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Class Information
Number: 438/396
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Stacked capacitor
Description: Process for making a capacitor containing a number of capacitor plate and dielectric layers deposited successively one atop another.










Sub-classes under this class:

Class Number Class Name Patents
438/399 Having contacts formed by selective growth or deposition 358
438/397 Including selectively removing material to undercut and expose storage node layer 636
438/398 Including texturizing storage node layer 783


Patents under this class:

Patent Number Title Of Patent Date Issued
8710673 Wiring structure in a semiconductor device, method of forming the wiring structure, semiconductor device including the wiring structure and method of manufacturing the semiconductor device Apr. 29, 2014
8709956 MRAM with sidewall protection and method of fabrication Apr. 29, 2014
8709933 Interposer having molded low CTE dielectric Apr. 29, 2014
8709907 Method for manufacturing and reoxidizing a TiN/Ta.sub.2O.sub.5/TiN capacitor Apr. 29, 2014
8709906 MIM capacitor and associated production method Apr. 29, 2014
8709572 Fabrication of high gradient insulators by stack compression Apr. 29, 2014
8691704 Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material Apr. 8, 2014
8691657 Method for prevention of corona effect in a monolithic microwave integrated circuit (MMIC) Apr. 8, 2014
8691656 Methods of forming an interconnect between a substrate bit line contact and a bit line in DRAM Apr. 8, 2014
8685829 Method for forming MOS capacitor Apr. 1, 2014
8680651 Nanopillar decoupling capacitor Mar. 25, 2014
8680649 Multi-layer film capacitor with tapered film sidewalls Mar. 25, 2014
8680599 Semiconductor device and method of manufacturing the same Mar. 25, 2014
8679939 Manufacturable high-k DRAM MIM capacitor structure Mar. 25, 2014
8673730 Manufacturing method of charging capacity structure Mar. 18, 2014
8664633 Non-volatile memory devices having resistance changeable elements and related systems and methods Mar. 4, 2014
8658512 Method for forming MEMS variable capacitors Feb. 25, 2014
8658493 Manufacturing method of semiconductor device Feb. 25, 2014
8652927 Integration of non-noble DRAM electrode Feb. 18, 2014
8652926 Methods of forming capacitors Feb. 18, 2014
8652854 Manufacturing method of a semiconductor device Feb. 18, 2014
8648992 Method for manufacturing thin film capacitor and thin film capacitor obtained by the same Feb. 11, 2014
8647960 Anneal to minimize leakage current in DRAM capacitor Feb. 11, 2014
8647959 Metal-insulator-metal capacitor alloying process Feb. 11, 2014
8647943 Enhanced non-noble electrode layers for DRAM capacitor cell Feb. 11, 2014
8642400 Method of manufacturing semiconductor device including capacitor element Feb. 4, 2014
8633636 Laminated ceramic electronic component and manufacturing method thereof Jan. 21, 2014
8633533 Semiconductor integrated circuit having capacitor for providing stable power and method of manufacturing the same Jan. 21, 2014
8627259 Capacitance modification without affecting die area Jan. 7, 2014
8627258 Adjusting capacitance of capacitors without affecting die area Jan. 7, 2014
8623738 Capacitor structure and fabrication method thereof Jan. 7, 2014
8623737 Sol-gel and mask patterning for thin-film capacitor fabrication, thin-film capacitors fabricated thereby, and systems containing same Jan. 7, 2014
8618634 Semiconductor device manufacturing method and semiconductor device Dec. 31, 2013
8617960 Silicon microphone transducer Dec. 31, 2013
8609505 Method of forming MIM capacitor structure in FEOL Dec. 17, 2013
8603877 Methods of forming dielectric material-containing structures Dec. 10, 2013
8592937 Pyroelectric detector, pyroelectric detection device, and electronic instrument Nov. 26, 2013
8581331 Nonvolatile semiconductor memory device Nov. 12, 2013
8581319 Semiconductor stacks including catalytic layers Nov. 12, 2013
8580681 Manufacturing method of device Nov. 12, 2013
8580648 Capacitor having an electrode structure, method of manufacturing a capacitor having an electrode structure and semiconductor device having an electrode structure Nov. 12, 2013
8574998 Leakage reduction in DRAM MIM capacitors Nov. 5, 2013
8574997 Method of using a catalytic layer to enhance formation of a capacitor stack Nov. 5, 2013
8569818 Blocking layers for leakage current reduction in DRAM devices Oct. 29, 2013
8569142 Multi-level thin film capacitor on a ceramic substrate and method of manufacturing the same Oct. 29, 2013
8564094 Capacitors including at least two portions of a metal nitride material, methods of forming such structures, and semiconductor devices including such structures Oct. 22, 2013
8563392 Method of forming an ALD material Oct. 22, 2013
8563391 Method for forming MIM capacitor in a copper damascene interconnect Oct. 22, 2013
8558294 Semiconductor device and fabrication process thereof Oct. 15, 2013
8551857 Semiconductor device and method for manufacturing the same Oct. 8, 2013











 
 
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