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Class Information
Number: 438/399
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Stacked capacitor > Having contacts formed by selective growth or deposition
Description: Process for making a stacked capacitor wherein electrical contacts are formed by selective growth or deposition of conductive material onto the substrate.

Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8664076 Method of forming a robust, modular MIS (metal-insulator-semiconductor) capacitor with improved capacitance density Mar. 4, 2014
8551851 Titanium-based high-K dielectric films Oct. 8, 2013
8530322 Method of forming stacked metal oxide layers Sep. 10, 2013
8492273 Method for selective deposition of a semiconductor material Jul. 23, 2013
8461012 Device with ground plane for high frequency signal transmission and method therefor Jun. 11, 2013
8440537 Adsorption site blocking method for co-doping ALD films May. 14, 2013
8384226 Hybrid bump capacitor Feb. 26, 2013
8377792 Method of forming high capacitance semiconductor capacitors with a single lithography step Feb. 19, 2013
8338871 Field effect transistor with electric field and space-charge control contact Dec. 25, 2012
8329534 Method of forming contacts for a memory device Dec. 11, 2012
8318575 Compressive polycrystalline silicon film and method of manufacture thereof Nov. 27, 2012
8298909 Semiconductor device and method for fabricating the same Oct. 30, 2012
8268695 Methods of making capacitors Sep. 18, 2012
8247305 Method and resulting structure for deep trench polysilicon hard mask removal Aug. 21, 2012
8241987 Methods of forming capacitors Aug. 14, 2012
8236643 Method of manufacturing semiconductor device including ferroelectric capacitor Aug. 7, 2012
8232175 Damascene metal-insulator-metal (MIM) device with improved scaleability Jul. 31, 2012
8216898 Fabrication methods for electronic devices with via through holes and thin film transistor devices Jul. 10, 2012
8168496 Single die output power stage using trench-gate low-side and LDMOS high-side MOSFETS, structure and method May. 1, 2012
8163613 Methods of forming a plurality of capacitors Apr. 24, 2012
8138572 Semiconductor device and method for fabricating the same Mar. 20, 2012
8076213 Method for fabricating a metal-insulator-metal capacitor Dec. 13, 2011
8034681 Method of forming flash memory device having inter-gate plug Oct. 11, 2011
8022458 Capacitors integrated with metal gate formation Sep. 20, 2011
8012810 Low parasitic capacitance bit line process for stack DRAM Sep. 6, 2011
8003514 Methods of fabricating semiconductor devices including storage node landing pads separated from bit line contact plugs Aug. 23, 2011
7977248 Double patterning with single hard mask Jul. 12, 2011
7968420 Manufacturing semiconductor device and method of manufacturing electronic apparatus Jun. 28, 2011
7968452 Titanium-based high-K dielectric films Jun. 28, 2011
7960226 Method of forming on-chip decoupling capacitor with bottom electrode layer having surface roughness Jun. 14, 2011
7955872 Manufacturing method of semiconductor integrated circuit device using magnetic memory Jun. 7, 2011
7955883 Polymer replicated interdigitated electrode array for (bio) sensing applications Jun. 7, 2011
7939390 Gap capacitors for monitoring stress in solder balls in flip chip technology May. 10, 2011
7897475 Semiconductor device having projection on lower electrode and method for forming the same Mar. 1, 2011
7892918 Method of fabricating a semiconductor device including formation of contact holes Feb. 22, 2011
7867869 Laminated thin-film device, manufacturing method thereof, and circuit Jan. 11, 2011
7858465 Semiconductor device comprising transistor and capacitor and method of manufacturing the same Dec. 28, 2010
7846809 Method for forming capacitor of semiconductor device Dec. 7, 2010
7842581 Methods of forming metal layers using oxygen gas as a reaction source and methods of fabricating capacitors using such metal layers Nov. 30, 2010
7825510 Method for filling a contact hole and integrated circuit arrangement with contact hole Nov. 2, 2010
7825043 Method for fabricating capacitor in semiconductor device Nov. 2, 2010
7824998 Method of forming a semiconductor capacitor using amorphous carbon Nov. 2, 2010
7818855 Method of making thin-film capacitors on metal foil using thick top electrodes Oct. 26, 2010
7820488 Microelectronic devices and methods Oct. 26, 2010
7785999 Formation of fully silicided metal gate using dual self-aligned silicide process Aug. 31, 2010
7781819 Semiconductor devices having a contact plug and fabrication methods thereof Aug. 24, 2010
7776685 Copolymers, polymer resin composition for buffer layer method of forming a pattern using the same and method of manufacturing a capacitor using the same Aug. 17, 2010
7772065 Semiconductor memory device including a contact with different upper and bottom surface diameters and manufacturing method thereof Aug. 10, 2010
7772628 Semiconductor device and method for manufacturing the same Aug. 10, 2010
7767521 Cell region layout of semiconductor device and method of forming contact pad using the same Aug. 3, 2010

1 2 3 4 5 6 7 8

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