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Class Information
Number: 438/401
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Having substrate registration feature (e.g., alignment mark)
Description: Process wherein the process of forming electrical isolation utilizes an alignment feature formed on the semiconductive substrate or forms an alignment feature for subsequent use.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8039356 Through silicon via lithographic alignment and registration Oct. 18, 2011
8030222 Structures with increased photo-alignment margins Oct. 4, 2011
8027528 Method for calculating height of chuck top and program storage medium for storing same method Sep. 27, 2011
8026149 Substrate with marker, manufacturing method thereof, laser irradiation apparatus, laser irradiation method, light exposure apparatus, and manufacturing method of semiconductor device Sep. 27, 2011
8022559 Substrate for a display panel, and a display panel having the same Sep. 20, 2011
8017426 Color filter array alignment mark formation in backside illuminated image sensors Sep. 13, 2011
8008789 Substrate for a display panel, and a display panel having the same Aug. 30, 2011
8003412 Method and apparatus for measurement and control of photomask to substrate alignment Aug. 23, 2011
8003482 Methods of processing semiconductor substrates in forming scribe line alignment marks Aug. 23, 2011
7999400 Semiconductor device with recessed registration marks partially covered and partially uncovered Aug. 16, 2011
7998827 Method of forming a multi-level interconnect structure by overlay alignment procedures Aug. 16, 2011
7998826 Method of forming mark in IC-fabricating process Aug. 16, 2011
7989303 Method of creating an alignment mark on a substrate and substrate Aug. 2, 2011
7989966 Mark structure for coarse wafer alignment and method for manufacturing such a mark structure Aug. 2, 2011
7989967 High-contrast laser mark on substrate surfaces Aug. 2, 2011
7981762 Method of forming pre-metal dielectric layer of semiconductor device Jul. 19, 2011
7977141 Solid-state image pickup device and method of manufacturing the same Jul. 12, 2011
7973419 Semiconductor device and method of fabricating the same Jul. 5, 2011
7972932 Mark forming method and method for manufacturing semiconductor device Jul. 5, 2011
7972904 Wafer level packaging method Jul. 5, 2011
7964472 Method of producing semiconductor device Jun. 21, 2011
7960242 Method for fabrication of a semiconductor device and structure Jun. 14, 2011
7955946 Methods of determining x-y spatial orientation of a semiconductor substrate comprising an integrated circuit, methods of positioning a semiconductor substrate comprising an integrated circuit, Jun. 7, 2011
7947563 Chip ID applying method suitable for use in semiconductor integrated circuit May. 24, 2011
7944064 Semiconductor device having alignment post electrode and method of manufacturing the same May. 17, 2011
7944063 Application of 2-dimensional photonic crystals in alignment devices May. 17, 2011
7943478 Semiconductor device manufacturing method May. 17, 2011
7939822 Active matrix display device May. 10, 2011
7935893 Method of manufacturing printed wiring board with built-in electronic component May. 3, 2011
7932157 Test structure formation in semiconductor processing Apr. 26, 2011
7927960 Method of improving overlay performance in semiconductor manufacture Apr. 19, 2011
7923344 Method of fabricating backside illuminated image sensor Apr. 12, 2011
7915747 Substrate for forming semiconductor layer including alignment marks Mar. 29, 2011
7915141 Deterministic generation of an integrated circuit identification number Mar. 29, 2011
7915067 Backside illuminated image sensor with reduced dark current Mar. 29, 2011
7910423 Semiconductor device and method of manufacturing the same Mar. 22, 2011
7911612 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Mar. 22, 2011
7893550 Semiconductor package comprising alignment members Feb. 22, 2011
7894063 Lithographic method Feb. 22, 2011
7888250 Method and apparatus for activating compound semiconductor Feb. 15, 2011
7883985 Chip and multi-chip semiconductor device using the chip, and method for manufacturing same Feb. 8, 2011
7879627 Overlay marks and methods of manufacturing such marks Feb. 1, 2011
7879682 Marker structure and method for controlling alignment of layers of a multi-layered substrate Feb. 1, 2011
7880880 Alignment systems and methods for lithographic systems Feb. 1, 2011
7875988 Substrate and manufacturing method of the same, and semiconductor device and manufacturing method of the same Jan. 25, 2011
7876439 Multi layer alignment and overlay target and measurement method Jan. 25, 2011
7858487 Method and apparatus for indicating directionality in integrated circuit manufacturing Dec. 28, 2010
7847939 Overlay measurement target Dec. 7, 2010
7847310 Migration enhanced epitaxy fabrication of active regions having quantum wells Dec. 7, 2010
7846810 Method of measuring warpage of rear surface of substrate Dec. 7, 2010

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