device and method of fabricating the same Mar. 18, 2003
6503770 Self-aligned fabrication method for ridge-waveguide semiconductor laser Jan. 7, 2003
6492193 Group III nitride photonic devices on silicon carbide substrates with conductive buffer interlayer structure Dec. 10, 2002
6489177 Modulator-integrated semiconductor laser and method of fabricating the same Dec. 3, 2002
6482666 Semiconductor device, its manufacturing method and substrate for manufacturing a semiconductor device Nov. 19, 2002
6468820 Process for fabricating semiconductor laser emitting apparatus Oct. 22, 2002
6413474 Measuring device Jul. 2, 2002
6348360 Method for producing semiconductor laser module Feb. 19, 2002
6342403 Electrical detection of V-groove width Jan. 29, 2002
6340605 Waveguide type optical integrated circuit element and method for fabricating same Jan. 22, 2002
6337223 Semiconductor optical device and method for fabricating the same Jan. 8, 2002
6335215 Self-alignment method of making Jan. 1, 2002
6335546 Nitride semiconductor structure, method for producing a nitride semiconductor structure, and light emitting device Jan. 1, 2002
6300153 Metal organic vapor phase epitaxy and method for manufacturing semiconductor laser device Oct. 9, 2001
6284559 Gallium nitride group compound semiconductor light-emitting device and method for fabricating the same Sep. 4, 2001
6281032 Manufacturing method for nitride III-V compound semiconductor device using bonding Aug. 28, 2001
6261859 Method for fabricating surface-emitting semiconductor device, surface-emitting semiconductor device fabricated by the method, and display device using the device Jul. 17, 2001
6255188 Method of removing a polysilicon buffer using an etching selectivity solution Jul. 3, 2001
6238943 Optical semiconductor device and a method of manufacturing the same May. 29, 2001
6235547 Semiconductor device and method of fabricating the same May. 22, 2001
6210986 Microfluidic channel fabrication method Apr. 3, 2001
6210987 Vertical cavity-emitting porous silicon carbide light-emitting diode device and preparation thereof Apr. 3, 2001
6177291 Method of making aggregate of semiconductor micro-needles Jan. 23, 2001
6172297 Solar cell and method for fabrication of a solar cell Jan. 9, 2001
6168964 Method of fabricating a semiconductor light emitting device with etched end surface Jan. 2, 2001

1 2 3 4 5 6 7 8 9

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