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Class Information
Number: 438/42
Name: Semiconductor device manufacturing: process > Making device or circuit emissive of nonelectrical signal > Groove formation
Description: Process having a step of removing material from the semiconductor substrate to form a recessed feature (e.g., trench, notch, etc.) relative to the surrounding regions of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/43 Tapered etching 247
438/44 With epitaxial deposition of semiconductor in groove 314

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
7663150 Optoelectronic chip Feb. 16, 2010
7655490 Manufacturing method for semiconductor device, semiconductor device and semiconductor wafer Feb. 2, 2010
7655960 A1.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate, method of growing same and method of producing same Feb. 2, 2010
7653114 Semiconductor laser diode and the manufacturing method thereof Jan. 26, 2010
7653281 Embedded channels, embedded waveguides and methods of manufacturing and using the same Jan. 26, 2010
7635608 Method of fabricating organic electronic device Dec. 22, 2009
7618836 Method for manufacturing semiconductor optical device Nov. 17, 2009
7615391 Solar cell and method of fabricating the same Nov. 10, 2009
7611992 Semiconductor light emitting element and method of manufacturing the same Nov. 3, 2009
7611917 Methods of forming light emitting devices with active layers that extend into opened pits Nov. 3, 2009
7610670 Method for manufacturing a diaphragm assembly Nov. 3, 2009
7602830 Monolithic semiconductor laser and method of manufacturing the same Oct. 13, 2009
7598114 Sacrificial benzocyclobutene/norbornene polymers for making air gap semiconductor devices Oct. 6, 2009
7588951 Method of packaging a semiconductor device and a prefabricated connector Sep. 15, 2009
7588952 Method of fabricating vertical structure LEDs Sep. 15, 2009
7586118 Micro device and manufacturing method thereof Sep. 8, 2009
7579627 Nitride semiconductor light-emitting device, method of fabricating it, and semiconductor optical apparatus Aug. 25, 2009
7569461 Method of fabricating nitride-based compound layer, GaN substrate and vertical structure nitride-based semiconductor light emitting device Aug. 4, 2009
7563629 Method of fabricating vertical structure LEDs Jul. 21, 2009
7560294 Light emitting element and method of making same Jul. 14, 2009
7531465 Method of manufacturing nitride-based semiconductor light emitting device May. 12, 2009
7524235 Method of eliminating surface stress of silicon wafer Apr. 28, 2009
7510891 Organic light emitting display device and method of manufacturing the same Mar. 31, 2009
7494936 Method for electrochemical etching of semiconductor material using positive potential dissolution (PPD) in solutions free from hydrogen fluoride (HF) Feb. 24, 2009
7491563 Nitridation of STI fill oxide to prevent the loss of STI fill oxide during manufacturing process Feb. 17, 2009
7491560 Fabricating method of flat panel display device Feb. 17, 2009
7485484 Group III-V crystal Feb. 3, 2009
7482181 Method for fabricating a light-emitting device based on a gallium nitride-based compound semiconductor, and light-emitting device based on a gallium nitride-based compound semiconductor Jan. 27, 2009
7477334 Method of manufacturing electro-optical device Jan. 13, 2009
7469461 Method for making a diaphragm unit of a condenser microphone Dec. 30, 2008
7465977 Method for producing a packaged integrated circuit Dec. 16, 2008
7462567 Method for manufacturing integrated circuit Dec. 9, 2008
7462563 Method of forming an etch indicator layer for reducing etch non-uniformities Dec. 9, 2008
7455563 Thin film electroluminescence display device and method of manufacturing the same Nov. 25, 2008
7449354 Trench-gated FET for power device with active gate trenches and gate runner trench utilizing one-mask etch Nov. 11, 2008
7445949 Method of manufacturing semiconductor laser device structure Nov. 4, 2008
7439091 Light-emitting diode and method for manufacturing the same Oct. 21, 2008
7432120 Method for realizing a hosting structure of nanometric elements Oct. 7, 2008
7432605 Overlay mark, method for forming the same and application thereof Oct. 7, 2008
7422918 Method of making a support for light emitting diodes which are interconnected in a three-dimensional environment Sep. 9, 2008
7402529 Method of applying cladding material on conductive lines of MRAM devices Jul. 22, 2008
7402501 Method of manufacturing a coaxial trace in a surrounding material, coaxial trace formed thereby, and semiconducting material containing same Jul. 22, 2008
7399652 Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained Jul. 15, 2008
7396697 Semiconductor light-emitting device and method for manufacturing the same Jul. 8, 2008
7374959 Two-wavelength semiconductor laser device and method of manufacturing the same May. 20, 2008
7348213 Method for forming component mounting hole in semiconductor substrate Mar. 25, 2008
7338827 Nitride semiconductor laser and method for fabricating the same Mar. 4, 2008
7332416 Methods to manufacture contaminant-gettering materials in the surface of EUV optics Feb. 19, 2008
7300810 Solid-state imaging device and method of manufacturing the same Nov. 27, 2007
7294552 Electrical contact for a MEMS device and method of making Nov. 13, 2007

1 2 3 4 5 6 7 8 9

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