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Class Information
Number: 438/398
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Stacked capacitor > Including texturizing storage node layer
Description: Process for making a stacked capacitor having a step of roughening the surface of the capacitor plate which serves as the storage node layer.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8679935 Methods of fabricating a semiconductor device having metallic storage nodes Mar. 25, 2014
8664076 Method of forming a robust, modular MIS (metal-insulator-semiconductor) capacitor with improved capacitance density Mar. 4, 2014
8610249 Non-planar capacitor and method of forming the non-planar capacitor Dec. 17, 2013
8530322 Method of forming stacked metal oxide layers Sep. 10, 2013
8518819 Semiconductor device contact structures and methods for making the same Aug. 27, 2013
8461012 Device with ground plane for high frequency signal transmission and method therefor Jun. 11, 2013
8426286 Method and device for a DRAM capacitor having low depletion ratio Apr. 23, 2013
8384143 Semiconductor device and manufacturing method therefor Feb. 26, 2013
8378355 Thin film transistor array substrate and method for fabricating the same Feb. 19, 2013
8283236 Methods of forming capacitors Oct. 9, 2012
8242551 Metal-insulator-metal structure for system-on-chip technology Aug. 14, 2012
8188833 Variable resistance element and manufacturing method of the same May. 29, 2012
8182710 Structuring method May. 22, 2012
8178404 Metal-insulator-metal (MIM) capacitor structure and methods of fabricating same May. 15, 2012
8178405 Resistor random access memory cell device May. 15, 2012
8168448 Ferroelectric register, and method for manufacturing capacitor of the same May. 1, 2012
8169015 Semiconductor device and manufacturing method therefor May. 1, 2012
8164131 Nonvolatile semiconductor memory device and method of manufacturing the same Apr. 24, 2012
8129251 Metal-insulator-metal-structured capacitor formed with polysilicon Mar. 6, 2012
8080474 Method for making electrode Dec. 20, 2011
8062950 Method of manufacturing semiconductor device with lower capacitor electrode that includes islands of conductive oxide films arranged on a noble metal film Nov. 22, 2011
8039344 Methods of forming a capacitor structure and methods of manufacturing a semiconductor device using the same Oct. 18, 2011
8003481 Method for fabricating a capacitor Aug. 23, 2011
7951682 Method for fabricating capacitor in semiconductor device May. 31, 2011
7897475 Semiconductor device having projection on lower electrode and method for forming the same Mar. 1, 2011
7871886 Nanocrystal memory with differential energy bands and method of formation Jan. 18, 2011
7868338 Liquid crystal display array board and method of fabricating the same Jan. 11, 2011
7858465 Semiconductor device comprising transistor and capacitor and method of manufacturing the same Dec. 28, 2010
7855113 Method for fabricating semiconductor memory device Dec. 21, 2010
7846809 Method for forming capacitor of semiconductor device Dec. 7, 2010
7825043 Method for fabricating capacitor in semiconductor device Nov. 2, 2010
7824998 Method of forming a semiconductor capacitor using amorphous carbon Nov. 2, 2010
7812450 Electrode with nano-sized structures Oct. 12, 2010
7781298 Methods for fabricating a capacitor Aug. 24, 2010
7754576 Method of forming inside rough and outside smooth HSG electrodes and capacitor structure Jul. 13, 2010
7749854 Method for making a self-converged memory material element for memory cell Jul. 6, 2010
7745827 Memory device Jun. 29, 2010
7741176 Method for fabricating a cylindrical capacitor including implanting impurities into the upper sections of the lower electrode to prevent the formation of hemispherical grain silicon on the upp Jun. 22, 2010
7736972 Method for forming storage electrode of semiconductor memory device Jun. 15, 2010
7727850 Method for forming capacitor of semiconductor device Jun. 1, 2010
7709367 Method for fabricating storage node contact in semiconductor device May. 4, 2010
7700433 MIM type capacitor Apr. 20, 2010
7700454 Methods of forming integrated circuit electrodes and capacitors by wrinkling a layer that includes a high percentage of impurities Apr. 20, 2010
7670921 Structure and method for self aligned vertical plate capacitor Mar. 2, 2010
7666738 Method for fabricating capacitor of semiconductor device Feb. 23, 2010
7667257 Capacitor and process for manufacturing the same Feb. 23, 2010
7662694 Capacitor having adjustable capacitance, and printed wiring board having the same Feb. 16, 2010
7560351 Integrated circuit arrangement with low-resistance contacts and method for production thereof Jul. 14, 2009
7560036 System and method for drug delivery and microfluidic applications using microneedles Jul. 14, 2009
7544580 Method for manufacturing passive components Jun. 9, 2009

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