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Class Information
Number: 438/401
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure > Having substrate registration feature (e.g., alignment mark)
Description: Process wherein the process of forming electrical isolation utilizes an alignment feature formed on the semiconductive substrate or forms an alignment feature for subsequent use.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8709908 Improving alignment target contrast in a lithographic double patterning process Apr. 29, 2014
8709909 Method for manufacturing a substrate for a display device Apr. 29, 2014
8691658 Orientation of an electronic CMOS structure with respect to a buried structure in the case of a bonded and thinned-back stack of semiconductor wafers Apr. 8, 2014
8664077 Method for forming self-aligned overlay mark Mar. 4, 2014
8647908 Semiconductor pressure sensor and method of manufacturing semiconductor pressure sensor Feb. 11, 2014
8633048 Method for fabricating package structure having MEMS elements Jan. 21, 2014
8629568 Semiconductor device cover mark Jan. 14, 2014
8625096 Method and system for increasing alignment target contrast Jan. 7, 2014
8617935 Back side alignment structure and manufacturing method for three-dimensional semiconductor device packages Dec. 31, 2013
8613862 Method for manufacturing liquid discharge head substrate Dec. 24, 2013
8609441 Substrate comprising a mark Dec. 17, 2013
8610238 Crack stop trenches Dec. 17, 2013
8592287 Overlay alignment mark and method of detecting overlay alignment error using the mark Nov. 26, 2013
8593000 Semiconductor device and manufacturing method thereof Nov. 26, 2013
8592107 Method and apparatus of providing overlay Nov. 26, 2013
8563393 Method for manufacturing semiconductor device Oct. 22, 2013
8564143 Overlay mark for multiple pre-layers and currently layer Oct. 22, 2013
8557675 Methods of patterning features in a structure using multiple sidewall image transfer technique Oct. 15, 2013
8541148 Method for making a laminated chip and method for aligning a lithographic mask Sep. 24, 2013
8535858 Photomask and method for forming overlay mark using the same Sep. 17, 2013
8530325 Method of forming alignment layer and fabrication method of liquid crystal display using the same Sep. 10, 2013
8530326 Method of fabricating a dummy gate structure in a gate last process Sep. 10, 2013
8531046 Semiconductor substrates comprising through substrate interconnects that are visible on the substrate backside Sep. 10, 2013
8513065 Method for manufacturing display device Aug. 20, 2013
8513777 Method and apparatus for generating reticle data Aug. 20, 2013
8513821 Overlay mark assistant feature Aug. 20, 2013
8501576 Dummy structures and methods Aug. 6, 2013
8492175 System and method for aligning surface mount devices on a substrate Jul. 23, 2013
8492240 Solar-cell marking method and solar cell Jul. 23, 2013
8482105 Semiconductor substrate, laminated chip package, semiconductor plate and method of manufacturing the same Jul. 9, 2013
8463419 System and method for improved automated semiconductor wafer manufacturing Jun. 11, 2013
8440472 Stacking apparatus and method for stacking integrated circuit elements May. 14, 2013
8436482 Semiconductor device, and method of fabricating semiconductor device May. 7, 2013
8435865 Method of manufacturing super-junction semiconductor device May. 7, 2013
8431827 Circuit modules and method of managing the same Apr. 30, 2013
8431946 Chip package and method for forming the same Apr. 30, 2013
8420411 Method for aligning wafer stack Apr. 16, 2013
8420498 Alignment method of chips Apr. 16, 2013
8415813 Identification of dies on a semiconductor wafer Apr. 9, 2013
8400634 Semiconductor wafer alignment markers, and associated systems and methods Mar. 19, 2013
8395154 Thin film transistor substrate and method of manufacturing the same Mar. 12, 2013
8395191 Semiconductor device and structure Mar. 12, 2013
8390808 Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods Mar. 5, 2013
8377800 Alignment marks for polarized light lithography and method for use thereof Feb. 19, 2013
8378332 Nanowires Feb. 19, 2013
8363219 Lateral shift measurement using an optical technique Jan. 29, 2013
8361876 Manufacturing method of semiconductor device Jan. 29, 2013
8361877 Manufacturing method of semiconductor device, semiconductor device, and method of printing on semiconductor wafer Jan. 29, 2013
8357561 Method of fabricating backside illuminated image sensor Jan. 22, 2013
8357935 Electronic component having an authentication pattern Jan. 22, 2013

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