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Class Information
Number: 438/402
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > And gettering of substrate
Description: Process for making laterally spaced electrically isolated semiconductor regions having a step of gettering a semiconductor substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7326597 |
Gettering using voids formed by surface transformation |
Feb. 5, 2008 |
| 7297630 |
Methods of fabricating via hole and trench |
Nov. 20, 2007 |
| 7229891 |
Fabrication method for silicon-on defect layer in field-effect and bipolar transistor devices |
Jun. 12, 2007 |
| 7155803 |
Method of manufacturing a sensor element having integrated reference pressure |
Jan. 2, 2007 |
| 7084048 |
Process for metallic contamination reduction in silicon wafers |
Aug. 1, 2006 |
| 7078312 |
Method for controlling etch process repeatability |
Jul. 18, 2006 |
| 7064414 |
Heater for annealing trapped charge in a semiconductor device |
Jun. 20, 2006 |
| 6958264 |
Scribe lane for gettering of contaminants on SOI wafers and gettering method |
Oct. 25, 2005 |
| 6929984 |
Gettering using voids formed by surface transformation |
Aug. 16, 2005 |
| 6830986 |
SOI semiconductor device having gettering layer and method for producing the same |
Dec. 14, 2004 |
| 6767782 |
Manufacturing method of semiconductor device |
Jul. 27, 2004 |
| 6735845 |
Method of producing an integrated reference pressure sensor element |
May. 18, 2004 |
| 6686259 |
Method for manufacturing solid state image pick-up device |
Feb. 3, 2004 |
| 6670259 |
Inert atom implantation method for SOI gettering |
Dec. 30, 2003 |
| 6642123 |
Method of fabricating a silicon wafer including steps of different temperature ramp-up rates and cool-down rates |
Nov. 4, 2003 |
| 6635517 |
Use of disposable spacer to introduce gettering in SOI layer |
Oct. 21, 2003 |
| 6589839 |
Dielectric cure for reducing oxygen vacancies |
Jul. 8, 2003 |
| 6580170 |
Semiconductor device protective overcoat with enhanced adhesion to polymeric materials |
Jun. 17, 2003 |
| 6551866 |
Method of manufacturing a semiconductor memory device |
Apr. 22, 2003 |
| 6524928 |
Semiconductor device and method for manufacturing the same |
Feb. 25, 2003 |
| 6515845 |
Method for preparing nanoporous carbon materials and electric double-layer capacitors using them |
Feb. 4, 2003 |
| 6509248 |
Fabrication of semiconductor gettering structures by ion implantation |
Jan. 21, 2003 |
| 6448157 |
Fabrication process for a semiconductor device |
Sep. 10, 2002 |
| 6391738 |
Semiconductor processing method and trench isolation method |
May. 21, 2002 |
| 6372611 |
Semiconductor manufacturing method including gettering of metal impurities |
Apr. 16, 2002 |
| 6368938 |
Process for manufacturing a silicon-on-insulator substrate and semiconductor devices on said substrate |
Apr. 9, 2002 |
| 6358814 |
Method for manufacturing semiconductor devices having an epitaxial layer and wafer alignment marks |
Mar. 19, 2002 |
| 6342428 |
Method for a consistent shallow trench etch profile |
Jan. 29, 2002 |
| 6339011 |
Method of forming semiconductive active area having a proximity gettering region therein and method of processing a monocrystalline silicon substrate to have a proximity gettering region |
Jan. 15, 2002 |
| 6326248 |
Process for fabricating semiconductor device |
Dec. 4, 2001 |
| 6281142 |
Dielectric cure for reducing oxygen vacancies |
Aug. 28, 2001 |
| 6274460 |
Defect gettering by induced stress |
Aug. 14, 2001 |
| 6228748 |
Use of a getter layer to improve metal to metal contact resistance at low radio frequency power |
May. 8, 2001 |
| 6191005 |
Process for producing semiconductor device |
Feb. 20, 2001 |
| 6136670 |
Semiconductor processing methods of forming contacts between electrically conductive materials |
Oct. 24, 2000 |
| 6133123 |
Fabrication of semiconductor gettering structures by ion implantation |
Oct. 17, 2000 |
| 6114223 |
Gettering regions and methods of forming gettering regions within a semiconductor wafer |
Sep. 5, 2000 |
| 6093624 |
Method of providing a gettering scheme in the manufacture of silicon-on-insulator (SOI) integrated circuits |
Jul. 25, 2000 |
| 6090645 |
Fabrication method of semiconductor device with gettering treatment |
Jul. 18, 2000 |
| 6048778 |
Gettering regions and methods of forming gettering regions within a semiconductor wafer |
Apr. 11, 2000 |
| 6013556 |
Method of integrated circuit fabrication |
Jan. 11, 2000 |
| 5976956 |
Method of controlling dopant concentrations using transient-enhanced diffusion prior to gate formation in a device |
Nov. 2, 1999 |
| 5970366 |
Method of removing metallic contaminants from simox substrate |
Oct. 19, 1999 |
| 5910339 |
Fabrication of atomic step-free surfaces |
Jun. 8, 1999 |
| 5895236 |
Semiconductor device fabricating method having a gettering step |
Apr. 20, 1999 |
| 5874325 |
Method of manufacturing semiconductor device with gettering and isolation |
Feb. 23, 1999 |
| 5841171 |
SOI Semiconductor devices |
Nov. 24, 1998 |
| 5798294 |
Semiconductor substrate having a serious effect of gettering heavy metal and method of manufacturing the same |
Aug. 25, 1998 |
| 5795809 |
Semiconductor wafer fabrication process including gettering utilizing a combined oxidation technique |
Aug. 18, 1998 |
| 5789284 |
Method for fabricating semiconductor thin film |
Aug. 4, 1998 |
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