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Class Information
Number: 438/400
Name: Semiconductor device manufacturing: process > Formation of electrically isolated lateral semiconductive structure
Description: Process for making partial or total electrical isolation means serving to minimize electrical current flow between laterally adjoining semiconductive regions of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/402 And gettering of substrate 97
438/454 Field plate electrode 149
438/424 Grooved and refilled with deposited dielectric material 2,061
438/421 Having air-gap dielectric (e.g., groove, etc.) 393
438/403 Having semi-insulating component 117
438/401 Having substrate registration feature (e.g., alignment mark) 801
438/423 Implanting to form insulator 224
438/414 Isolation by pn junction only 65
438/439 Recessed oxide by localized oxidation (i.e., locos) 357
438/404 Total dielectric isolation 363

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8114749 Method of fabricating high voltage device Feb. 14, 2012
8102030 Semiconductor device with strain Jan. 24, 2012
8097916 Method for insulating a semiconducting material in a trench from a substrate Jan. 17, 2012
8048765 Method for fabricating a MOS transistor with source/well heterojunction and related structure Nov. 1, 2011
8026187 Method of forming silicon oxide film and method of production of semiconductor memory device using this method Sep. 27, 2011
8003488 Shallow trench isolation structure compatible with SOI embedded DRAM Aug. 23, 2011
7998828 Method of forming metal ion transistor Aug. 16, 2011
7993706 Method of forming a nano-structure and the nano-structure Aug. 9, 2011
7989306 Method of forming alternating regions of Si and SiGe or SiGeC on a buried oxide layer on a substrate Aug. 2, 2011
7985610 Solar cell, method of forming emitter layer of solar cell, and method of manufacturing solar cell Jul. 26, 2011
7981700 Semiconductor oxidation apparatus and method of producing semiconductor element Jul. 19, 2011
7981709 Semiconductor device and method for fabricating the same Jul. 19, 2011
7977198 Semiconductor device and method of manufacturing semiconductor device Jul. 12, 2011
7972929 Method for manufacturing semicondcutor device Jul. 5, 2011
7955883 Polymer replicated interdigitated electrode array for (bio) sensing applications Jun. 7, 2011
7943480 Sub-lithographic dimensioned air gap formation and related structure May. 17, 2011
7932147 Flash memory device and manufacturing method of the same Apr. 26, 2011
7932158 Formation of improved SOI substrates using bulk semiconductor wafers Apr. 26, 2011
7898030 High-voltage NMOS-transistor and associated production method Mar. 1, 2011
7888732 Lateral drain-extended MOSFET having channel along sidewall of drain extension dielectric Feb. 15, 2011
7888232 Method for producing a protective structure Feb. 15, 2011
7871893 Method for non-selective shallow trench isolation reactive ion etch for patterning hybrid-oriented devices compatible with high-performance highly-integrated logic devices Jan. 18, 2011
7868412 Semiconductor device and method of fabricating the same Jan. 11, 2011
7858488 Method of forming a device isolation film of a semiconductor device Dec. 28, 2010
7851328 STI stress modulation with additional implantation and natural pad sin mask Dec. 14, 2010
7846811 Process for manufacturing a high-quality SOI wafer Dec. 7, 2010
7834396 Lateral field effect transistor and its fabrication comprising a spacer layer above and below the channel layer Nov. 16, 2010
7829429 Semiconductor device having localized insulated block in bulk substrate and related method Nov. 9, 2010
7824999 Method for enhancing field oxide Nov. 2, 2010
7825488 Isolation structures for integrated circuits and modular methods of forming the same Nov. 2, 2010
7816208 Method of manufacturing semiconductor device having trench-gate transistor Oct. 19, 2010
7807543 Methods of manufacturing trench isolation structures using selective plasma ion immersion implantation and deposition (PIIID) Oct. 5, 2010
7803689 Semiconductor device manufactured with a double shallow trench isolation process Sep. 28, 2010
7799583 System for separation of an electrically conductive connection Sep. 21, 2010
7794540 Method of manufacturing a semiconductor device Sep. 14, 2010
7785946 Integrated circuits and methods of design and manufacture thereof Aug. 31, 2010
7781267 Enclosed nanotube structure and method for forming Aug. 24, 2010
7776708 System and method for providing a nitride cap over a polysilicon filled trench to prevent formation of a vertical bird's beak structure in the manufacture of a semiconductor device Aug. 17, 2010
7776672 Semiconductor device and manufacturing method thereof Aug. 17, 2010
7772699 Semiconductor device and method of manufacturing the same Aug. 10, 2010
7763521 Metal wiring and method for forming the same Jul. 27, 2010
7741192 Semiconductor device and manufacturing method thereof Jun. 22, 2010
7732813 Image sensor and method for manufacturing the same Jun. 8, 2010
7730611 High capacity pick and place process Jun. 8, 2010
7727851 Method of measuring shifted epitaxy layer by buried layer Jun. 1, 2010
7723203 Method of forming an alignment key having a capping layer and method of fabricating a semiconductor device using the same May. 25, 2010
7719090 Semiconductor device with strain May. 18, 2010
7704849 Methods of forming trench isolation in silicon of a semiconductor substrate by plasma Apr. 27, 2010
7704823 Strained semiconductor device and method of making same Apr. 27, 2010
7700466 Tunneling effect transistor with self-aligned gate Apr. 20, 2010

1 2 3 4 5 6 7

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