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Class Information
Number: 438/42
Name: Semiconductor device manufacturing: process > Making device or circuit emissive of nonelectrical signal > Groove formation
Description: Process having a step of removing material from the semiconductor substrate to form a recessed feature (e.g., trench, notch, etc.) relative to the surrounding regions of the substrate.










Sub-classes under this class:

Class Number Class Name Patents
438/43 Tapered etching 247
438/44 With epitaxial deposition of semiconductor in groove 314


Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
7903710 Nitride semiconductor light-emitting device Mar. 8, 2011
7903708 Nitride semiconductor light-emitting device and method for fabrication thereof Mar. 8, 2011
7892874 Nitride-based light-emitting device and method of manufacturing the same Feb. 22, 2011
7883913 Manufacturing method of image sensor of vertical type Feb. 8, 2011
7879637 CMOS solid-state imaging device and method of manufacturing the same as well as drive method of CMOS solid-state imaging device Feb. 1, 2011
7871841 Method for manufacturing semiconductor light-emitting device Jan. 18, 2011
7867846 Organic light emitting display (OLED) having a gas vent groove to decrease edge open failures Jan. 11, 2011
7858407 Microresonator Dec. 28, 2010
7858414 Nitride semiconductor device and manufacturing method thereof Dec. 28, 2010
7849587 Method of manufacturing a solenoidal magnet Dec. 14, 2010
7846755 Light emitting diode having plurality of light emitting cells and method of fabricating the same Dec. 7, 2010
7846756 Nanoimprint enhanced resist spacer patterning method Dec. 7, 2010
7842963 Electrical contacts for a semiconductor light emitting apparatus Nov. 30, 2010
7838372 Methods of manufacturing semiconductor devices and structures thereof Nov. 23, 2010
7838316 Method for manufacturing a nitride semiconductor laser element and a nitride semiconductor laser element Nov. 23, 2010
7835602 Photonic guiding device Nov. 16, 2010
7825031 Method of fabricating a semiconductor device Nov. 2, 2010
7811846 Semiconductor devices grown in spherical cavity arrays and its preparation method Oct. 12, 2010
7803645 Semiconductor light-emitting device and a method for manufacturing the same Sep. 28, 2010
7800201 Thinned wafer having stress dispersion parts and method for manufacturing semiconductor package using the same Sep. 21, 2010
7798970 Ultrasonic monitor for measuring blood flow and pulse rates Sep. 21, 2010
7791061 External extraction light emitting diode based upon crystallographic faceted surfaces Sep. 7, 2010
7785908 Method of making diode having reflective layer Aug. 31, 2010
7781275 Method of manufacturing a flash memory device Aug. 24, 2010
7781796 Nitride semiconductor laser element Aug. 24, 2010
7777241 Optical devices featuring textured semiconductor layers Aug. 17, 2010
7772585 Nitride semiconductor substrate and method of producing same Aug. 10, 2010
7772020 Method of fabricating vertical devices using a metal support film Aug. 10, 2010
7771532 Nitride semiconductor substrate and method of producing same Aug. 10, 2010
7763485 Laser facet pre-coating etch for controlling leakage current Jul. 27, 2010
7763898 Light emitting device having high optical output efficiency Jul. 27, 2010
7759142 Quantum well MOSFET channels having uni-axial strain caused by metal source/drains, and conformal regrowth source/drains Jul. 20, 2010
7754511 Laser lift-off method Jul. 13, 2010
7745246 Method of fabricating light emitting device Jun. 29, 2010
7741134 Inverted LED structure with improved light extraction Jun. 22, 2010
7736923 Optical semiconductor device and method for fabricating the same Jun. 15, 2010
7732817 Pattern formed structure, method of forming pattern, device, electrooptical device and electronic equipment Jun. 8, 2010
7723137 Optical device, method of manufacturing the same, optical module, optical transmission system May. 25, 2010
7723732 Semiconductor light-emitting device and manufacturing method thereof May. 25, 2010
7713769 Method for fabricating light emitting diode structure having irregular serrations May. 11, 2010
7709281 Semiconductor laser device and method of manufacturing the same May. 4, 2010
7700393 Method of manufacturing enhancement type semiconductor probe and information storage device having the semiconductor probe using the same Apr. 20, 2010
7700391 Method of fabricating optical device using multiple sacrificial spacer layers Apr. 20, 2010
7692200 Nitride semiconductor light-emitting device Apr. 6, 2010
7682855 Fabrication method of substrate-free light emitting diode Mar. 23, 2010
7684661 Optical module and method of producing optical module Mar. 23, 2010
7669320 Coreless cavity substrates for chip packaging and their fabrication Mar. 2, 2010
7670950 Copper metallization of through silicon via Mar. 2, 2010
7667319 Electroosmotic pump using nanoporous dielectric frit Feb. 23, 2010
7662672 Manufacturing process of leadframe-based BGA packages Feb. 16, 2010

1 2 3 4 5 6 7 8 9










 
 
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