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Class Information
Number: 438/394
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Planar capacitor > Including doping of semiconductive region
Description: Process for making a planar capacitor having a step of introducing electrically active dopant species into a semiconductive region of the substrate forming the first capacitor plate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8703553 |
MOS capacitors with a finFET process |
Apr. 22, 2014 |
| 8703570 |
Methods of fabricating substrates |
Apr. 22, 2014 |
| 8664076 |
Method of forming a robust, modular MIS (metal-insulator-semiconductor) capacitor with improved capacitance density |
Mar. 4, 2014 |
| 8603884 |
Methods of fabricating substrates |
Dec. 10, 2013 |
| 8563390 |
Semiconductor devices and methods of fabricating the same |
Oct. 22, 2013 |
| 8546235 |
Integrated circuits including metal-insulator-metal capacitors and methods of forming the same |
Oct. 1, 2013 |
| 8450832 |
Large tuning range junction varactor |
May. 28, 2013 |
| 8389374 |
Method for producing a microfabricated in-plane radio frequency (RF) capacitor |
Mar. 5, 2013 |
| 8324711 |
Precision high-frequency capacitor formed on semiconductor substrate |
Dec. 4, 2012 |
| 8298888 |
Creating integrated circuit capacitance from gate array structures |
Oct. 30, 2012 |
| 8273623 |
Integrated high voltage capacitor having capacitance uniformity structures and a method of manufacture therefor |
Sep. 25, 2012 |
| 8273634 |
Methods of fabricating substrates |
Sep. 25, 2012 |
| 8247302 |
Methods of fabricating substrates |
Aug. 21, 2012 |
| 8227846 |
Systems and methods for a continuous-well decoupling capacitor |
Jul. 24, 2012 |
| RE43326 |
Tap connections for circuits with leakage suppression capability |
Apr. 24, 2012 |
| 8114753 |
Buried decoupling capacitors, devices and systems including same, and methods of fabrication |
Feb. 14, 2012 |
| 7915134 |
Method of integration of a MIM capacitor with a lower plate of metal gate material formed on an STI region or a silicide region formed in or on the surface of a doped well with a high K dielec |
Mar. 29, 2011 |
| 7906405 |
Polysilicon structures resistant to laser anneal lightpipe waveguide effects |
Mar. 15, 2011 |
| 7867869 |
Laminated thin-film device, manufacturing method thereof, and circuit |
Jan. 11, 2011 |
| 7818855 |
Method of making thin-film capacitors on metal foil using thick top electrodes |
Oct. 26, 2010 |
| 7811885 |
Method for forming a phase change device |
Oct. 12, 2010 |
| 7736914 |
Plasma control using dual cathode frequency mixing and controlling the level of polymer formation |
Jun. 15, 2010 |
| 7645675 |
Integrated parallel plate capacitors |
Jan. 12, 2010 |
| 7566611 |
Manufacturing method for an integrated semiconductor structure |
Jul. 28, 2009 |
| 7544580 |
Method for manufacturing passive components |
Jun. 9, 2009 |
| 7439127 |
Method for fabricating a semiconductor component including a high capacitance per unit area capacitor |
Oct. 21, 2008 |
| 7419874 |
Method of manufacturing semiconductor device with capacitor and transistor |
Sep. 2, 2008 |
| 7402890 |
Method for symmetric capacitor formation |
Jul. 22, 2008 |
| 7374992 |
Manufacturing method for an integrated semiconductor structure |
May. 20, 2008 |
| 7354842 |
Methods of forming conductive materials |
Apr. 8, 2008 |
| 7332401 |
Method of fabricating an electrode structure for use in an integrated circuit |
Feb. 19, 2008 |
| 7309906 |
Apparatus and methods for providing highly effective and area efficient decoupling capacitance in programmable logic devices |
Dec. 18, 2007 |
| 7255801 |
Deep submicron CMOS compatible suspending inductor |
Aug. 14, 2007 |
| 7223669 |
Structure and method for collar self-aligned to buried plate |
May. 29, 2007 |
| 7091083 |
Method for producing a capacitor |
Aug. 15, 2006 |
| 7081385 |
Nanotube semiconductor devices and methods for making the same |
Jul. 25, 2006 |
| 7071070 |
Method of fabricating capacitor |
Jul. 4, 2006 |
| 7029971 |
Thin film dielectrics for capacitors and methods of making thereof |
Apr. 18, 2006 |
| 7029983 |
Methods of forming MIM type capacitors by forming upper and lower electrode layers in a recess that exposes a source/drain region of a transistor and MIM capacitors so formed |
Apr. 18, 2006 |
| 6949442 |
Methods of forming MIM capacitors |
Sep. 27, 2005 |
| 6876059 |
Semiconductor integrated circuit device and method of manufacturing the same |
Apr. 5, 2005 |
| 6867107 |
Variable capacitance device and process for manufacturing the same |
Mar. 15, 2005 |
| 6858513 |
Method for manufacturing a semiconductor device with MIS capacitors with dielectric film in common |
Feb. 22, 2005 |
| 6777304 |
Method for producing an integrated circuit capacitor |
Aug. 17, 2004 |
| 6773981 |
Methods of forming capacitors |
Aug. 10, 2004 |
| 6770525 |
Method of fabricating capacitors for semiconductor devices |
Aug. 3, 2004 |
| 6762109 |
Method of manufacturing semiconductor device with reduced number of process steps for capacitor formation |
Jul. 13, 2004 |
| 6677215 |
Method of fabricating a diode protecting a gate electrode of a field effect transistor |
Jan. 13, 2004 |
| 6670236 |
Semiconductor device having capacitance element and method of producing the same |
Dec. 30, 2003 |
| 6538271 |
Semiconductor device and method of manufacturing the same |
Mar. 25, 2003 |
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