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Class Information
Number: 438/392
Name: Semiconductor device manufacturing: process > Making passive device (e.g., resistor, capacitor, etc.) > Trench capacitor > Including doping of trench surfaces > Doping by outdiffusion from a dopant source layer (e.g., doped oxide)
Description: Process for making a trench capacitor wherein the trench surfaces are doped via outdiffusion from a doped source layer.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8609479 Gated-varactors Dec. 17, 2013
8586444 Creating deep trenches on underlying substrate Nov. 19, 2013
8461011 Method for fabricating a back contact solar cell Jun. 11, 2013
8273616 Gated-varactors Sep. 25, 2012
8247305 Method and resulting structure for deep trench polysilicon hard mask removal Aug. 21, 2012
8143659 Vertical trench capacitor, chip comprising the capacitor, and method for producing the capacitor Mar. 27, 2012
8008154 Methods of forming impurity containing insulating films and flash memory devices including the same Aug. 30, 2011
7888228 Method of manufacturing an integrated circuit, an integrated circuit, and a memory module Feb. 15, 2011
7859026 Vertical semiconductor device Dec. 28, 2010
7858484 Semiconductor device and method for producing the same Dec. 28, 2010
7727845 Ultra shallow junction formation by solid phase diffusion Jun. 1, 2010
7727831 Semiconductor device Jun. 1, 2010
7682922 Post STI trench capacitor Mar. 23, 2010
7667258 Double-sided container capacitors using a sacrificial layer Feb. 23, 2010
7550359 Methods involving silicon-on-insulator trench memory with implanted plate Jun. 23, 2009
7419872 Method for preparing a trench capacitor structure Sep. 2, 2008
7410862 Trench capacitor and method for fabricating the same Aug. 12, 2008
7332401 Method of fabricating an electrode structure for use in an integrated circuit Feb. 19, 2008
7294554 Method to eliminate arsenic contamination in trench capacitors Nov. 13, 2007
7294543 DRAM (Dynamic Random Access Memory) cells Nov. 13, 2007
7157328 Selective etching to increase trench surface area Jan. 2, 2007
7094658 3-stage method for forming deep trench structure and deep trench capacitor Aug. 22, 2006
7094659 Method of forming deep trench capacitors Aug. 22, 2006
7081385 Nanotube semiconductor devices and methods for making the same Jul. 25, 2006
7078291 Method for fabricating a deep trench capacitor Jul. 18, 2006
6969648 Method for forming buried plate of trench capacitor Nov. 29, 2005
6962847 Method for forming a self-aligned buried strap in a vertical memory cell Nov. 8, 2005
6946344 Method for forming trench capacitor Sep. 20, 2005
6946345 Self-aligned buried strap process using doped HDP oxide Sep. 20, 2005
6930012 Semiconductor memory with trench capacitor and method of manufacturing the same Aug. 16, 2005
6927123 Method for forming a self-aligned buried strap in a vertical memory cell Aug. 9, 2005
6902982 Trench capacitor and process for preventing parasitic leakage Jun. 7, 2005
6881620 Method of fabricating deep trench capacitor Apr. 19, 2005
6878600 Method for fabricating trench capacitors and semiconductor device with trench capacitors Apr. 12, 2005
6875653 DRAM cell structure with buried surrounding capacitor and process for manufacturing the same Apr. 5, 2005
6872621 Method for removal of hemispherical grained silicon in a deep trench Mar. 29, 2005
6849496 DRAM with vertical transistor and trench capacitor memory cells and method of fabrication Feb. 1, 2005
6808979 Method for forming vertical transistor and trench capacitor Oct. 26, 2004
6797582 Vertical thermal nitride mask (anti-collar) and processing thereof Sep. 28, 2004
6750111 Method for fabricating a trench capacitor Jun. 15, 2004
6750096 Trench capacitor with buried plate and method for its production Jun. 15, 2004
6682983 Method of forming a bottom electrode of a capacitor in a memory device Jan. 27, 2004
6680237 Method of manufacturing deep trench capacitor Jan. 20, 2004
6638815 Formation of self-aligned vertical connector Oct. 28, 2003
6599798 Method of preparing buried LOCOS collar in trench DRAMS Jul. 29, 2003
6593611 Semiconductor device and manufacturing method thereof Jul. 15, 2003
6566177 Silicon-on-insulator vertical array device trench capacitor DRAM May. 20, 2003
6566192 Method of fabricating a trench capacitor of a memory cell May. 20, 2003
6544856 Method for increasing the trench capacitance Apr. 8, 2003
6541347 Method of providing planarity of a photoresist Apr. 1, 2003

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