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Class Information
Number: 438/401
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Having substrate registration feature (e.g., alignment mark)
Description: Process wherein the process of forming electrical isolation utilizes an alignment feature formed on the semiconductive substrate or forms an alignment feature for subsequent use.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7944063 |
Application of 2-dimensional photonic crystals in alignment devices |
May. 17, 2011 |
| 7939822 |
Active matrix display device |
May. 10, 2011 |
| 7935893 |
Method of manufacturing printed wiring board with built-in electronic component |
May. 3, 2011 |
| 7932157 |
Test structure formation in semiconductor processing |
Apr. 26, 2011 |
| 7927960 |
Method of improving overlay performance in semiconductor manufacture |
Apr. 19, 2011 |
| 7923344 |
Method of fabricating backside illuminated image sensor |
Apr. 12, 2011 |
| 7915067 |
Backside illuminated image sensor with reduced dark current |
Mar. 29, 2011 |
| 7915141 |
Deterministic generation of an integrated circuit identification number |
Mar. 29, 2011 |
| 7915747 |
Substrate for forming semiconductor layer including alignment marks |
Mar. 29, 2011 |
| 7910423 |
Semiconductor device and method of manufacturing the same |
Mar. 22, 2011 |
| 7911612 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
Mar. 22, 2011 |
| 7893550 |
Semiconductor package comprising alignment members |
Feb. 22, 2011 |
| 7894063 |
Lithographic method |
Feb. 22, 2011 |
| 7888250 |
Method and apparatus for activating compound semiconductor |
Feb. 15, 2011 |
| 7883985 |
Chip and multi-chip semiconductor device using the chip, and method for manufacturing same |
Feb. 8, 2011 |
| 7879627 |
Overlay marks and methods of manufacturing such marks |
Feb. 1, 2011 |
| 7879682 |
Marker structure and method for controlling alignment of layers of a multi-layered substrate |
Feb. 1, 2011 |
| 7880880 |
Alignment systems and methods for lithographic systems |
Feb. 1, 2011 |
| 7875988 |
Substrate and manufacturing method of the same, and semiconductor device and manufacturing method of the same |
Jan. 25, 2011 |
| 7876439 |
Multi layer alignment and overlay target and measurement method |
Jan. 25, 2011 |
| 7858487 |
Method and apparatus for indicating directionality in integrated circuit manufacturing |
Dec. 28, 2010 |
| 7847939 |
Overlay measurement target |
Dec. 7, 2010 |
| 7847310 |
Migration enhanced epitaxy fabrication of active regions having quantum wells |
Dec. 7, 2010 |
| 7846810 |
Method of measuring warpage of rear surface of substrate |
Dec. 7, 2010 |
| 7838310 |
Tunable alignment geometry |
Nov. 23, 2010 |
| 7838386 |
Method and system for patterning alignment marks on a transparent substrate |
Nov. 23, 2010 |
| 7839006 |
Semiconductor device and method for manufacturing the same |
Nov. 23, 2010 |
| 7830028 |
Semiconductor test structures |
Nov. 9, 2010 |
| 7825000 |
Method for integration of magnetic random access memories with improved lithographic alignment to magnetic tunnel junctions |
Nov. 2, 2010 |
| 7825001 |
Electronic device, method for manufacturing the same, and silicon substrate for electronic device |
Nov. 2, 2010 |
| 7821142 |
Intermediate semiconductor device structures |
Oct. 26, 2010 |
| 7816223 |
Alignment key, method for fabricating the alignment key, and method for fabricating thin film transistor substrate using the alignment key |
Oct. 19, 2010 |
| 7807498 |
Substrate, substrate fabrication, semiconductor device, and semiconductor device fabrication |
Oct. 5, 2010 |
| 7807544 |
Solar cell fabrication using extrusion mask |
Oct. 5, 2010 |
| 7803672 |
Thin film transistor array panel and method of manufacturing the same |
Sep. 28, 2010 |
| 7803701 |
Method for fabricating a semiconductor device |
Sep. 28, 2010 |
| 7799673 |
Semiconductor device manufacturing method |
Sep. 21, 2010 |
| 7795105 |
Method for producing an integrated circuit assembly with an auxiliary indentation, particularly with aligning marks, and an integrated circuit arrangement |
Sep. 14, 2010 |
| 7785981 |
Solid-state imaging device and method of manufacturing solid-state imaging device |
Aug. 31, 2010 |
| 7785980 |
Method of manufacturing semiconductor device using alignment mark and mark hole |
Aug. 31, 2010 |
| 7786607 |
Overlay correction by reducing wafer slipping after alignment |
Aug. 31, 2010 |
| 7781299 |
Leadframe semiconductor package stand and method for making the same |
Aug. 24, 2010 |
| 7776625 |
Method for locating a sub-surface feature using a scatterometer |
Aug. 17, 2010 |
| 7776709 |
Cut-and-paste imprint lithographic mold and method therefor |
Aug. 17, 2010 |
| 7772048 |
Forming semiconductor fins using a sacrificial fin |
Aug. 10, 2010 |
| 7772710 |
Zero-order overlay targets |
Aug. 10, 2010 |
| 7759808 |
Semiconductor substrate including first and second recognition marks and method for manufacturing semiconductor device |
Jul. 20, 2010 |
| 7759029 |
Substrate provided with an alignment mark in a substantially transmissive process layer, mask for exposing said mark, device manufacturing method, and device manufactured thereby |
Jul. 20, 2010 |
| 7751047 |
Alignment and alignment marks |
Jul. 6, 2010 |
| 7745344 |
Method for integrating NVM circuitry with logic circuitry |
Jun. 29, 2010 |
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