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Class Information
Number: 438/396
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Stacked capacitor
Description: Process for making a capacitor containing a number of capacitor plate and dielectric layers deposited successively one atop another.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618874 |
Methods of forming capacitors |
Nov. 17, 2009 |
| 7611959 |
Zr-Sn-Ti-O films |
Nov. 3, 2009 |
| 7611958 |
Method of making a semiconductor element |
Nov. 3, 2009 |
| 7611945 |
Method and resulting structure for fabricating DRAM capacitor structure |
Nov. 3, 2009 |
| 7608881 |
Thin-film device and method of manufacturing same |
Oct. 27, 2009 |
| 7608517 |
Method for forming capacitor of semiconductor device |
Oct. 27, 2009 |
| 7608503 |
Side wall active pin memory and manufacturing method |
Oct. 27, 2009 |
| 7605037 |
Manufacturing method for an integrated semiconductor memory device and corresponding semiconductor memory device |
Oct. 20, 2009 |
| 7602599 |
Metal-metal capacitor and method of making the same |
Oct. 13, 2009 |
| 7601604 |
Method for fabricating conducting plates for a high-Q MIM capacitor |
Oct. 13, 2009 |
| 7595250 |
Semiconductor device and method of manufacturing the same |
Sep. 29, 2009 |
| 7592657 |
Semiconductor device and method of manufacturing the same |
Sep. 22, 2009 |
| 7592220 |
Capacitance process using passivation film scheme |
Sep. 22, 2009 |
| 7592218 |
Methods of forming vertical transistors |
Sep. 22, 2009 |
| 7585741 |
Methods of forming capacitors |
Sep. 8, 2009 |
| 7585723 |
Method for fabricating capacitor |
Sep. 8, 2009 |
| 7579643 |
Capacitor having high electrostatic capacity, integrated circuit device including the capacitor and method of fabricating the same |
Aug. 25, 2009 |
| 7579253 |
Method for cleaning a semiconductor wafer |
Aug. 25, 2009 |
| 7576382 |
Semiconductor integrated device and method of providing shield interconnection therein |
Aug. 18, 2009 |
| 7575940 |
Dielectric film, method of manufacturing the same, and semiconductor capacitor having the dielectric film |
Aug. 18, 2009 |
| 7573088 |
DRAM array and electronic system |
Aug. 11, 2009 |
| 7572711 |
Method of manufacturing a semiconductor device |
Aug. 11, 2009 |
| 7572710 |
Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects |
Aug. 11, 2009 |
| 7572698 |
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean |
Aug. 11, 2009 |
| 7572695 |
Hafnium titanium oxide films |
Aug. 11, 2009 |
| 7569460 |
Capacitor structure and method for preparing the same |
Aug. 4, 2009 |
| 7569453 |
Contact structure |
Aug. 4, 2009 |
| 7566611 |
Manufacturing method for an integrated semiconductor structure |
Jul. 28, 2009 |
| 7563688 |
Method for fabricating capacitor in semiconductor device |
Jul. 21, 2009 |
| 7563687 |
Method of fabricating a capacitor by using a metallic deposit in an interconnection dielectric layer of an integrated circuit |
Jul. 21, 2009 |
| 7563672 |
Methods of fabricating integrated circuit devices including metal-insulator-metal capacitors |
Jul. 21, 2009 |
| 7560796 |
Capacitor and capacitor array |
Jul. 14, 2009 |
| 7560334 |
Method and system for incorporating high voltage devices in an EEPROM |
Jul. 14, 2009 |
| 7557014 |
Semiconductor system-in-package |
Jul. 7, 2009 |
| 7557013 |
Methods of forming a plurality of capacitors |
Jul. 7, 2009 |
| 7557011 |
Semiconductor device and method for fabricating the same |
Jul. 7, 2009 |
| 7557003 |
MIM capacitor manufacturing method |
Jul. 7, 2009 |
| 7553738 |
Method of fabricating a microelectronic device including embedded thin film capacitor by over-etching thin film capacitor bottom electrode and microelectronic device made according to the meth |
Jun. 30, 2009 |
| 7550362 |
Method for manufacturing semiconductor device |
Jun. 23, 2009 |
| 7547638 |
Method for manufacturing semiconductor device |
Jun. 16, 2009 |
| 7544967 |
Low voltage flexible organic/transparent transistor for selective gas sensing, photodetecting and CMOS device applications |
Jun. 9, 2009 |
| 7544580 |
Method for manufacturing passive components |
Jun. 9, 2009 |
| 7544563 |
Methods of forming a plurality of capacitors |
Jun. 9, 2009 |
| 7544562 |
Method for manufacturing a capacitor electrode structure |
Jun. 9, 2009 |
| 7541254 |
Method of manufacturing thin film capacitor |
Jun. 2, 2009 |
| 7538007 |
Semiconductor device with flowable insulation layer formed on capacitor and method for fabricating the same |
May. 26, 2009 |
| 7538006 |
Annular damascene vertical natural capacitor |
May. 26, 2009 |
| 7535745 |
Ferroelectric memory device and method of manufacturing the same |
May. 19, 2009 |
| 7534694 |
Methods of forming a plurality of capacitors |
May. 19, 2009 |
| 7534693 |
Thin-film capacitor with a field modification layer and methods for forming the same |
May. 19, 2009 |
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