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Class Information
Number: 438/407
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Total dielectric isolation > Nondopant implantation
Description: Process for making a total dielectric isolation semiconductor structure including a step of ion implantation of a nonelectrically active impurity into a semiconductive region of the substrate.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8703596 Semiconductor device and method of manufacturing semiconductor device Apr. 22, 2014
8664078 Manufacturing method of semiconductor device on cavities Mar. 4, 2014
8658513 Isolation by implantation in LED array manufacturing Feb. 25, 2014
8629047 Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures Jan. 14, 2014
8587039 Method of forming a semiconductor device featuring a gate stressor and semiconductor device Nov. 19, 2013
8563399 Detachable substrate and processes for fabricating and detaching such a substrate Oct. 22, 2013
8546238 Method for transferring at least one micro-technological layer Oct. 1, 2013
8502284 Semiconductor device and method of manufacturing semiconductor device Aug. 6, 2013
8471307 In-situ carbon doped e-SiGeCB stack for MOS transistor Jun. 25, 2013
8409975 Method for decreasing polysilicon gate resistance in a carbon co-implantation process Apr. 2, 2013
8404570 Graded core/shell semiconductor nanorods and nanorod barcodes Mar. 26, 2013
8368170 Reducing device performance drift caused by large spacings between active regions Feb. 5, 2013
8354720 Embedded stressor for semiconductor structures Jan. 15, 2013
8338258 Embedded stressor for semiconductor structures Dec. 25, 2012
8216951 Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures Jul. 10, 2012
8193068 Method of manufacturing SOI substrate Jun. 5, 2012
RE43450 Method for fabricating semiconductor thin film Jun. 5, 2012
8153450 Method for manufacturing SIMOX wafer Apr. 10, 2012
8114754 Methods of fabricating semiconductor structures and devices using glass bonding layers, and semiconductor structures and devices formed by such methods Feb. 14, 2012
8115271 Reducing device performance drift caused by large spacings between active regions Feb. 14, 2012
8093494 Methods of making functionalized nanorods Jan. 10, 2012
8053327 Method of manufacture of an integrated circuit system with self-aligned isolation structures Nov. 8, 2011
8043929 Semiconductor substrate and method for production thereof Oct. 25, 2011
8030183 Method for reducing crystal defect of SIMOX wafer and SIMOX wafer Oct. 4, 2011
8017492 Method for fabricating semiconductor device and semiconductor device with separation along peeling layer Sep. 13, 2011
7998828 Method of forming metal ion transistor Aug. 16, 2011
7977202 Reducing device performance drift caused by large spacings between active regions Jul. 12, 2011
7972947 Method for fabricating a semiconductor element, and semiconductor element Jul. 5, 2011
7960243 Method of forming a semiconductor device featuring a gate stressor and semiconductor device Jun. 14, 2011
7943468 Penetrating implant for forming a semiconductor device May. 17, 2011
7927975 Semiconductor material manufacture Apr. 19, 2011
7915137 Method of forming isolation structure for semiconductor integrated circuit substrate Mar. 29, 2011
7897476 Method of manufacturing SOI substrate Mar. 1, 2011
7892939 Threshold voltage consistency and effective width in same-substrate device groups Feb. 22, 2011
7883956 Method of forming coplanar active and isolation regions and structures thereof Feb. 8, 2011
7884000 Method for manufacturing simox wafer Feb. 8, 2011
7838387 Method for manufacturing SOI wafer Nov. 23, 2010
7825016 Method of producing a semiconductor element Nov. 2, 2010
7820524 Manufacturing method of SOI substrate and manufacturing method of semiconductor device Oct. 26, 2010
7807545 Method for manufacturing SIMOX wafer Oct. 5, 2010
7790565 Semiconductor on glass insulator made using improved thinning process Sep. 7, 2010
7772646 Method of manufacturing a semiconductor device and such a semiconductor device Aug. 10, 2010
7767583 Method to improve uniformity of chemical mechanical polishing planarization Aug. 3, 2010
7767538 Method for manufacturing semiconductor device Aug. 3, 2010
7741190 Method of selective oxygen implantation to dielectrically isolate semiconductor devices using no extra masks Jun. 22, 2010
7727831 Semiconductor device Jun. 1, 2010
7705427 Integrated circuit comprising a gradually doped bipolar transistor Apr. 27, 2010
7696059 Method for manufacturing semiconductor substrate Apr. 13, 2010
7682926 Semiconductor device and method of fabricating the same Mar. 23, 2010
7666721 SOI substrates and SOI devices, and methods for forming the same Feb. 23, 2010

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