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Class Information
Number: 438/402
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > And gettering of substrate
Description: Process for making laterally spaced electrically isolated semiconductor regions having a step of gettering a semiconductor substrate.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8664746 Gettering method for dielectrically isolated devices Mar. 4, 2014
8618536 Organic light-emitting element, display panel, display device, and manufacturing method for organic light-emitting element Dec. 31, 2013
8587025 Method for forming laterally varying doping concentrations and a semiconductor device Nov. 19, 2013
8404570 Graded core/shell semiconductor nanorods and nanorod barcodes Mar. 26, 2013
8399280 Method for protecting an integrated circuit chip against laser attacks Mar. 19, 2013
8382894 Process for the preparation of silicon wafer with reduced slip and warpage Feb. 26, 2013
8329563 Semiconductor device including a gettering layer and manufacturing method therefor Dec. 11, 2012
8309436 Method of producing epitaxial substrate with gettering for solid-state imaging device, and method of producing solid-state imaging device using same substrate Nov. 13, 2012
8293613 Gettering structures and methods and their application Oct. 23, 2012
8193068 Method of manufacturing SOI substrate Jun. 5, 2012
8177989 Copper conducting wire structure and fabricating method thereof May. 15, 2012
8143145 Method and arrangement for producing an N-semiconductive indium sulfide thin layer Mar. 27, 2012
8133769 Methods for gettering in semiconductor substrate Mar. 13, 2012
8093089 Methods of manufacturing image sensors including gettering regions Jan. 10, 2012
8043935 Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device Oct. 25, 2011
7993987 Surface cleaning using sacrificial getter layer Aug. 9, 2011
7897476 Method of manufacturing SOI substrate Mar. 1, 2011
7820524 Manufacturing method of SOI substrate and manufacturing method of semiconductor device Oct. 26, 2010
7799623 Method for manufacturing semiconductor device having LDMOS transistor Sep. 21, 2010
7799660 Method for manufacturing SOI substrate Sep. 21, 2010
7763500 Method for manufacturing semiconductor storage device comprising a slow cooling step Jul. 27, 2010
7700394 Method for manufacturing silicon wafer method Apr. 20, 2010
7687329 Gettering of silicon on insulator using relaxed silicon germanium epitaxial proximity layers Mar. 30, 2010
7651921 Semiconductor device having a frontside contact and vertical trench isolation and method of fabricating same Jan. 26, 2010
7645682 Bonding interface quality by cold cleaning and hot bonding Jan. 12, 2010
7326597 Gettering using voids formed by surface transformation Feb. 5, 2008
7297630 Methods of fabricating via hole and trench Nov. 20, 2007
7229891 Fabrication method for silicon-on defect layer in field-effect and bipolar transistor devices Jun. 12, 2007
7155803 Method of manufacturing a sensor element having integrated reference pressure Jan. 2, 2007
7084048 Process for metallic contamination reduction in silicon wafers Aug. 1, 2006
7078312 Method for controlling etch process repeatability Jul. 18, 2006
7064414 Heater for annealing trapped charge in a semiconductor device Jun. 20, 2006
6958264 Scribe lane for gettering of contaminants on SOI wafers and gettering method Oct. 25, 2005
6929984 Gettering using voids formed by surface transformation Aug. 16, 2005
6830986 SOI semiconductor device having gettering layer and method for producing the same Dec. 14, 2004
6767782 Manufacturing method of semiconductor device Jul. 27, 2004
6735845 Method of producing an integrated reference pressure sensor element May. 18, 2004
6686259 Method for manufacturing solid state image pick-up device Feb. 3, 2004
6670259 Inert atom implantation method for SOI gettering Dec. 30, 2003
6642123 Method of fabricating a silicon wafer including steps of different temperature ramp-up rates and cool-down rates Nov. 4, 2003
6635517 Use of disposable spacer to introduce gettering in SOI layer Oct. 21, 2003
6589839 Dielectric cure for reducing oxygen vacancies Jul. 8, 2003
6580170 Semiconductor device protective overcoat with enhanced adhesion to polymeric materials Jun. 17, 2003
6551866 Method of manufacturing a semiconductor memory device Apr. 22, 2003
6524928 Semiconductor device and method for manufacturing the same Feb. 25, 2003
6515845 Method for preparing nanoporous carbon materials and electric double-layer capacitors using them Feb. 4, 2003
6509248 Fabrication of semiconductor gettering structures by ion implantation Jan. 21, 2003
6448157 Fabrication process for a semiconductor device Sep. 10, 2002
6391738 Semiconductor processing method and trench isolation method May. 21, 2002
6372611 Semiconductor manufacturing method including gettering of metal impurities Apr. 16, 2002

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