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Class Information
Number: 438/397
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Stacked capacitor > Including selectively removing material to undercut and expose storage node layer
Description: Process for making a stacked capacitor having a step of selectively removing material to undercut and expose the capacitor electrode which serves as the storage node layer.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8679935 Methods of fabricating a semiconductor device having metallic storage nodes Mar. 25, 2014
8673730 Manufacturing method of charging capacity structure Mar. 18, 2014
8652926 Methods of forming capacitors Feb. 18, 2014
8637364 Semiconductor device and method of manufacturing the same Jan. 28, 2014
8609505 Method of forming MIM capacitor structure in FEOL Dec. 17, 2013
8580648 Capacitor having an electrode structure, method of manufacturing a capacitor having an electrode structure and semiconductor device having an electrode structure Nov. 12, 2013
8569817 Semiconductor device and method for fabricating the same Oct. 29, 2013
8558294 Semiconductor device and fabrication process thereof Oct. 15, 2013
8551857 Semiconductor device and method for manufacturing the same Oct. 8, 2013
8530324 Methods of fabricating microelectronic memory devices having flat stopper layers Sep. 10, 2013
8530322 Method of forming stacked metal oxide layers Sep. 10, 2013
8518773 Method of fabricating semiconductor capacitor Aug. 27, 2013
8497182 Sidewall thin film electrode with self-aligned top electrode and programmable resistance memory Jul. 30, 2013
8486801 Fabricating method of DRAM structure Jul. 16, 2013
8476688 Semiconductor device and method for manufacturing the same,which prevents leaning of a storage node when forming a capacitor having a plurality of storage nodes of "L" or "+" shape support pat Jul. 2, 2013
8461012 Device with ground plane for high frequency signal transmission and method therefor Jun. 11, 2013
8389375 Memory cell formed using a recess and methods for forming the same Mar. 5, 2013
8389374 Method for producing a microfabricated in-plane radio frequency (RF) capacitor Mar. 5, 2013
8343845 Methods of manufacturing capacitor structures and methods of manufacturing semiconductor devices using the same Jan. 1, 2013
8324069 Method of fabricating high-performance capacitors in integrated MOS technologies Dec. 4, 2012
8324049 Semiconductor device and method for fabricating the same Dec. 4, 2012
8278156 Spacer double patterning for lithography operations Oct. 2, 2012
8268695 Methods of making capacitors Sep. 18, 2012
8263457 Methods of forming a plurality of capacitors Sep. 11, 2012
8252641 Memory embedded logic semiconductor device having memory region and logic circuit region Aug. 28, 2012
8207568 Process for single and multiple level metal-insulator-metal integration with a single mask Jun. 26, 2012
8163613 Methods of forming a plurality of capacitors Apr. 24, 2012
8153486 Method for fabricating capacitor Apr. 10, 2012
8148223 1T MIM memory for embedded ram application in soc Apr. 3, 2012
8142522 Electrode stack for capacitive device Mar. 27, 2012
8138572 Semiconductor device and method for fabricating the same Mar. 20, 2012
8129240 Methods of forming a plurality of capacitors Mar. 6, 2012
8129251 Metal-insulator-metal-structured capacitor formed with polysilicon Mar. 6, 2012
8114765 Methods for increased array feature density Feb. 14, 2012
8084323 Stack capacitor of memory device and fabrication method thereof Dec. 27, 2011
8053326 Semiconductor device and method of fabricating the same Nov. 8, 2011
8053308 Method of forming a pattern and method of manufacturing a capacitor Nov. 8, 2011
8048756 Method for removing metal layers formed outside an aperture of a BPSG layer utilizing multiple etching processes including electrochemical-mechanical polishing Nov. 1, 2011
8048757 Method for fabricating capacitor utilizes a sacrificial pattern enclosing the upper outer walls of the storage nodes Nov. 1, 2011
8048758 Method for fabricating a capacitor utilizes the sacrificial pattern covering the cell region Nov. 1, 2011
8044467 Semiconductor device and method of fabricating the same Oct. 25, 2011
8017475 Process to improve high-performance capacitors in integrated MOS technologies Sep. 13, 2011
8008162 Select devices including an open volume, memory devices and systems including same, and methods for forming same Aug. 30, 2011
7998825 Method for fabricating semiconductor device Aug. 16, 2011
7960241 Manufacturing method for double-side capacitor of stack DRAM Jun. 14, 2011
7951682 Method for fabricating capacitor in semiconductor device May. 31, 2011
7919386 Methods of forming pluralities of capacitors Apr. 5, 2011
7910452 Method for fabricating a cylinder-type capacitor utilizing a connected ring structure Mar. 22, 2011
7875526 Semiconductor device with contact stabilization between contact plugs and BIT lines and method for manufacturing the same Jan. 25, 2011
7858483 Method for fabricating capacitor of semiconductor device Dec. 28, 2010

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