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Class Information
Number: 438/395
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Planar capacitor > Including doping of semiconductive region > Multiple doping steps
Description: Process for making a planar capacitor utilizing plural steps of incorporating electrically active dopant species into a semiconductive region of the substrate forming the first capacitor plate.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8563390 Semiconductor devices and methods of fabricating the same Oct. 22, 2013
8493709 Method of forming capacitor structure Jul. 23, 2013
8486801 Fabricating method of DRAM structure Jul. 16, 2013
8450832 Large tuning range junction varactor May. 28, 2013
8309445 Bi-directional self-aligned FET capacitor Nov. 13, 2012
8227846 Systems and methods for a continuous-well decoupling capacitor Jul. 24, 2012
RE43326 Tap connections for circuits with leakage suppression capability Apr. 24, 2012
7867869 Laminated thin-film device, manufacturing method thereof, and circuit Jan. 11, 2011
7838383 Methods for forming MOS capacitors Nov. 23, 2010
7645675 Integrated parallel plate capacitors Jan. 12, 2010
7639474 Multi-segment parallel wire capacitor Dec. 29, 2009
7566611 Manufacturing method for an integrated semiconductor structure Jul. 28, 2009
7544580 Method for manufacturing passive components Jun. 9, 2009
7538006 Annular damascene vertical natural capacitor May. 26, 2009
7456077 Method for interconnecting anodes and cathodes in a flat capacitor Nov. 25, 2008
7429507 Semiconductor device having both memory and logic circuit and its manufacture Sep. 30, 2008
7402890 Method for symmetric capacitor formation Jul. 22, 2008
7374992 Manufacturing method for an integrated semiconductor structure May. 20, 2008
7345355 Complementary junction-narrowing implants for ultra-shallow junctions Mar. 18, 2008
7332401 Method of fabricating an electrode structure for use in an integrated circuit Feb. 19, 2008
7247534 Silicon device on Si:C-OI and SGOI and method of manufacture Jul. 24, 2007
7223669 Structure and method for collar self-aligned to buried plate May. 29, 2007
7138321 Boost capacitor layout technique for an H-bridge integrated circuit motor controller to ensure matching characteristics with that of the low-side switching devices of the bridge Nov. 21, 2006
7132346 Atomic layer deposition of titanium using batch type chamber and method for fabricating capacitor by using the same Nov. 7, 2006
7091085 Reduced cell-to-cell shorting for memory arrays Aug. 15, 2006
7081385 Nanotube semiconductor devices and methods for making the same Jul. 25, 2006
7045416 Methods of manufacturing ferroelectric capacitors for integrated circuit memory devices May. 16, 2006
6951826 Silicon carbide deposition for use as a low dielectric constant anti-reflective coating Oct. 4, 2005
6940709 Storage capacitor having a scattering effect and method of manufacturing the same Sep. 6, 2005
6933590 Semiconductor device comprising plurality of semiconductor areas having the same top surface and different film thicknesses and manufacturing method for the same Aug. 23, 2005
6876059 Semiconductor integrated circuit device and method of manufacturing the same Apr. 5, 2005
6867107 Variable capacitance device and process for manufacturing the same Mar. 15, 2005
6808997 Complementary junction-narrowing implants for ultra-shallow junctions Oct. 26, 2004
6787430 Semiconductor device and method for manufacturing semiconductor device Sep. 7, 2004
6777304 Method for producing an integrated circuit capacitor Aug. 17, 2004
6767787 Methods of forming integrated circuits using masks to provide ion implantation shielding to portions of a substrate adjacent to an isolation region therein Jul. 27, 2004
6762109 Method of manufacturing semiconductor device with reduced number of process steps for capacitor formation Jul. 13, 2004
6704188 Ultra thin TCS (SiCL4) cell nitride for dram capacitor with DCS (SiH2Cl2) interface seeding layer Mar. 9, 2004
6670236 Semiconductor device having capacitance element and method of producing the same Dec. 30, 2003
6524897 Semiconductor-on-insulator resistor-capacitor circuit Feb. 25, 2003
6518070 Process of forming a semiconductor device and a semiconductor device Feb. 11, 2003
6498363 Gapped-plate capacitor Dec. 24, 2002
6495426 Method for simultaneous formation of integrated capacitor and fuse Dec. 17, 2002
6489196 Method of forming a capacitor with high capacitance and low voltage coefficient Dec. 3, 2002
6476436 Semiconductor device and method for manufacturing the same Nov. 5, 2002
6475838 Methods for forming decoupling capacitors Nov. 5, 2002
6429066 Method for producing a polysilicon circuit element Aug. 6, 2002
6380579 Capacitor of semiconductor device Apr. 30, 2002
6376292 Self-aligning photolithography and method of fabricating semiconductor device using the same Apr. 23, 2002

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