| |
 |
|
Class Information
Number: 438/404
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Total dielectric isolation
Description: Process for making laterally spaced electrically isolated semiconductor regions wherein the semiconductive regions are fully electrically isolated by dielectric insulative material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7452781 |
Method for manufacturing a semiconductor substrate, method for manufacturing a semiconductor device, and the semiconductor device |
Nov. 18, 2008 |
| 7439153 |
Semiconductor device and manufacturing method thereof for reducing the area of the memory cell region |
Oct. 21, 2008 |
| 7432149 |
CMOS on SOI substrates with hybrid crystal orientations |
Oct. 7, 2008 |
| 7425495 |
Method of manufacturing semiconductor substrate and semiconductor device |
Sep. 16, 2008 |
| 7420202 |
Electronic device including a transistor structure having an active region adjacent to a stressor layer and a process for forming the electronic device |
Sep. 2, 2008 |
| 7410858 |
Isolation structure configurations for modifying stresses in semiconductor devices |
Aug. 12, 2008 |
| 7390696 |
Wafer, semiconductor device, and fabrication methods therefor |
Jun. 24, 2008 |
| 7384857 |
Method to fabricate completely isolated silicon regions |
Jun. 10, 2008 |
| 7382031 |
Component including a fixed element that is in a silicon layer and is mechanically connected to a substrate via an anchoring element and method for its manufacture |
Jun. 3, 2008 |
| 7368790 |
Strained Si/SiGe/SOI islands and processes of making same |
May. 6, 2008 |
| 7358586 |
Silicon-on-insulator wafer having reentrant shape dielectric trenches |
Apr. 15, 2008 |
| 7354812 |
Multiple-depth STI trenches in integrated circuit fabrication |
Apr. 8, 2008 |
| 7351616 |
Semiconductor substrate, semiconductor device, method for manufacturing semiconductor substrate and method for manufacturing semiconductor device |
Apr. 1, 2008 |
| 7348254 |
Method of fabricating fin field-effect transistors |
Mar. 25, 2008 |
| 7348255 |
Semiconductor device and method for fabricating a semiconductor device |
Mar. 25, 2008 |
| 7323394 |
Method of producing element separation structure |
Jan. 29, 2008 |
| 7316979 |
Method and apparatus for providing an integrated active region on silicon-on-insulator devices |
Jan. 8, 2008 |
| 7297608 |
Method for controlling properties of conformal silica nanolaminates formed by rapid vapor deposition |
Nov. 20, 2007 |
| 7294573 |
Method for controlling poly 1 thickness and uniformity in a memory array fabrication process |
Nov. 13, 2007 |
| 7288462 |
Buffer zone for the prevention of metal migration |
Oct. 30, 2007 |
| 7279769 |
Semiconductor device and manufacturing method thereof |
Oct. 9, 2007 |
| 7273904 |
Nanocrystals in ligand boxes exhibiting enhanced chemical, photochemical, and thermal stability, and methods of making the same |
Sep. 25, 2007 |
| 7227228 |
Silicon on insulator device and method of manufacturing the same |
Jun. 5, 2007 |
| 7220654 |
Method for manufacturing semiconductor substrate |
May. 22, 2007 |
| 7217634 |
Methods of forming integrated circuitry |
May. 15, 2007 |
| 7208354 |
Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates |
Apr. 24, 2007 |
| 7205248 |
Method of eliminating residual carbon from flowable oxide fill |
Apr. 17, 2007 |
| 7205205 |
Ramp temperature techniques for improved mean wafer before clean |
Apr. 17, 2007 |
| 7199017 |
Methods of forming semiconductor circuitry |
Apr. 3, 2007 |
| 7176101 |
Method of forming isolation oxide layer in semiconductor integrated circuit device |
Feb. 13, 2007 |
| 7153753 |
Strained Si/SiGe/SOI islands and processes of making same |
Dec. 26, 2006 |
| 7112850 |
Non-volatile memory device with a polarizable layer |
Sep. 26, 2006 |
| 7109091 |
Method for processing a substrate to form a structure |
Sep. 19, 2006 |
| 7091107 |
Method for producing SOI wafer and SOI wafer |
Aug. 15, 2006 |
| 7071530 |
Multiple layer structure for substrate noise isolation |
Jul. 4, 2006 |
| 7067846 |
Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system |
Jun. 27, 2006 |
| 7053451 |
Semiconductor device having impurity region under isolation region |
May. 30, 2006 |
| 7029980 |
Method of manufacturing SOI template layer |
Apr. 18, 2006 |
| 7029995 |
Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy |
Apr. 18, 2006 |
| 7018904 |
Semiconductor chip having multiple functional blocks integrated in a single chip and method for fabricating the same |
Mar. 28, 2006 |
| 6998324 |
Methods of fabricating silicon on insulator substrates for use in semiconductor devices |
Feb. 14, 2006 |
| 6989315 |
SIMOX using controlled water vapor for oxygen implants |
Jan. 24, 2006 |
| 6984570 |
Wafer bonding method of forming silicon-on-insulator comprising integrated circuitry |
Jan. 10, 2006 |
| 6982460 |
Self-aligned gate MOSFET with separate gates |
Jan. 3, 2006 |
| 6977204 |
Method for forming contact plug having double doping distribution in semiconductor device |
Dec. 20, 2005 |
| 6974757 |
Method of forming silicon-on-insulator comprising integrated circuitry |
Dec. 13, 2005 |
| 6964911 |
Method for forming a semiconductor device having isolation regions |
Nov. 15, 2005 |
| 6958280 |
Method for manufacturing alignment mark of semiconductor device using STI process |
Oct. 25, 2005 |
| 6955955 |
STI liner for SOI structure |
Oct. 18, 2005 |
| 6955957 |
Method of forming a floating gate in a flash memory device |
Oct. 18, 2005 |
|
|
|
