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Class Information
Number: 438/42
Name: Semiconductor device manufacturing: process > Making device or circuit emissive of nonelectrical signal > Groove formation
Description: Process having a step of removing material from the semiconductor substrate to form a recessed feature (e.g., trench, notch, etc.) relative to the surrounding regions of the substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618836 |
Method for manufacturing semiconductor optical device |
Nov. 17, 2009 |
| 7615391 |
Solar cell and method of fabricating the same |
Nov. 10, 2009 |
| 7610670 |
Method for manufacturing a diaphragm assembly |
Nov. 3, 2009 |
| 7611917 |
Methods of forming light emitting devices with active layers that extend into opened pits |
Nov. 3, 2009 |
| 7611992 |
Semiconductor light emitting element and method of manufacturing the same |
Nov. 3, 2009 |
| 7602830 |
Monolithic semiconductor laser and method of manufacturing the same |
Oct. 13, 2009 |
| 7598114 |
Sacrificial benzocyclobutene/norbornene polymers for making air gap semiconductor devices |
Oct. 6, 2009 |
| 7588951 |
Method of packaging a semiconductor device and a prefabricated connector |
Sep. 15, 2009 |
| 7588952 |
Method of fabricating vertical structure LEDs |
Sep. 15, 2009 |
| 7586118 |
Micro device and manufacturing method thereof |
Sep. 8, 2009 |
| 7579627 |
Nitride semiconductor light-emitting device, method of fabricating it, and semiconductor optical apparatus |
Aug. 25, 2009 |
| 7569461 |
Method of fabricating nitride-based compound layer, GaN substrate and vertical structure nitride-based semiconductor light emitting device |
Aug. 4, 2009 |
| 7563629 |
Method of fabricating vertical structure LEDs |
Jul. 21, 2009 |
| 7560294 |
Light emitting element and method of making same |
Jul. 14, 2009 |
| 7531465 |
Method of manufacturing nitride-based semiconductor light emitting device |
May. 12, 2009 |
| 7524235 |
Method of eliminating surface stress of silicon wafer |
Apr. 28, 2009 |
| 7510891 |
Organic light emitting display device and method of manufacturing the same |
Mar. 31, 2009 |
| 7494936 |
Method for electrochemical etching of semiconductor material using positive potential dissolution (PPD) in solutions free from hydrogen fluoride (HF) |
Feb. 24, 2009 |
| 7491560 |
Fabricating method of flat panel display device |
Feb. 17, 2009 |
| 7491563 |
Nitridation of STI fill oxide to prevent the loss of STI fill oxide during manufacturing process |
Feb. 17, 2009 |
| 7485484 |
Group III-V crystal |
Feb. 3, 2009 |
| 7482181 |
Method for fabricating a light-emitting device based on a gallium nitride-based compound semiconductor, and light-emitting device based on a gallium nitride-based compound semiconductor |
Jan. 27, 2009 |
| 7477334 |
Method of manufacturing electro-optical device |
Jan. 13, 2009 |
| 7469461 |
Method for making a diaphragm unit of a condenser microphone |
Dec. 30, 2008 |
| 7465977 |
Method for producing a packaged integrated circuit |
Dec. 16, 2008 |
| 7462563 |
Method of forming an etch indicator layer for reducing etch non-uniformities |
Dec. 9, 2008 |
| 7462567 |
Method for manufacturing integrated circuit |
Dec. 9, 2008 |
| 7455563 |
Thin film electroluminescence display device and method of manufacturing the same |
Nov. 25, 2008 |
| 7449354 |
Trench-gated FET for power device with active gate trenches and gate runner trench utilizing one-mask etch |
Nov. 11, 2008 |
| 7445949 |
Method of manufacturing semiconductor laser device structure |
Nov. 4, 2008 |
| 7439091 |
Light-emitting diode and method for manufacturing the same |
Oct. 21, 2008 |
| 7432120 |
Method for realizing a hosting structure of nanometric elements |
Oct. 7, 2008 |
| 7432605 |
Overlay mark, method for forming the same and application thereof |
Oct. 7, 2008 |
| 7422918 |
Method of making a support for light emitting diodes which are interconnected in a three-dimensional environment |
Sep. 9, 2008 |
| 7402501 |
Method of manufacturing a coaxial trace in a surrounding material, coaxial trace formed thereby, and semiconducting material containing same |
Jul. 22, 2008 |
| 7402529 |
Method of applying cladding material on conductive lines of MRAM devices |
Jul. 22, 2008 |
| 7399652 |
Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained |
Jul. 15, 2008 |
| 7396697 |
Semiconductor light-emitting device and method for manufacturing the same |
Jul. 8, 2008 |
| 7374959 |
Two-wavelength semiconductor laser device and method of manufacturing the same |
May. 20, 2008 |
| 7348213 |
Method for forming component mounting hole in semiconductor substrate |
Mar. 25, 2008 |
| 7338827 |
Nitride semiconductor laser and method for fabricating the same |
Mar. 4, 2008 |
| 7332416 |
Methods to manufacture contaminant-gettering materials in the surface of EUV optics |
Feb. 19, 2008 |
| 7300810 |
Solid-state imaging device and method of manufacturing the same |
Nov. 27, 2007 |
| 7294552 |
Electrical contact for a MEMS device and method of making |
Nov. 13, 2007 |
| 7291510 |
Method for manufacturing semiconductor device |
Nov. 6, 2007 |
| 7223620 |
Process for the production of light-emitting diode light sources with a luminescence conversion element |
May. 29, 2007 |
| 7208337 |
Method of forming light emitting devices including forming mesas and singulating |
Apr. 24, 2007 |
| 7195943 |
Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof |
Mar. 27, 2007 |
| 7179667 |
Semiconductor base material and method of manufacturing the material |
Feb. 20, 2007 |
| 7172914 |
Method of making uniform oxide layer |
Feb. 6, 2007 |
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