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Class Information
Number: 438/42
Name: Semiconductor device manufacturing: process > Making device or circuit emissive of nonelectrical signal > Groove formation
Description: Process having a step of removing material from the semiconductor substrate to form a recessed feature (e.g., trench, notch, etc.) relative to the surrounding regions of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/43 Tapered etching 247
438/44 With epitaxial deposition of semiconductor in groove 314

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
8101447 Light emitting diode element and method for fabricating the same Jan. 24, 2012
8093085 Method of forming suspension object on monolithic substrate Jan. 10, 2012
8093081 Device of light-emitting diode and method for fabricating the same Jan. 10, 2012
8093077 Method for manufacturing a layer of gallium nitride or gallium and aluminum nitride Jan. 10, 2012
8089091 Semiconductor light emitting device with a contact formed on a textured surface Jan. 3, 2012
8090229 Method and device for providing electronic circuitry on a backplate Jan. 3, 2012
8076167 Group-III nitride semiconductor laser device, and method for fabricating group-III nitride semiconductor laser device Dec. 13, 2011
8076675 Light-emitting diode chip and method of manufacturing the same Dec. 13, 2011
8071442 Transistor with embedded Si/Ge material having reduced offset to the channel region Dec. 6, 2011
8071405 Group-III nitride semiconductor laser device, and method for fabricating group-III nitride semiconductor laser device Dec. 6, 2011
8067300 Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate, method of growing same and method of producing same Nov. 29, 2011
8058082 Light-emitting diode with textured substrate Nov. 15, 2011
8053262 Method for manufacturing nitride semiconductor laser element Nov. 8, 2011
8049233 Light-emitting device Nov. 1, 2011
8038890 Piezoelectric-driven MEMS device and method for manufacturing the same Oct. 18, 2011
8039864 Semiconductor light emitting device and fabrication method for the same Oct. 18, 2011
8030110 Nitride semiconductor light-emitting device and method for fabrication thereof Oct. 4, 2011
8030108 Epitaxial growth of in-plane nanowires and nanowire devices Oct. 4, 2011
8030104 Method for manufacturing liquid crystal display device Oct. 4, 2011
8026156 Method of fabricating nitride-based compound layer, GaN substrate and vertical structure nitride-based semiconductor light emitting device Sep. 27, 2011
8021943 Simultaneously formed isolation trench and through-box contact for silicon-on-insulator technology Sep. 20, 2011
8017962 Light-emitting diode apparatus and manufacturing method thereof Sep. 13, 2011
8017497 Method for manufacturing semiconductor Sep. 13, 2011
8017423 Method for manufacturing a thin film structure Sep. 13, 2011
8017420 Method of forming optical waveguide Sep. 13, 2011
8008103 Light emitting device having light extraction structure and method for manufacturing the same Aug. 30, 2011
8003418 Method for producing group III nitride-based compound semiconductor device Aug. 23, 2011
7998771 Manufacturing method of light emitting diode including current spreading layer Aug. 16, 2011
7998772 Method to reduce leakage in a protection diode structure Aug. 16, 2011
7989826 Semiconductor light emitting device Aug. 2, 2011
7989243 Method for fabricating pixel structure Aug. 2, 2011
7989238 Group III nitride-based compound semiconductor light-emitting device and production method therefor Aug. 2, 2011
7981705 Method of manufacturing a vertical type light-emitting diode Jul. 19, 2011
7977132 Extension of contact pads to the die edge via electrical isolation Jul. 12, 2011
7968356 Light-emitting element with improved light extraction efficiency, light-emitting device including the same, and methods of fabricating light-emitting element and light-emitting device Jun. 28, 2011
7968361 GaN based semiconductor light emitting device and lamp Jun. 28, 2011
7964426 Solid-state image pickup device and manufacturing method thereof Jun. 21, 2011
7960198 Method of making a semiconductor device with surge current protection Jun. 14, 2011
7955951 LED-laser lift-off method Jun. 7, 2011
7943965 Multi-bit phase-change memory device May. 17, 2011
7935554 Semiconductor light emitting device and method of manufacturing the same May. 3, 2011
7932160 Planar oxidation method for producing a localised buried insulator Apr. 26, 2011
7928458 Light-emitting diode device and method for fabricating the same Apr. 19, 2011
7923379 Multi-step process for forming high-aspect-ratio holes for MEMS devices Apr. 12, 2011
7919342 Patterned inorganic LED device Apr. 5, 2011
7919343 Group III nitride crystal and method for surface treatment thereof, group III nitride stack and manufacturing method thereof, and group III nitride semiconductor device and manufacturing metho Apr. 5, 2011
7919797 Angled implant for trench isolation Apr. 5, 2011
7910941 Light-emitting diode apparatus and manufacturing method thereof Mar. 22, 2011
7902071 Method for forming active and gate runner trenches Mar. 8, 2011
7903707 Nitride semiconductor light-emitting device Mar. 8, 2011

1 2 3 4 5 6 7 8 9

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