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Class Information
Number: 438/399
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Stacked capacitor > Having contacts formed by selective growth or deposition
Description: Process for making a stacked capacitor wherein electrical contacts are formed by selective growth or deposition of conductive material onto the substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622348 |
Methods for fabricating an integrated circuit |
Nov. 24, 2009 |
| 7605007 |
Semiconductor device and method of manufacturing the same |
Oct. 20, 2009 |
| 7598114 |
Sacrificial benzocyclobutene/norbornene polymers for making air gap semiconductor devices |
Oct. 6, 2009 |
| 7598138 |
Semiconductor device manufacturing method |
Oct. 6, 2009 |
| 7553738 |
Method of fabricating a microelectronic device including embedded thin film capacitor by over-etching thin film capacitor bottom electrode and microelectronic device made according to the meth |
Jun. 30, 2009 |
| 7550360 |
Solid electrolytic capacitor manufacturing method capable of easily and properly connecting anode electrode portion |
Jun. 23, 2009 |
| 7550380 |
Electroless plating of metal caps for chalcogenide-based memory devices |
Jun. 23, 2009 |
| 7547607 |
Methods of fabricating integrated circuit capacitors using a dry etching process |
Jun. 16, 2009 |
| 7544580 |
Method for manufacturing passive components |
Jun. 9, 2009 |
| 7517806 |
Integrated circuit having pairs of parallel complementary FinFETs |
Apr. 14, 2009 |
| 7491619 |
Methods of fabricating semiconductor devices |
Feb. 17, 2009 |
| 7488644 |
Method of fabricating a semiconductor device |
Feb. 10, 2009 |
| 7485912 |
Flexible metal-oxide-metal capacitor design |
Feb. 3, 2009 |
| 7482242 |
Capacitor, method of forming the same, semiconductor device having the capacitor and method of manufacturing the same |
Jan. 27, 2009 |
| 7468108 |
Metal layer forming methods and capacitor electrode forming methods |
Dec. 23, 2008 |
| 7456078 |
Thin-film capacitor and method for fabricating the same, electronic device and circuit board |
Nov. 25, 2008 |
| 7449383 |
Method of manufacturing a capacitor and method of manufacturing a dynamic random access memory device using the same |
Nov. 11, 2008 |
| 7446014 |
Nanoelectrochemical cell |
Nov. 4, 2008 |
| 7439126 |
Method for manufacturing semiconductor memory |
Oct. 21, 2008 |
| 7429535 |
Use of a plasma source to form a layer during the formation of a semiconductor device |
Sep. 30, 2008 |
| 7422954 |
Method for fabricating a capacitor structure |
Sep. 9, 2008 |
| 7417275 |
Capacitor pair structure for increasing the match thereof |
Aug. 26, 2008 |
| 7407862 |
Method for manufacturing ferroelectric memory device |
Aug. 5, 2008 |
| 7393742 |
Semiconductor device having a capacitor and a fabrication method thereof |
Jul. 1, 2008 |
| 7361549 |
Method for fabricating memory cells for a memory device |
Apr. 22, 2008 |
| 7354843 |
Method of forming a capacitor that includes forming a bottom electrode in a strained silicon layer |
Apr. 8, 2008 |
| 7339222 |
Method for determining wordline critical dimension in a memory array and related structure |
Mar. 4, 2008 |
| 7338879 |
Method of fabricating a semiconductor device having dual stacked MIM capacitor |
Mar. 4, 2008 |
| 7329572 |
Method of forming PIP capacitor |
Feb. 12, 2008 |
| 7319069 |
Structure having pores, device using the same, and manufacturing methods therefor |
Jan. 15, 2008 |
| 7316954 |
Methods of fabricating integrated circuit devices that utilize doped poly-Si.sub.1-xGe.sub.x conductive plugs as interconnects |
Jan. 8, 2008 |
| 7312121 |
Method of manufacturing a semiconductor memory device |
Dec. 25, 2007 |
| 7298000 |
Conductive container structures having a dielectric cap |
Nov. 20, 2007 |
| 7294545 |
Selective polysilicon stud growth |
Nov. 13, 2007 |
| 7276751 |
Trench metal-insulator-metal (MIM) capacitors integrated with middle-of-line metal contacts, and method of fabricating same |
Oct. 2, 2007 |
| 7265406 |
Capacitor with conducting nanostructure |
Sep. 4, 2007 |
| 7232736 |
Semiconductor devices with capacitors of metal/insulator/metal structure and methods for forming the same |
Jun. 19, 2007 |
| 7229904 |
Method for forming landing plug contacts in semiconductor device |
Jun. 12, 2007 |
| 7223654 |
MIM capacitor and method of fabricating same |
May. 29, 2007 |
| 7221591 |
Fabricating bi-directional nonvolatile memory cells |
May. 22, 2007 |
| 7214584 |
Method for forming semiconductor device capable of preventing bunker defect |
May. 8, 2007 |
| 7199051 |
Method for fabricating semiconductor device capable of preventing damages to conductive structure |
Apr. 3, 2007 |
| 7195975 |
Method of forming bit line contact via |
Mar. 27, 2007 |
| 7176038 |
Ferroelectric element and method for manufacturing the same |
Feb. 13, 2007 |
| 7144798 |
Semiconductor memory devices having extending contact pads and related methods |
Dec. 5, 2006 |
| 7132346 |
Atomic layer deposition of titanium using batch type chamber and method for fabricating capacitor by using the same |
Nov. 7, 2006 |
| 7112508 |
Method for forming conductive material in opening and structure regarding same |
Sep. 26, 2006 |
| 7109080 |
Method of forming capacitor over bitline contact |
Sep. 19, 2006 |
| 7105065 |
Metal layer forming methods and capacitor electrode forming methods |
Sep. 12, 2006 |
| 7091102 |
Methods of forming integrated circuit devices having a capacitor with a hydrogen barrier spacer on a sidewall thereof and integrated circuit devices formed thereby |
Aug. 15, 2006 |
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