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Class Information
Number: 438/394
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Planar capacitor > Including doping of semiconductive region
Description: Process for making a planar capacitor having a step of introducing electrically active dopant species into a semiconductive region of the substrate forming the first capacitor plate.

Sub-classes under this class:

Class Number Class Name Patents
438/395 Multiple doping steps 91

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8703553 MOS capacitors with a finFET process Apr. 22, 2014
8703570 Methods of fabricating substrates Apr. 22, 2014
8664076 Method of forming a robust, modular MIS (metal-insulator-semiconductor) capacitor with improved capacitance density Mar. 4, 2014
8603884 Methods of fabricating substrates Dec. 10, 2013
8563390 Semiconductor devices and methods of fabricating the same Oct. 22, 2013
8546235 Integrated circuits including metal-insulator-metal capacitors and methods of forming the same Oct. 1, 2013
8450832 Large tuning range junction varactor May. 28, 2013
8389374 Method for producing a microfabricated in-plane radio frequency (RF) capacitor Mar. 5, 2013
8324711 Precision high-frequency capacitor formed on semiconductor substrate Dec. 4, 2012
8298888 Creating integrated circuit capacitance from gate array structures Oct. 30, 2012
8273623 Integrated high voltage capacitor having capacitance uniformity structures and a method of manufacture therefor Sep. 25, 2012
8273634 Methods of fabricating substrates Sep. 25, 2012
8247302 Methods of fabricating substrates Aug. 21, 2012
8227846 Systems and methods for a continuous-well decoupling capacitor Jul. 24, 2012
RE43326 Tap connections for circuits with leakage suppression capability Apr. 24, 2012
8114753 Buried decoupling capacitors, devices and systems including same, and methods of fabrication Feb. 14, 2012
7915134 Method of integration of a MIM capacitor with a lower plate of metal gate material formed on an STI region or a silicide region formed in or on the surface of a doped well with a high K dielec Mar. 29, 2011
7906405 Polysilicon structures resistant to laser anneal lightpipe waveguide effects Mar. 15, 2011
7867869 Laminated thin-film device, manufacturing method thereof, and circuit Jan. 11, 2011
7818855 Method of making thin-film capacitors on metal foil using thick top electrodes Oct. 26, 2010
7811885 Method for forming a phase change device Oct. 12, 2010
7736914 Plasma control using dual cathode frequency mixing and controlling the level of polymer formation Jun. 15, 2010
7645675 Integrated parallel plate capacitors Jan. 12, 2010
7566611 Manufacturing method for an integrated semiconductor structure Jul. 28, 2009
7544580 Method for manufacturing passive components Jun. 9, 2009
7439127 Method for fabricating a semiconductor component including a high capacitance per unit area capacitor Oct. 21, 2008
7419874 Method of manufacturing semiconductor device with capacitor and transistor Sep. 2, 2008
7402890 Method for symmetric capacitor formation Jul. 22, 2008
7374992 Manufacturing method for an integrated semiconductor structure May. 20, 2008
7354842 Methods of forming conductive materials Apr. 8, 2008
7332401 Method of fabricating an electrode structure for use in an integrated circuit Feb. 19, 2008
7309906 Apparatus and methods for providing highly effective and area efficient decoupling capacitance in programmable logic devices Dec. 18, 2007
7255801 Deep submicron CMOS compatible suspending inductor Aug. 14, 2007
7223669 Structure and method for collar self-aligned to buried plate May. 29, 2007
7091083 Method for producing a capacitor Aug. 15, 2006
7081385 Nanotube semiconductor devices and methods for making the same Jul. 25, 2006
7071070 Method of fabricating capacitor Jul. 4, 2006
7029971 Thin film dielectrics for capacitors and methods of making thereof Apr. 18, 2006
7029983 Methods of forming MIM type capacitors by forming upper and lower electrode layers in a recess that exposes a source/drain region of a transistor and MIM capacitors so formed Apr. 18, 2006
6949442 Methods of forming MIM capacitors Sep. 27, 2005
6876059 Semiconductor integrated circuit device and method of manufacturing the same Apr. 5, 2005
6867107 Variable capacitance device and process for manufacturing the same Mar. 15, 2005
6858513 Method for manufacturing a semiconductor device with MIS capacitors with dielectric film in common Feb. 22, 2005
6777304 Method for producing an integrated circuit capacitor Aug. 17, 2004
6773981 Methods of forming capacitors Aug. 10, 2004
6770525 Method of fabricating capacitors for semiconductor devices Aug. 3, 2004
6762109 Method of manufacturing semiconductor device with reduced number of process steps for capacitor formation Jul. 13, 2004
6677215 Method of fabricating a diode protecting a gate electrode of a field effect transistor Jan. 13, 2004
6670236 Semiconductor device having capacitance element and method of producing the same Dec. 30, 2003
6538271 Semiconductor device and method of manufacturing the same Mar. 25, 2003

1 2 3

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