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Class Information
Number: 438/42
Name: Semiconductor device manufacturing: process > Making device or circuit emissive of nonelectrical signal > Groove formation
Description: Process having a step of removing material from the semiconductor substrate to form a recessed feature (e.g., trench, notch, etc.) relative to the surrounding regions of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/43 Tapered etching 247
438/44 With epitaxial deposition of semiconductor in groove 314

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
7291510 Method for manufacturing semiconductor device Nov. 6, 2007
7223620 Process for the production of light-emitting diode light sources with a luminescence conversion element May. 29, 2007
7208337 Method of forming light emitting devices including forming mesas and singulating Apr. 24, 2007
7195943 Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof Mar. 27, 2007
7179667 Semiconductor base material and method of manufacturing the material Feb. 20, 2007
7172914 Method of making uniform oxide layer Feb. 6, 2007
7167607 Symmetric optical modulator with low driving voltage Jan. 23, 2007
7163876 Method for manufacturing group-III nitride compound semiconductor, and group-III nitride compound semiconductor device Jan. 16, 2007
7132306 Method of forming an interlevel dielectric layer employing dielectric etch-back process without extra mask set Nov. 7, 2006
7125736 Method of crystallizing a nitride III-V compound semiconductor layer on a sapphire substrate Oct. 24, 2006
7115435 Manufacturing method for wiring substrates Oct. 3, 2006
7112460 Semiconductor laser device, production method therefor, and jig for use in the production method Sep. 26, 2006
7112512 Method of manufacturing liquid crystal display Sep. 26, 2006
7105448 Method for peeling off semiconductor element and method for manufacturing semiconductor device Sep. 12, 2006
7091107 Method for producing SOI wafer and SOI wafer Aug. 15, 2006
7087925 Semiconductor device having reduced capacitance to substrate and method Aug. 8, 2006
7083994 Method of manufacturing a semiconductor device with outline of cleave marking regions and alignment or registration features Aug. 1, 2006
7083996 Nitride semiconductor device and manufacturing method thereof Aug. 1, 2006
7078257 Surface emitting semiconductor laser, and method and apparatus for fabricating the same Jul. 18, 2006
7074631 Light emitting device methods Jul. 11, 2006
7063995 Nitride semiconductor light emitting device and manufacturing method thereof Jun. 20, 2006
7053420 GaN group semiconductor light-emitting element with concave and convex structures on the substrate and a production method thereof May. 30, 2006
7041523 Method of fabricating nitride semiconductor device May. 9, 2006
7035507 Manufacturing method for optical element Apr. 25, 2006
7029937 Semiconductor device and method of manufacturing the same, circuit board, and electronic instrument Apr. 18, 2006
6995030 Semiconductor chip for optoelectronics Feb. 7, 2006
6949395 Method of making diode having reflective layer Sep. 27, 2005
6936486 Low voltage multi-junction vertical cavity surface emitting laser Aug. 30, 2005
6924087 Polymer microneedles Aug. 2, 2005
6909122 Semiconductor light-emitting device with isolation trenches, and method of fabricating same Jun. 21, 2005
6907150 Etching process for micromachining crystalline materials and devices fabricated thereby Jun. 14, 2005
6906348 Illumination device and liquid crystal display device Jun. 14, 2005
6900068 Light emitting diode and method of making the same May. 31, 2005
6893888 Production method of semiconductor laser apparatus May. 17, 2005
6885034 Light emitting diode having multiple pits Apr. 26, 2005
6884648 Method for fabricating semiconductor light emitting device Apr. 26, 2005
6879306 Scanned display systems using color laser light sources Apr. 12, 2005
6878565 Process for improving yield of DFB lasers Apr. 12, 2005
6869813 Chip-type LED and process of manufacturing the same Mar. 22, 2005
6861274 Method of making a SDI electroosmotic pump using nanoporous dielectric frit Mar. 1, 2005
6849473 Semiconductor light-emitting device and method for manufacturing thereof Feb. 1, 2005
6844213 Process of forming a microneedle and microneedle formed thereby Jan. 18, 2005
6829814 Process of making an all-silicon microphone Dec. 14, 2004
6828596 Contacting scheme for large and small area semiconductor light emitting flip chip devices Dec. 7, 2004
6821804 Enhanced light extraction in LEDs through the use of internal and external optical elements Nov. 23, 2004
6815241 GaN structures having low dislocation density and methods of manufacture Nov. 9, 2004
6813294 Optical semiconductor device provided with high-NA lens Nov. 2, 2004
6806112 High brightness light emitting diode Oct. 19, 2004
6790696 Providing an organic vertical cavity laser array device with etched region in dielectric stack Sep. 14, 2004
6781160 Semiconductor light emitting device and method for manufacturing the same Aug. 24, 2004

1 2 3 4 5 6 7 8 9

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