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Class Information
Number: 438/397
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Stacked capacitor > Including selectively removing material to undercut and expose storage node layer
Description: Process for making a stacked capacitor having a step of selectively removing material to undercut and expose the capacitor electrode which serves as the storage node layer.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7612400 |
MIM device and electronic apparatus |
Nov. 3, 2009 |
| 7592220 |
Capacitance process using passivation film scheme |
Sep. 22, 2009 |
| 7588992 |
Integrated thin-film capacitor with etch-stop layer, process of making same, and packages containing same |
Sep. 15, 2009 |
| 7557015 |
Methods of forming pluralities of capacitors |
Jul. 7, 2009 |
| 7544580 |
Method for manufacturing passive components |
Jun. 9, 2009 |
| 7534694 |
Methods of forming a plurality of capacitors |
May. 19, 2009 |
| 7531420 |
Semiconductor memory cell and corresponding method of producing same |
May. 12, 2009 |
| 7524724 |
Method of forming titanium nitride layer and method of fabricating capacitor using the same |
Apr. 28, 2009 |
| 7524732 |
Semiconductor device with L-shaped spacer and method of manufacturing the same |
Apr. 28, 2009 |
| 7517753 |
Methods of forming pluralities of capacitors |
Apr. 14, 2009 |
| 7504300 |
Method for fabricating semiconductor memory device having cylinder type storage node |
Mar. 17, 2009 |
| 7491619 |
Methods of fabricating semiconductor devices |
Feb. 17, 2009 |
| 7482239 |
Methods of forming integrated circuitry |
Jan. 27, 2009 |
| 7468306 |
Method of manufacturing a semiconductor device |
Dec. 23, 2008 |
| 7456077 |
Method for interconnecting anodes and cathodes in a flat capacitor |
Nov. 25, 2008 |
| 7449383 |
Method of manufacturing a capacitor and method of manufacturing a dynamic random access memory device using the same |
Nov. 11, 2008 |
| 7445991 |
Methods of forming a plurality of capacitors |
Nov. 4, 2008 |
| 7439152 |
Methods of forming a plurality of capacitors |
Oct. 21, 2008 |
| 7435644 |
Method of manufacturing capacitor of semiconductor device |
Oct. 14, 2008 |
| 7416954 |
Enhanced on-chip decoupling capacitors and method of making same |
Aug. 26, 2008 |
| 7407862 |
Method for manufacturing ferroelectric memory device |
Aug. 5, 2008 |
| 7405133 |
Semiconductor device and method for manufacturing the same |
Jul. 29, 2008 |
| 7393743 |
Methods of forming a plurality of capacitors |
Jul. 1, 2008 |
| 7371636 |
Method for fabricating storage node contact hole of semiconductor device |
May. 13, 2008 |
| 7364967 |
Methods of forming storage capacitors for semiconductor devices |
Apr. 29, 2008 |
| 7361548 |
Methods of forming a capacitor using an atomic layer deposition process |
Apr. 22, 2008 |
| 7338610 |
Etching method for manufacturing semiconductor device |
Mar. 4, 2008 |
| 7332391 |
Method for forming storage node contacts in semiconductor device |
Feb. 19, 2008 |
| 7329576 |
Double-sided container capacitors using a sacrificial layer |
Feb. 12, 2008 |
| 7329572 |
Method of forming PIP capacitor |
Feb. 12, 2008 |
| 7329574 |
Methods of forming capacitor electrodes using fluorine and oxygen |
Feb. 12, 2008 |
| 7320924 |
Method of producing a chip-type solid electrolytic capacitor |
Jan. 22, 2008 |
| 7312131 |
Method for forming multilayer electrode capacitor |
Dec. 25, 2007 |
| 7312130 |
Methods of forming capacitor structures including L-shaped cavities |
Dec. 25, 2007 |
| 7312118 |
Semiconductor device and method of manufacturing the same |
Dec. 25, 2007 |
| 7298000 |
Conductive container structures having a dielectric cap |
Nov. 20, 2007 |
| 7273778 |
Method of electroplating a substance over a semiconductor substrate |
Sep. 25, 2007 |
| 7265019 |
Elastomeric CMOS based micro electromechanical varactor |
Sep. 4, 2007 |
| 7235452 |
Method for fabricating capacitor in semiconductor device |
Jun. 26, 2007 |
| 7232736 |
Semiconductor devices with capacitors of metal/insulator/metal structure and methods for forming the same |
Jun. 19, 2007 |
| 7214584 |
Method for forming semiconductor device capable of preventing bunker defect |
May. 8, 2007 |
| 7189626 |
Electroless plating of metal caps for chalcogenide-based memory devices |
Mar. 13, 2007 |
| 7186625 |
High density MIMCAP with a unit repeatable structure |
Mar. 6, 2007 |
| 7183171 |
Pyramid-shaped capacitor structure |
Feb. 27, 2007 |
| 7169665 |
Capacitance process by using passivation film scheme |
Jan. 30, 2007 |
| 7161205 |
Semiconductor memory device with cylindrical storage electrode and method of manufacturing the same |
Jan. 9, 2007 |
| 7132345 |
Method for fabricating flash memory device |
Nov. 7, 2006 |
| 7125781 |
Methods of forming capacitor devices |
Oct. 24, 2006 |
| 7112506 |
Method for forming capacitor of semiconductor device |
Sep. 26, 2006 |
| 7109090 |
Pyramid-shaped capacitor structure |
Sep. 19, 2006 |
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